S

the total amount of vertical deflection NC D X 2 N N O O F A U T O S W I T C H E S A U T OS W I T C H C A P A B L E A U T O S W I T C H 2 Pieces S 1 Piece See Accessories Without Auto Switch D With Auto Switch S T R O K E A D J U S T M E N T S T R O K E ( I N C H) M O U N T I N G With Adjustment Bolts (Std) B With Shock Absorber BC With Cap Type Shock Absorber BCS With One Cap Type Shock

4-channel Flow Monitor ( compatible)

(Display pattern for 3rd, 4th, 5th, 8th and 9th digit from the left) Characters Q, X, Z, /, or cannot be displayed. (Display patter for 1st., 2nd., 6th., and 7th digit) Characters A to Z can be displayed (the same as the 3 digits on the right).

VQ7-6/7-8

(Values at the initial period) (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position pressure center (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 3-10-23 24 Series VQ7-8 DIN Terminal Type 2 position single : VQ7-8-FG-S single (Reverse pressure): VQ7-8-YZ-S 154 154 71.5 82.5 82.5 56(71) 56(71) 49(64) 49(64) 16(20)(B port) 16(20)(A port) 31(42) 31(42) Mounting hole 2-7.5 P R2 R1 Manual

VQ7-6/7-8

(Values at the initial period) (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position pressure center (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 3-10-23 Series VQ7-8 DIN Terminal Type 2 position single : VQ7-8-FG-S single (Reverse pressure): VQ7-8-YZ-S 154 154 71.5 82.5 82.5 56(71) 56(71) 49(64) 49(64) 16(20)(B port) 16(20)(A port) 31(42) 31(42) Mounting hole 2-7.5 P R2 R1 Manual

HRX-OM-S004

How to see the serial number S O 001 January 2014 S O 001 Year Symbol Remarks Month Symbol Remarks Serial no. 2014 S Repeated from A to Z in alphabetical order 1 O Repeated from O to Z in 2015 T 2 P alphabetical order, with O for January and Z for December 2016 U 3 Q Fig. 1-1 Position of the product label HRS Series 1.4Product Label 1-3 HRX-OM-S004 Chapter 1 Safety Instructions 1.5 Safety

Compact Vacuum Unit

Note 2) M-type plug connector is not available with the model with pressure sensor. 13A Table 3 Supply valve/release valve accessories Manual override Note 3) Supply valve/release valve model Accessories ZB1-VQ110UZB1-VQ110U-B ZB1-VQ110LZB1-VQ120UZB1-VQ120U-B ZB1-VQ110ZB1-VQ110-B Nil B Mounting screw (M1.7 x 0.59 inch (15 mm)) 2 pcs.

LEY-OM007

g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 ABS 100 80.00 3000 3000 80 40 30 100 70.00 100.00 25.00 No.00[mm] 80[mm] 1AREA [mm] k [mm] c [mm/s] b [mm/s] h 100 30 0 g [%] 80 INP 0 [%] f 40 40[%] INPON ON INP OFF P.41 7.2 0 10 20 30 40 50 60 70 80 90 100 [mm] 102 2AREA AREA1 2 [mm] k [mm] c [mm/s] b [mm/s] h 100 30 0 g [%] 80 INP 40 0 [%] f 170[mm] 2100[mm] AREAON

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

steel rod Rod side nose mounting Head side pivot mounting Double end mounting Block mounting O O O O O O O S S O O O O O O NCA S S S S S O O O S O O N N S S S S S S N N N O O O O S 1 1 1 1 1 2 1 1 1 3, 4 1 DN S S S S S S O O O O N S S O S S S O O O O N -X N N O N N N O O O O O N N N O O O O O 20N N O O O O O O N N O O O O S Data N O O O O S O O O O O O O O O 1, 5, 6 O Combination

Compact Cylinder

L B + Stroke K A + Stroke M G J W 16 Minimum lead wire bending radius 10 Auto switch Q F 4 x N through H thread effective depth C 2 x M3 x 0.5 (Port size) I D M E Z L B + Stroke K A + Stroke M G J W Standard [mm] Bore size Stroke range Without magnet for auto switch With magnet for auto switch C D E F G H I J K L M N Q W Z A B A B 12 5 to 30 19.5 16 23 19.5 6 6 23 4 21.5 M3 x 0.5 26 1.5 5

