SYA3000/5000/7000

) SYA7220-02-F2) 30 24.5 1/4 (A, B port) 15 20 Manual override 1/4 (P port) 2 x 1.8 (Breathing hole) 0.9 2 40 (23.9) 18 30 24.5 EB P EA 2 x 2.2 die-cast hole (For manifold gasket positioning) 1/8 (EA, EB port) 36 3 position closed center / exhaust center / pressure center SYA7 20-F2) C8, N9 C10, N11 3 4 5 SYA 109.7 48.1 SYJA 51.6 38.1 2 x M5 x 0.8 (Pilot port) VZA 13.6 B VFA A One-touch fitting

5 Port Air Operated Valve SYA3000/5000/7000 Series

(52) (5.5) 47.6 VPA4 SYJA (49.5) (42.5) SYA7220-02-(F2) VZA 30 24.5 1/4 (A, B port) 15 VTA 20 Manual override 1/4 (P port) 2 x 1.8 (Breathing hole) 0.9 VGA 2 40 (23.9) VPA 18 30 24.5 EB P EA VPA3 2 x 2.2 die-cast hole (For manifold gasket positioning) 1/8 (EA, EB port) 36 3 position closed center / exhaust center / pressure center SYA7 20-(F2) C8, N9 C10, N11 3 4 5 109.7 48.1 51.6 38.1 2

SMC has improved product performance and reliability with the redesigned SY series valve. The SY3000 and SY5000 have the same valve width as their predecessors, but the flow has been increased by up to 80%, allowing the valve size to be reduced. A built-in strainer in the pilot valve prevents trouble caused by foreign matter. By using H-NBR seal material for the main valve and seals, Ozone

HRX-OM-R016

5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R016 Contents 6.3 Option T [High-pressure

HRX-OM-O021

5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-O021 Contents 6.2.1 Option M [DI water (Pure water) piping] . 6-2 6.3 Optional Accessories [

HRX-OM-R005

5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R005 Contents 6.2.1 Option M [DI water (Pure water) piping] . 6-2 6.3 Optional Accessories [

JXCx-OMU0026

(Unit:mm/s2) Refer to (1) to (5) on page 53 for acceleration speed setting for movement mode. Acceleration 1 to Max ACC/DEC in the basic parameters Set the deceleration from travel speed to stop. (Unit:mm/s2) Refer to (1) to (5) on page 53 for deceleration speed setting for movement mode.

LEC-OM034xx

Electric actuators/Common precautions .49 15.1 Design and selection .49 15.2 Mounting.50 15.3 Handling.51 15.4 Operating environment .52 2 - 15.5 Maintenance .53 15.6 Precautions for actuator with lock.53 16.

JXCx-OMT0002

JXC-OMT0002-C Description Input range Explanation Stroke (-) to Stroke (+) in the basic parameters Set the target position (Unit: mm) Refer to (1) to (5) on page 53 for position setting for movement mode. Position Set the acceleration to reach to travel speed. (Unit:mm/s2) Refer to (1) to (5) on page 53 for acceleration speed setting for movement mode.

10

Bore size [mm] B DA DB DL DU DC DX DE DO DR DT DS DH Z DD H10 Bore size [mm] Z MB-B03 32 46 42 32 22 10 44 14 62 9 6.6 15 7 33 154 10+0.058 0 40 52 42 32 22 10 44 14 62 9 6.6 15 7 33 158 10+0.058 0 32 160 40 164 50 190 63 190 80 238 100 238 125 279 MB-B05 50 65 53 43 30 11.5 60 20 81 10.5 9 18 8 45 182 14+0.070 0 63 75 53 43 30 11.5 60 20 81 10.5 9 18 8 45 182 14+0.070 0 MB-B08 80 95 73 64

Cylinder with Lock

Bore size B DA DB DL DU DC DX DE DO DR DT DS DH Z DD H10 32 219 40 237 50 268 63 280 80 351 100 371 MB-B03 32 46 42 32 22 10 44 14 62 9 6.6 15 7 33 213 10+0.058 0 40 52 42 32 22 10 44 14 62 9 6.6 15 7 33 231 10+0.058 0 MB-B05 50 65 53 43 30 11.5 60 20 81 10.5 9 18 8 45 260 14+0.070 0 63 75 53 43 30 11.5 60 20 81 10.5 9 18 8 45 272 14+0.070 0 MB-B08 80 95 73 64 45 14 86 30 111 12.5 11 22 10

