Electric Actuators

(A contact) F9N F9P F9G F9H F9GL F9HL F9B F9NL F9PL F9BL D-F9N D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL Lead screw lead N.C. (B contact) N.C. (B contact) N.C. (B contact) N.C. (B contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) 6mm 12mm A B Stroke 25 50 75 100 25mm 50mm 75mm 100mm Use a driver with CE marking.

CM2

28.5 32.5 25 27.5 31 35 60 62.5 66 70 69.5 72 75.5 79.5 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 0 0 1 6 6 6 7 12 3 3 4 9 0 0 0.5 5.5 5 5 6 11 3.5 3.5 4.5 9.5 1.5 1.5 2.5 7.5 D-B5 D-B6 D-B59W D-G5NTL D-B5 D-B6 D-C7 D-C8 D-C73C D-C80C D-C7/C8 D-H7l D-H7lW D-H7BAL D-H7lF D-C73C D-C80C D-H7C

ZP

G E D G E D G E D G ZPT20B ZPT25B 32 34 ZF 23.5 24 29 ZPT32B 20 25 22 27 5 8 12.4 10.5 25 28 37 15.6 10.5 18.9 14 ZP ZCU 10, 13, 16 Size 40, 50 Size AMJ Bellows Bellows Misc.

MGG

Specifications Series MGG Bore size (mm) 20, 25, 32, 40, 50, 63, 80, 100 Reed type D-A7/A8, D-A7H/A80H, D-A73C/A80C, D-A79W Applicable auto switches D-F7, D-F7V, D-F7BAL, D-F7F, D-F7W, Solid state D-F7WV, D-J79, D-J79C, D-J79W, D-F7NTL With the exception of the above, all other specifications and dimensions for this product are standard.

Electric Actuator/Slider Type

Size Lead Order no. 16 Wear ring holder Stainless steel Stroke 101 mm or more 20 25 LE-D-2-2 20 63 A/B/C LE-D-2-5 17 Wear ring POM Stroke 101 mm or more 32 LE-D-2-4 L LE-D-2-6 18 Screw shaft pulley Aluminum alloy 77 Electric Actuator/Rod Type Series LEY 25, 32, 63 Size Dimensions: Motor Top/Parallel LEFS LEFB LEJS LEJB LEY LEYG LECYM/LECYU Model Selection X Encoder Z-phase detecting position

CA2

(Different sides and same side) With 1 140 130 120 25 110 D-F5NTL (n 2) 2 110 + 55 (n 4) 2 n = 4, 8, 12, 16 120 + 55 (n 4) 2 n = 4, 8, 12, 16 130 + 55 (n 4) 2 n = 4, 8, 12, 16 140 + 55 (n 4) 2 n = 4, 8, 12, 16 25 + 55 n = 2, 4, 6, 8 n (Same side) 15 75 90 90 100 100 110 110 Different sides With 2 D-B5/B64 D-G5/K59 D-G5W D-K59W D-G5BAL D-G59F D-G5NTL Same side (n 2) 2 90 + 50 (n 4)

CXS

B A C D-Z7, D-Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V D-Y7WV D-Y7BAL Bore size (mm) B A C D C D C D 6 11.5 (10) 20.5 (19) 13 22 5.5 14.5 24.5 15.5 10 18.5 (17) 18.5 (17) 20 20 12.5 12.5 22.5 22.5 15 26.5 (25) 20.5 (19) 28 22 20.5 14.5 24.5 30.5 20 34 (32.5) 23 (21.5) 36 24.5 28 17 27 38 25 34 (32.5) 30 (28.5) 36 31.5 28 24 34 38 32 44 (42.5) 35 (33.5) 46 6.5 38 29 39 48 Auto switch mounting and

High Vacuum Angle Valve

C B L (mm) Grommet (G) A B C D E F G J K L M Model XLS-16-G XLS-16-C XLS-16-D XLS-16-T XLS-25-G XLS-25-C XLS-25-D XLS-25-T XLS-16-PG XLS-25-PG 104 25.5 113 41 40 38 30 35 17 23 Cabtire cable VCTF2 x 0.75, O.D.: 2.3 mm, Sheath O.D.: 6.6 mm 96 60 48 129 95 62 28 128.5 121.5 138.5 43 50 48 40 40 26 25.5 63 51 120.5 121.5 154.5 97 66 40 38 30 35 17 23 96 113 87 66.5 50 48 40 40 26