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

QQ section detail drawing CX DNotch spring force adjustment bolt 4-OA through L 4-MM depth ML QQ section 22.5 4-OB counterbore depth OL B-NN depth NL XX section -X Z WA 20Q 45 RA X0.02 Data RB RC T VB U X PW VA H NL HB HA: T groove for hex. bolt XAH7depth XL DB 2-P GB GA GC 6+0.05depth 6 o PB K J G (Plug) 30 S PA + Stroke C + Stroke FA FB SB SA FC B + Stroke A + Stroke AA + Stroke 60 Turntable

45

ERROR Wiring Simplifying System Send unit: SD-120 No. of output points, 16 points Remote I/O (RIO) System No. of output points, 16 points S-LINK System S-LINK Controller: SL-CU1 No. of output points, 16 points (Type SJ1) No. of output points, 8 points (Type SJ2) a) Type T branching multi-drop wiring (S-LINK System) b) Crossover wiring (Sensor Link System) Power supply { 24 V 0 V Transmission

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

DICOM 1 Failure Note 3) 9 ALM RA1 N OPC 2 12 MBR RA2 Electromagnetic brake interlock 13 DOCOM S/S Y000 PP 23 COM1 Y010 NP 25 10 m or less COM3 15 LA A phase pulse detector (Differential line driver) Y004 CR 5 16 LAR COM2 17 LB B phase pulse detector (Differential line driver) 18 LBR X INP 10 19 LZ Z phase pulse detector (Differential line driver) 20 LZR X Control common RD 11 14 LG X OP 21

Multi-channel Digital Sensor Monitor

Normal output Reversed output P_1(P_2)=A-(A-B)/4 n_1(n_2)=B+(A-B)/4 A = Maximum pressure H_1(H_2)= (A-B)/2 H_1(H_2)= (A-B)/2 B = Minimum pressure If setting is not necessary press the UP and DOWN buttons simultaneously for 1 second or longer. -44No.PS-OMW0005-C [F 5] Auto-shift setting Auto-shift function can be selected.

LEF-OM002xx

300 400 500 600 V(mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 Vertical Transfer 12 50 B B B 20 A 10 A A 40 H W(kg) W(kg) H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 50 12 B B 20 B A 10 A 40 H H A W(kg) W(kg) W(kg) 15 8 30 6 10 20 4 5 10 2 0 0 0 0 100 200 300 400 500

HRX-OM-W038

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

ZZ G (NN 1) x H H 10.5 5.5 10.5 5.5 A B 3H9( ) depth 2.5 +0.025 0 3.2 3.2 6.3 7 7 12 1 A B NN x M4 x 0.7 thread depth 8 4 3H9 ( ) depth 2.5 +0.025 0 HA GA A-A B-B (mm) Model F 22 25 21 26 27 N 4 4 6 6 6 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16 9 J 17 27 37 48 65 K 21.5 31.5 41.5 51.5 61.5 M 42 52 62 80 90 Z 41.5 51.5 61.5 79.5 89.5 ZZ 64 74

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

30 269 287 Z + Stroke CZ ZZ + Stroke Center trunnion(T)/Locking at head end (Hl) Hl Rl/ Wl (mm) Port Cushion valve Stroke range Bore size (mm) Z + 1/2 + Stroke Z Z TZ TY TX TDe8 TT 32 40 50 63 80 100 up to 500 97 89 74 49 50 12 17 up to 500 106 93 95 58 63 16 22 TDe8 TY up to 600 117 105 107 71 75 16 22 up to 600 117 105 130 87 90 20 28 up to 750 147 129 150 110 110 20 34 TT TX up to 750

Free-Mounting Cylinder with Air Cushion Series CU

4-T counterbore Width across flats L S + Stroke Z + Stroke (mm) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard strokes 20 25 32 M5 x 0.8 with depth 8 M5 x 0.8 with depth 8 M6

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

The voltage drop will occur due to the internal circuit of S, Z and T types (with energy saving circuits). Allowable voltage fluctuations should be within the range below.

C76

: C76RAY Without magnet, Built-in magnet Bore Stroke B S + Stroke ZZ + Stroke (mm) LD AM B C D EE G1 H K KK L LH LX N1 N2 NB NDh8 S SW WH XB ZZ 116 Bore 26 0 0.033 32 40 20 24 42.3 52.3 12 14 37.5 46.5 G1 /8 G1 /4 22 27 36 40 10 12 47 58.5 21 26 30 38 29 38 17 22 34.5 42.5 80 105 17 19 16 16 28 31 M10 x 1.5 9, 14 depth of counter bore 10 32 0 0.039 M12 x 1.75 11, 17.5 depth of counter bore