Air-hydro Unit

800 400 30 Capacity of converter (cm3) 300 CC CC 25 600 500 400 100 CRA1H100-180 200 20 CRA1H100-90 300 300 100 CRA1H80-180 200 200 150 CRA1H80-90 50 CRA1H63-180 100 100 80 CRA1H63-90 CRA1H50-180 60 50 40 50 CRA1H50-90 30 Selected model of rotary actuator 160 100 63 40 20 100 200 300 400 500 600 700 800 Nominal size of converter (mm) Cylinder stroke (mm) How to read the graph (ex: when using

“Going to

Benzaldehyde 100 X Dimethylformaldehyde 100 X X Methylethylketone 100 X X Chloride Solvent Carbon tetrachloride 100 Ethylenechloride 100 X Methylenechloride 100 X Chloroform 100 X Trichloroethylene 100 X Phenol Group Phenolnitro Saturated Nitrobenzene 100 Ester/Ether Group Ethylether 100 Butyl acetate 100 X X Dioctyl phthalate Ethylacetate 100 X X Petroleumether 100 Dibutylphthalate

IDX-OM-Y002

200 4x20 700 (100) 800 355 4x20 Auto drain is included in the package.

4/5 Port Air Operated Valve SYJA3000 Series

double 3 position Ambient and fluid temperature C 10 to 60 (No freezing.)

Series AP3500

(P.124) 100 Series AP3500 Diaphragm Valve for Ultra High Purity Air operated type (For low pressure) AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Wetted Parts Material H S Wetted Parts Body Surface finish Diaphragm Seat Hastelloy C-22 Electropolish 316L SS secondary remelt Electropolish

DOC1003626

Indication Item Output *1 Circulating fluid discharge temperature 0 to 100:010V (1) Analog Analog output Output 1 signal 1 *2 Circulating fluid 0.150.0S/cm: 0.0210.0V electric conductivity *1 Circulating fluid discharge temperature 0 to 100:010V (2) Analog Analog output Output 2 signal 2 *2 Circulating fluid 0.1 to 50.0S/cm: 0.0210.0V electric conductivity *1 By default *2 For option D With

ASR

AS ASP Pressure Valve: Series ASR Flow Valve: Series ASQ B Knob ASN Knob C Knob AQ D Knob ASV A E Knob AK Adjustment Procedure 2 ASS Pressure Adjustment Speed Control ASR 1. The cylinder speed is adjusted with knobs C , F and G . First have all the knobs fully closed and then open them gradually for adjustment.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(for F, L, S & T1 kits) VVQ5000 3A 1 VVQ5000 2A 1 Electrical entry Electrical entry T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) L F Note1) L F Note1) C C Option Option Nil W Note 2) Standard IP65 enclosure Exhaust cleaner mounting Rc1 Exhaust cleaner mounting Rc1 1/2 Direct exhaust with silencer box Standard

3

Can be changed 5 At the time of shipment Analog output [V] 1 0 1050 100 10% of rated flow range 10 1000 100% of rated flow range Maximum display range Flow [L/min] 1000 L/min type Error display function When an error or abnormality arises, the location and contents are displayed.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

Wiring (Including insulating material) Power pair 1.4 mm 1.5 mm Data pair 2.05 mm 1.9 mm Connection type Spring-cage connection Rated current 4 A Power supply/3 A Communication/1 A 4 A Rating/Performance Rated voltage 48 VAC/60 VDC 125 V 48 V Contact resistance 10 m or less 30 m or less 5 m or less Insulation resistance 100 M or more 1000 M or more 100 M or more Withstand voltage 1.0

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Applicable bore size Dd9 d L L1 m t Included retaining ring I-J010C 10 8 21 M4 x 0.7 3.3 +0.048 0 3.1 8 9 CD-J010 10 3.30.030 0.060 3 15.2 12.2 1.2 0.3 Type C 3.2 CD-J010 10 3.30.030 0.060 3 15.2 12.2 1.2 0.3 Type C 3.2 I-J016C 16 8 25 M5 x 0.8 5+0.048 0 6.4 12 14 IY-J015 16 50.030 0.060 4.8 16.6 12.2 1.5 0.7 Type C 5 CD-Z015 16 50.030 0.060 4.8 22.7 18.3 1.5 0.7 Type C 5 * Retaining rings

HRX-OM-X071

TEMP READY function setting example [1] Circulating fluid temperature at start of operation: about 20 C [2] Circulating fluid setting temperature: 15 C [3] "TEMP READY Bandwidth (Upper Limit)": Set to "2.0 C". [4] "TEMP READY Bandwidth (Lower Limit)": Set to "-2.0 C". [5] "TEMP READY stabilization time": set to "60 sec". [6] "TEMP READY monitoring start time": set to "30 sec". [7] "Time

VXF

Insulation type Electrical entry Electrical option Class B G C D, T S Note) S L, Z 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) AC DC Note) Surge voltage suppressor is attached in the middle of a lead wire. 17-3-72 3 The VX series will be revised shortly.

