CEx-OMB0060

Command error Response Block # 0 0 E E [CR] Unit No. Command Error Check sum code code When there is an error in the command block that has been sent, the response block above is sent back to the host computer side. Error code is a text data of 2 byte.

Precision Regulator

6 e @1 @1 e tValve guide tValve guide Working principle (For IR2000) When the setting knob is turned, the nozzle is closed by the flapper allowing the supply air that flows in from the upstream side to pass through the fixed throttle.

Electric Slide Table / High Precision Type 《 Battery-less absolute 》

. -3- 1Specification 1.1 How to Order L E S Y H 8 D1 E A 50 R1 CD17T (1) (2) (3) (4) (5) (6) (7) (8) (1) Size (3)Motor type (2)Motor mouting position/Motor cover direction 8 Symbol type Compatible symbol Motor mouting position Motor cover direction controller 16 25 D1 Left side JXCE1 JXCL1 D2 Right side JXC91 JXCM1 E Battery-less absolute (Step motor 24V DC) In-line D3 Upper side JXCP1 JXC51

Soft Start-up Valve AV2000/3000/4000/5000 1

Voltage AC and 100 VDC 24 VDC or less Terminal no. 1 + () With indicator light With indicator light Terminal no. 1 (+) F.R.L.

tTV2000/3000

o o E 0 0 : fr I 0 0 5 o 3 o 0 4 I 4 0 0 3 E oo, o !

Hydraulic Filters

View port View port G1/2 499 FHIA Series Construction/Seal List Differential pressure indicator Differential pressure indication switch w O-ring Blanking cap Wave washer q O-ring Hexagon socket head cap screw Cover Case OUT Relief valve Differential pressure indication switch e O-ring Element r Base seal Applicable model Set contents Replacement parts Description Part no. e O-ring FHIAN Two

Compact Cylinder with Solenoid Valve/

Axial piping Bore size (mm) F1 32 40 50 63 30 34.5 43.5 51 Bore size (mm) Stroke range (mm) A B E EA EB F HA HB J KA KB L M N OA 32 40 50 63 5 +0.2 0 5 +0.2 0 6 +0.2 0 6 +0.2 0 28 0.2 33 Note 1) 40 Note 1) 45 43 34.4 6.5 M5 x 0.8 22.5 19.8 7 34 5.4 M6 x 1 5 to 100 33 0.2 39.5 52 50 41.4 6.5 M5 x 0.8 26 23.3 7 40 5.4 M6 x 1 5 to 100 46.5 42 0.2 40.5 Note 2) 48.5 Note 2) 10 to 100 64 62 53.4

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

4 r e !0 !1 q i !2 o !3 y Component Parts No.

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Specification 1.1 AC servo motor 1.1.1 How to order L E J S 100 T9 B 500 T X400 Lead [mm] Motor type Stroke [mm] H 50 200 200 T9 AC servo motor to to A 25 1500 1500 B 10 *Refer to the applicable stroke table.

3-Position Rotary Table

MSQ Angle adjustment Range Figure 5 MSZ MSZ CRQ2X MSQX ad a ge ju Cl lt MRQ an st bo oc t r m nd en g k en tm wi in e us 10 10 se t r st on dj a ju an r on ti ot ad iti ta os ge at p ro er y nt io e b C e b n y is e ge n ad w d k an c ju lo t r C st in en g m bo st lt ju b ad M 0 ax 19 im e u ng m ra ro n ta tio Center position adjustment Table 2 R: Clockwise adjustment L: Counterclockwise

ALF400 to 900, ALT-5/-9

AV AU AF AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ALF500/600 IR Port size D VEX AMR ITV IC Model Port size VBA C D A B , 1 4 3 8 1 2 , ALF400 ALF400-06 ALF500 ALF600 ALF800 ALF900 80 85 90 100 100 100 238.5 246.5 295.5 319.5 338.5 344.5 44 46 48 51 59 63

Manifold Specifications

r VZ1000-3A-1U t VZ1000-2A-1M SUP/EXH block assembly y Note) Block pin (2 pcs.) is attached for q, e, t, y.

Micro-Mist Separator with Prefilter Series AMH

66 17 10 218 80 22 10 218 80 19 10 241 90 25 10 241 90 21 10 277 100 30 10 334 150 40 13 13 16 16 19 19 22 22 32 100 63 113 76 119 76 145 90 151 90 166 106 173 106 200 122 253 160 8 12 6 40 66 84 28 5 2.0 27 37 1/4,3/8 172 AMH250 178 1/2 8 12 6 40 66 84 28 5 2.0 27 37 3/8, 1/2 204 AMH350 3/4 210 8 14 7 50 80 100 34 5 2.3 32 37 8 14 7 50 80 100 34 5 2.3 32 37 10 14 9 55 88 110 50 9 3.2 37

PFxx-OMY0005

(Page 100) 6: Do not release the OUT side piping port of the product directly to the atmosphere without connecting piping.

MTS

7 q e @0 !0 o @2 @3 !5 u t !8 @1 r @4 w MX MTS MY 12 to 40 CY @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !

Digital Flow Switch ( compatible)

(1000 L type) [1000] 1000 L/min (2000 L type) [P_2 ] Set value of OUT2 5% of maximums rated flow range [ 25] 25 L/min (500 L type) [ 50] 50 L/min (1000 L type) [ 100] 100 L/min (2000 L type) [F 2] 3 Page 46 [H_2 ] Hysteresis of OUT2 [dtH2] ON delay time [0.00] 0.00 s [dtL2] OFF delay time [0.00] 0.00 s [CoL ] Display colour of OUT2 [1SoG] Green when ON, Red when OFF (OUT1) [F 3] [FiL ] Digital

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PRODUCT SPECIFICATIONS S E R I E S I P 5 0 0 0 / I P 5 1 0 0 IP5000 (Linear) IP5100 (Rotary) SERIES 20 100 psi SUPPLY PRESSURE STROKE SENSITIVITY LINEARITY HYSTERESIS 0.4" 3.4" 60 100 degrees WITHIN 0.1% F.S. WITHIN 0.5% F.S. WITHIN 1% F.S. WITHIN 0.75% F.S. WITHIN 1% F.S. WITHIN 2% F.S. WITHIN 0.5% F.S.

VQ5000

with AMC610-10 installed Approx. 100 with AMC610-10 installed 100 with AMC610-10 installed 100 with AMC610-10 installed 118 (135) 159 (172.5) 159 (172.5) (approx. 105 with AMC810-14 installed) (105 with AMC810-14 installed) 118 (135) (approx. 105 with AMC810-14 installed) (105 with AMC810-14 installed) 158.7 158.7 6-Rc3/4 Ports P (SUP), R (EXH) 6-Rc3/4 Ports P (SUP), R (EXH) 2-G1 (electrical

Free-Mounting Cylinder with Air Cushion Series CU

5 e y !1 Replacement parts: Seal kits Parts list Seal kit no. No. Description Cylinder tube Bore size Material No. of pcs.

Miniature Tubing & Miniature Fittings Series TU/M

Barb elbow Barb fitting Barb one-touch Reducer Port size M3 x 0.5 M5 x 0.8 Tubing size 3.2 4 Port size M3 x 0.5 M5 x 0.8 Fitting size 3.2 4 Piping for compact actuator Scale :100% Scale :100% Scale :100% Piping for compact pressure sensor 4 x 7 Scale :100% Sectional area 113.04mm2 4 75% Reduction 2 x 7 Sectional area 2 28.26mm2 Easy size reduction Reduction of the tubing size from standard