ZP

Form w 1 Material e Vacuum inlet Mounting Bracket Assembly Flat, Ball Joint Type Thin Flat Type with Ribs Deep Type Construction p. 117 10 B5 24 2.5 M5 x 0.8 5 8 16 25 25 29 4 10 Adapter Assembly p. 121 24 2.5 M6 x 1 6 8 16 25 25 29 4 40 42.5 4.9 12 25 B8 35 3.5 M8 x 1.25 8 12 40 42.5 6.6 10 B01 N01 T01 N S U F GN GS B6 ZP T D 30 2.5 Rc1/8 NPT1/8 NPTF1/8 12 16 31 25 35 3.5 40 42.5 7 1 N

ISO Standard Hydraulic Cylinder

8 ) Note 1) 14 16 18 (n 2) 2 20 + 55 8 9 10 12 14.5 D-D-F5NT 25 (n = 2, 4, 6, 8 ) Note 1) D-A5/A6/A59W cannot be mounted to 40, 50.

Table of Contents

LVC DIN terminal: D Conduit terminal: T Cable 6 to 12 LVA F S Q 27.5 34 F (Q) LVH LVD LVQ LQ R C U 25 LVN C (44) R E R TI/ TIL G1/2 E PA G1/2 A H D (S) B B A H D 2-P Port size 2-P Port size PAX 2-M Thread depth N 2-M Thread depth N PB L L K K N.C.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

(25 pins)/Cable assembly AXT100-DS25015 030 050 44 L D-sub connector cable assembly Terminal numbers Terminal no.

Secondary Batteries

Applicable cylinder series: 90-/91-CDLQ, 90-RSDQ Applicable auto switches : D-M9BW(V)L-900, D-M9BW(V)SDPC-900, D-A90L-900 Applicable bore size (mm) Cylinder series 20 25 32 40 50 Auto switch mounting brackets are not required.

CL

Double acting single rod Action MGP Bore size (mm) Auto switch model 20, 25, 32, 40 Bore size 20 25 32 40 1.0MPa Max. operating pressure MGQ D-C7/C8 D-H7 0.2MPa BM2-020 BM2-025 BM2-032 BM2-040 Min. operating pressure MGG 15 to 300mm/s Piston speed D-B5/B6 D-G BA2-020 BA2-025 BA2-032 BA2-040 Rubber bumper (Standard equipment) Cushion MGC Screw-in piping Piping D-A3A/A44A D-G39A/K39A BM3-020

MGP

XX detail Bore size (mm) d e 15 For 25 2.8 7.8 20 DM 3 8.2 25 With rear lock Refer to "Manufacture of Intermediate Strokes" on page 36 for intermediate strokes.

CQS

, 125, 150 175, 200 75, 100, 125, 150 175, 200, 250, 300 25 Standard Non-rotating Rod Anti-lateral Load Reed switch D-A90/A90V D-A93/A93V D-A96/A96V Series CQSW 12 16 5, 10, 15, 20 25, 30 7-4-20 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 7-4-12 Solid state switch D-M9N/M9NV D-M9P/M9PV D-M9B/M9BV D-F9NW/F9NWV D-F9PW/F9PWV D-F9BW/F9BWV D-F9BAL Series

Table of Contents

D U Applicable Plug Assembly (D-sub connector cable assembly) (Option) Component parts Plug MIL standard D-sub connector D-sub connector Number of terminals: 25 Cable: 25 cores x 0.3 mm2 Cable length 1.5 m 3 m 5 m 8 m Assembly part no. VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 3-7-5 6 Series VZS2000/3000 Caution 7.

AC Servo Motor Driver (Pulse input type/Positioning type ）

H T E d W T D L Max.

MB

8 MB n (Same side) 2 (Different sides or Same side) 20 25 25 MB1 (n2) 2 (n2) 2 (n2) 2 25 + 55 n = 2, 4, 6, 8 20 + 55 n = 2, 4, 6, 8 25 + 55 n = 2, 4, 6, 8 n (Same side) D-A59W CA2 1 15 25 25 D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F 15 25 25 2 (Different sides or Same side) CS1 (n2) 2 (n2) 2 (n2) 2 15 + 55 n = 2, 4, 6, 8 25 + 55 n = 2, 4, 6, 8 25 + 55 n = 2, 4, 6, 8 n (Same side) C76 1 10 25

Battery-less

Size Order no. 20 16 LE-D-2-7 25 LE-D-2-2 32, 40 LE-D-2-3 Replacement Parts/Grease Pack Applied portion Order no.