Gun Type Ionizer

100 100 150 150 200 200 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 Distance [mm] Distance [mm] 5) Supply pressure: 0.4 MPa Flow rate consumption: 316 L/min (ANR) 6) Supply pressure: 0.5 MPa Flow rate consumption: 390 L/min (ANR) 200 200 2 s 150 150 1.5 s 100 100 50 50 0.5 s 1 s 1.5 s 0.5 s 1 s 50 50 100 100 150 150 200 200 1500 0 150 300 450

CC

When selecting a converter by its nominal diameter, the converter's oil level speed should be 0.2m/s or less. 300 25 600 500 400 100 200 20 300 CRA1H100-180 300 100 200 CRA1H100-90 200 150 CRA1H80-180 50 eSelect required function for valve unit 100 100 80 CRA1H80-90 Select a model from data , by determining the functions that

2-Apr-01 Quick Reference Auto Switch Chart with (PnP) M-8 (3 pin) & M-12 (4 pin) Connectors, Page 1/2 32, 40, 50, 63, 80 & 100 Bore sizes (Auto Switch Spacer # BMP1-032 required) 32, 40, 50, 63, 80, 100, 125 & 200 Gripper Bore sizes (sizes depend on seri

D-J51: 5ms or less MHZ2 Lead Wire Length MHZJ2 How to specify lead wire length MHQ (Example) MHL2 L D-A73 MHR Lead wire length 0.5m 3m L 5m Z N MHK MHS None Applicable to only connector type switch D-C MHC2 Note 1) Lead wire length Z: 5m Applicable to Reed switch: D-B53/B54, D-C73 (C)/C80C, D-A73 (C) (H)/A80C MHT2 Solid state switch: Made to order (Except D-F9, F9lV, F7lWV) D-A53/A54, D-Z73

JXCx-OMT0032CN

M 24V 0V 0V (2) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (3) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (LEC)OFF 22 - 7.CN3 1 2 3 4 5 TM() 1 VDeviceNet 2 CAN_L CAN(L) 3 SHIELD 4 CAN_H CAN(H) TM() 5 V+ DeviceNet DeviceNet TMCAN_HCAN_L 1201% 1/4W 23 - 8.CN1IF(CONT) 8.1 (LEC)8 LEC-CG1-1LEC-CG2-1 LEC-CG2b) M12 4pin b) M12 4pin LEC-CGD LEC-CGD LEC-CGR c) M12 4pin LEC-CG1b) M12 4pin b) M12 4pin

KP/KPQ/KPG

Burst Pressure Characteristics Curve and Operating Pressure How to Order TPS0604 B 20 5 4 Tubing designation Burst pressure MPa Burst pressure 3 Color Roll length Symbol W B R BU Y G Color White Black Red Blue Yellow Green Symbol 20 100 Length 20m bundle 100m bundle 2 1 Max. operating pressure -20 0 0 20 40 60 80 Operating temperature C 11 Related Equipment Clean Series Tubing Polyurethane

MHS

O O MHS2MHS4 MHS3 15 MHSJ3 C J O O J J J 16 MHSH3 C A O O O A A 17 / / C S (P) P O O S O P P C / ; ; ; ; C 18 4-3 3 MHS2 MHS3 MHS4 1 C C 4 2 5 mm Nm 16 M30.5 2.5 0.6 20 M30.5 2.5 0.6 25 M40.7 3 1.4 32 M50.8 4 5.1 40 M50.8 4 5.1 50 M61 5 8.6 63 M81.25 6 21.6 80 M101.5 8 24 100 M121.75 10 42.2 125 M142 12 67.7 19 MHSJ3 4 1J J 5 2 C C 6 3 mm Nm 16 M2.50.45 2 0.3

REC

4 7 9 9 0.7 500 REA Front trunnion: U Rear trunnion: T 32 42 48 52 0.3 Clevis: C, D C 22 30 35 37 0.5 REC Graph w Applicable max. stroke against lateral load* D 17 24 27 29 0.7 RHC W W W 500 82 103 116 127 0.3 Bushing (Bearing) MTS fR 62 79 89 97 U 0.5 Lateral load applied to rod end (fR) N 100 52 66 75 81 0.7 CC 50 33 43 49 53 0.3 10 23 31 36 39 0.5 T 5 18 25 29 31 0.7 Rear flange: G Front