Table of Contents

LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12

Combination Cylinder

12 12 13 149 159 162 178 11 11 11 12 12 12 12 13 149 159 162 178 125 135 136 151 190 16 16 16 16 12 12 12 13 149 159 162 178 186 201 204 230 205.5 227.5 208.5 235 230.5 255 3.1-30 Fine Lock Cylinder/Double Acting Single Rod Series CLG1 Construction CL MLG CNA CNG With air cushion MNB CNS CLS CB CV/MVG CXW CXS Component Parts Material Note Description Material Note Description Rolled steel

CM2

M8 x 1.25 20 12 18 8 5 M20 x 1.5 9 15.5 13 5 28 15 24 1/8 11.5 20 0 0.033 25 45 8 13 10 12 M10 x 1.25 22 12 22 8 5.5 M26 x 1.5 9 19.5 17 6 33.5 15 30 11.5 1/8 26 0 0.033 32 45 8 13 12 20 M10 x 1.25 27 15 22 10 5.5 M26 x 1.5 12 19.5 17 6 37.5 15 34.5 14.5 1/8 26 0 0.039 40 50 11 16 14 20 M14 x 1.5 33 15 24 10 7 M32 x 2 12 21 22 8 46.5 21.5 42.5 14.5 1/4 32 Dimensions by Stroke Stroke 1 to

MTS

IC circuit 5 V, 12 V 3-wire (PNP) Relay, PLC 2-wire 12 V Grommet 5 V, 12 V 24 V 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 12 V 2-wire Lead wire length symbols: 0.5 mNil (Example) A93 3 mL (Example) A93L 5 mZ (Example) F9NWZ Since there are other applicable auto switches than listed, refer to page 8-10-22 for details.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

No 24 V 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 5 V, 12 V 12 V 2-wire 3-wire (NPN equivalent) IC circuit A96V A96 5 V Grommet A93V A90V A93 A90 100 V IC circuit Relay, PLC 2-wire 12 V 24 V 100 V or less Solid state auto switches marked with are produced upon receipt of order.

MU

V Yes Relay, PLC 2-wire 24 V Connector Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) 24 V IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2-color indication) Yes 2-wire 12 V Grommet Water resistant (2-color indication) 4-wire 2-wire With diagnostic output (2-color indication

MU

V Yes Relay, PLC 2-wire 24 V Connector Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) 24 V IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2-color indication) Yes 2-wire 12 V Grommet Water resistant (2-color indication) 4-wire 2-wire With diagnostic output (2-color indication

21

Integral Clevis (E) (mm) A 14.5 AL 12 B1 13 CD 8 CI 20 CX 12 D 8 E 20 F 13 FL 10.5 G 6 H 31 H1 5 I 27.9 KA L 12 Bore size 0 0.033 0 0.033 0 0.033 0 0.039 20 25 32 40 Width across flats 6 length 3.5 17.5 15 17 8 22 12 10 26 13 10.5 6 34 6 33.4 Width across flats 8 length 3.5 12 17.5 15 17 10 27 20 12 26 13 10.5 8 34 6 37.4 Width across flats 10 length 3.5 15 23.5 20.5 22 10 33 20 14 32 16

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

LOCK FREE LOCK FREE Pilot type Nil Internal pilot R External pilot Valve stations F: D-sub connector P: Flat ribbon cable connector (26 pins) Note Note Stations Stations Symbol Symbol 02 02 2 stations 2 stations Connector mounting position Double wiring Note 1) Double wiring 12 12 12 stations 12 stations Symbol Mounting position 02 02 2 stations 2 stations D D side Specified layout (Up to

Profile Design ISO/VDMA Air Cylinder Series CP95

11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 50 15 12 9 50 65 12 33 11 30 32 45 45 12 12 63 15 16 9 52 67 14 37 11 35 40 50 50 12 15 80 18 16 11 66 86 18 47 12.5 40 50 60 63 14 15 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting type CR Rear clevis with ball joint A B C D EN ER F G E L M N P H R (mm) 0.2 maxi JS15H7 -0.1 maxi H11 H13 H13 0.5 0.5 0.5 32 32.5 10.5 22 10 14 15 30 10 6.6

mb1

Y69B Y7NWV Y7PWV Y7BWV IC circuit 5 V, 12 V 3-wire (PNP) 12 V 2-wire Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit 24 V Grommet 5 V, 12 V Diagnostic indication (2-color indication) Water resistant (2-color indication) 12 V 2-wire Y7BA Lead wire length symbols: Solid state switches marked with are produced upon receipt of order. 0.5 mNil (Example) Y59A 3 mL (Example) Y59AL 5 mZ (

