Magnet: None, Mounting: E (Front screw clearance hole), Overall Length: Standard, Bore Size: 150 (1 1/2"), Stroke: 150 (1 1/2")

Magnet: None, Mounting: E (Front screw clearance hole), Overall Length: Standard, Bore Size: 150 (1 1/2"), Stroke: 150 (1 1/2"), Body Option: M (Male Rod End)

Magnet: D (Built-in), Mounting: E (Front screw clearance hole), Overall Length: Standard, Bore Size: 150 (1 1/2"), Stroke: 150 (1 1/2"), Body Option: C (Rubber Bumper), Auto Switch: No Switch, Lead Wire or Prewired Connector: M (1m)

Magnet: D (Built-in), Mounting: E (Front screw clearance hole), Overall Length: Standard, Bore Size: 150 (1 1/2"), Stroke: 150 (1 1/2"), Body Option: C (Rubber Bumper)

Magnet: D (Built-in), Mounting: E (Front screw clearance hole), Overall Length: Standard, Bore Size: 150 (1 1/2"), Stroke: 150 (1 1/2"), Body Option: M (Male Rod End)

Magnet: D (Built-in), Mounting: E (Front screw clearance hole), Bore Size: 150 (1 1/2"), Stroke: 150 (1 1/2")

Magnet: D (Built-in), Mounting: E (Front screw clearance hole), Bore Size: 150 (1 1/2"), Stroke: 150 (1 1/2"), Body Option: C (Rubber Bumper)

Magnet: D (Built-in), Mounting: E (Front screw clearance hole), Bore Size: 150 (1 1/2"), Stroke: 150 (1 1/2"), Body Option: C (Rubber Bumper), Auto Switch: No Switch, Lead Wire or Prewired Connector: M (1m)

Magnet: D (Built-in), Mounting: E (Front screw clearance hole), Bore Size: 150 (1 1/2"), Stroke: 150 (1 1/2"), Body Option: M (Male Rod End)

Magnet: None, Mounting: E (Front screw clearance hole), Bore Size: 150 (1 1/2"), Stroke: 150 (1 1/2"), Body Option: C (Rubber Bumper)

Magnet: None, Mounting: E (Front screw clearance hole), Bore Size: 150 (1 1/2"), Stroke: 150 (1 1/2"), Body Option: C (Rubber Bumper), Auto Switch: No Switch, Lead Wire or Prewired Connector: M (1m)

Magnet: None, Mounting: E (Front screw clearance hole), Bore Size: 150 (1 1/2"), Stroke: 150 (1 1/2"), Body Option: M (Male Rod End)

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

Construction 3 1 Component Parts Description Material No. q w e r t y u 4 Solenoid coil Body Fixed armature Armature Return spring Poppet Diaphragm assembly Resin Stainless Steel Stainless Steel Stainless Steel NBR NBR, Resin 2 5 6 7 4.3-5 Series VQ20/30 Dimensions/Series VQ20 In-line style/Grommet(G) VQ21A1-mGm-m Dotted line: Bracket mounting style (-F) 4.3-6 Series VQ20/30 For Dry Air,

VQ4000

Dust-tight, Jet-proof Enclosure: Enclosure: Optional IP65 rating Optional IP65 rating Cylinder operation speed Cylinder bore size mm Valve width mm Cv Rubber seal (Metal seal) Cylinder speed mm/s Individual wiring style 40 50 63 80 100 125 140 150 kit (Connector) C 300 24.5 2.2 (2.0) 450 600 750 Pressure: 0.5MPa, Load rate: 50% Note) Cylinder speed varies according to piping construction

The CLA2 cylinder acts as an air-operated brake with spring-backup. When external position feedback sends a signal to an air valve, the brake is actuated and fast-acting shoes grab the actuator shaft. When pressure is removed, the spring automatically locks the brake onto the shaft. Three locking mechanisms are available: spring lock, air pressure lock and air/spring pressure lock. The CLA2

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Exhaust Cleaner for Vacuum Pump AMV Series

150 175 AMV3-10 AMV6-14 AMV15-20 AMV37-20 AMV75-30 AMV160-40 R1 R1 1/2 R2 R2 80 (3B) JIS 10K FF flange 100 (4B) JIS 10K FF flange 789

LFE-OMZ0012

E Electric conductivity This means "full span" or "full scale", and indicates maximum variation width at rated value. For example, when analogue output is 1 to 5 V, F.S.=5[V] 1[V]=4[V]. (Reference: 1%F.S. = 4[V] 1% = 0.04[V]) F F.S. (full span / full scale) Fluid contact part A part that comes into physical contact with the fluid.

MHT2

MHT Pressure 0.6 MPa 0.4 MPa MHY 0.2 MPa MHW Opening/Closing angle (Both sides) MRHQ MHT2-50D L = 150 mm Misc. D20Pressure 0.6 MPa 0.4 MPa Precautions 0.2 MPa Opening/Closing angle (Both sides) Be sure to read before handling.

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Material Note Description Body Needle Bottom cover Handle Component Parts Chromated Aluminum alloy Brass Aluminum alloy Zinc alloy q w e r No. Description Material Note Body Valve guide Check valve Needle Handle Chromated Chromated Rubber lining Chromated Black painted Aluminum alloy Aluminum alloy Brass Brass Carbon steel q w e r t AS Replacement Parts ASP No. Description Part no.