High Purity Fluoropolymer

Replacement part type L shows the parts for LQ-GL and LQ-GM. 33 High Purity Fluoropolymer Fittings & Tubing Series LQ1 2 Dimensions LQ-GJ LQ-GK LQ-GJ 36 30 45 (adjustable) 117 76 24 LQ-GK 36 SET POS. 53 127 43 63 (Max. 50) 114 53 43 63 LQ-GM LQ-GL 50 50 207 85 342 85 LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 34 Series

F

Applicable Applicable Model D1 L1 L2 P Q A M Minimum Tube OD Fitting Size Hole Applicable Applicable Model D1 L1 L2 P Q A M Effective Tube OD mm Fitting Size Orifice (mm2) Inch d Diameter d Nylon/Urethane 1/8 3.2(1/8) KQU01-99 9.6 52 17.5 9.6 9 36.5 15.5 2 3.2 3.2 KQU23-99 9.6 52 17.5 9.6 9 36.5 15.5 3.4/2.9 5/32 4(5/32) KQU03-99 10.4 53 18 10.4 9.7 37 16 2.5 4 4 KQU04-99 10.4 53 18 10.4

KR

22.5 23 22 28 26.5 22 30 33.5 29 27 34.5 30 30 Reference dimensions after R thread installation. 15.5 17 1 4 17 10.4 14 27 21 19 26 19 14 17 6 5.6 Applicable tubing 3 8 1 8 KRH06-03S 24 26.1 KRH08-01S KRH08-02S KRH08-03S KRH10-01S KRH10-02S KRH10-03S 14 1 4 3 8 1 8 1 4 3 8 20.5 15.5 26 27.5 22.5 8 18.5 18.0 17 26.1 26.1 17 30 10 21 Connection thread (With seal) 41.5 29.5 1 2 KRH10-04S 19 53

Table of Contents

Bracket B Bracket assembly 16-2-53 10 Series ISE70/75/75H Specific Product Precautions 2 Be sure to read before handling. Set pressure range and rated pressure range Caution 1. Set the pressure within the rated pressure range. The set pressure range is the range of pressure that is possible in setting.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Refer to pages 17-5-53 through 17-5-55 regarding tubing connection and special tools. 2. Tighten the nut to the end surface of the body. As a guide, refer to the proper tightening torques shown below.

SQ1000/2000

External pilot specification Note) Enter "-BR" for both specifications. 53 Series SQ1000/2000 3. Connection method (Refer to page 52 regarding the procedures for adding stations to a manifold block.)

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

[ ] for AC Other dimensions are the same as the C4, C6. 3 68 59 70 61 66 57 6 116 107 121 112 114 105 8 148 139 155 146 146 137 10 180 171 189 180 178 169 2 52 43 53 44 50 41 20 340 331 359 350 338 329 4 84 75 87 78 82 73 5 100 91 104 95 98 89 7 132 123 138 129 130 121 9 164 155 172 163 162 153 11 196 187 206 197 194 185 12 212 203 223 214 210 201 13 228 219 240 231 226 217 14 244 235

ZPT/ZPX

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 0 0 1 1 0 5 8 16 27 53 84 0 0 0 1 1 3 1 1 2 3 5 8 Misc.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

CuSn (Au plating (Ni underplating)) Phosphor bronze (Au plating (Ni underplating)) CuSn (Au plating (Ni underplating)) Connector material TPU (UL94 HB) Soft PBT (UL94 V0) PA66 (UL94 V0) TPU (UL94 HB) Material Material of sheath (Sheath color) PUR (Purple (RAL 4001 equivalent)) PVC (Light blue) Weight Approx. 308 g Approx. 306 g 1 m: Approx. 100 g 5 m: Approx. 355 g Approx. 47 g Approx. 53