70astamb1

Y69B Y7NWV Y7PWV Y7BWV IC circuit 5 V, 12 V 3-wire (PNP) 12 V 2-wire Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit 24 V Grommet 5 V, 12 V Diagnostic indication (2-color indication) Water resistant (2-color indication) 12 V 2-wire Y7BA Lead wire length symbols: Solid state switches marked with are produced upon receipt of order. 0.5 mNil (Example) Y59A 3 mL (Example) Y59AL 5 mZ (

Free Mount Cylinder for Vacuum Series ZCUK

(mm) DQ HQ HP Model Applicable pad model Note) ZPU-X11 ZC(D)UKD10 ZC(D)UKR10 SP 4 6 8 10 13 16 20 25 32 40 50 10 16 25 40 6 8 10 13 16 20 25 32 40 50 12 18 32 13 7 32 13 9 12 15 18 31 12 2. 6 26 10 2. 6 31 12 4. 8 26 10 4. 8 31 12 7 26 10 7 31 12 9 26 10 9 12 15 18 ZCUK DQ HQ HP AMJ ZP ZC(D)UKD16 ZC(D)UKR16 AMV DQ HQ HP ZC(D)UKD20 ZC(D)UKR20 ZP 53 15 36 16 37 28 20 44 43 29 16 37 53 38

CG5-S

(mm) Bore size (mm) Stroke range A P AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA S ZZ 20 to 350 1/8 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 83 118 25 to 400 1/8 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 83 123 32 to 450 1/8 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8

CL

12 12 13 20 25 32 40 190 205.5 208.5 235 149 159 162 178 12 12 12 13 125 135 136 151 186 201 204 230 149 159 162 178 12 12 12 13 14 14 14 15 201 to 350 301 to 400 301 to 450 301 to 800 11 11 11 12 20 25 32 40 9-2-32 Series CLG1 Fine Lock Cylinder Double Acting, Single Rod Construction With rubber bumper: CLG1BN CL CL1 MLGC CNG MNB With air cushion: CLG1BA CNA CNS CLS CLQ MLGP RLQ Component

Table of Contents

F9BWV Relay, PLC 2-wire IC circuit No 5 V, 12 V 100 V or less 3-wire (NPN) IC circuit 5 V, 12 V 3-wire (PNP) IC circuit 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 mL (Example) M9NL 5 mZ (Example) M9NZ Solid state switches marked with are produced upon

RHC

16 20 24 0 1,000 2,000 3,000 Maximum speed Vmax (mm/s) 40 8 10 1/4, 3/8 500 6 40 = 0.7 30 40 3/8, 12 3/8, 12 3/8, 12 3/8, 12 3/8, 12 1000 1500 2000 2500 3000 12 18 24 30 36 0.5 0.1 0.3 20 10 Note) Refer to page 10-6-7 for maximum absorbed energy since cushioning ability may in some cases exceed the allowable cushioning ability if the cylinder is used under high speeds and large loads. 0

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

) (12) (12) (12) With manual operation of the pressure adjustment screw (14) SOL.a (14) SOL.a (14) SOL.a (14) SOL.a 22.5 90.5 22.9 56.2 Note) Reduces supply pressure from the D side of manifold.

Precautions 1

NT-02 NT-03 NT-04 Part no.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

12(11.8) 45 8.5 M6 x 1.0 7 60 4.5 10 12 34 5.5 9 23 10 49.5 7 30 10 to 50, 75, 100 60.5 M6 x 1.0 48.5 13 16(15.8) 52 8.5 M8 x 1.25 7 69 5 14 12 40 5.5 9 26 10 57 10 40 10 to 50, 75, 100 62 M8 x 1.25 50 13 16(15.8) 64 12 M8 x 1.25 8 86 7 14 12 50 6.6 11 26 14 71 10 Note) Figures in ( ) are the dimensions for applying a wrench.