EX500-GPN2_eng

Rated current 6 Branch port C (COM A) 48 52 7 Branch port D (COM D) After maintenance is complete, perform appropriate functional inspections. Stop operation if the equipment does not function properly. Safety cannot be assured in the case of unexpected malfunction.

EXxx-OML0010CN

a) b) c) d) 2.

PFxx-OMJ0005CN

F 10(5) PFM725--C/E 25(12.5) PFM725--D/F 25(12.5) PFM750--C/E 50(25) PFM750--D/F 50(25) PFM711--C/E 100(50) PFM711--D/F 100(50) ( )CO2 ( ) CO2 () 25[L/min] 10[L/min] [L/min] [L/min] 50[L/min] 100[L/min] [L/min] [L/min] -57No.PF-OMJ0005CN-I (350[kPa]) 25[L/min] 10[L/min] [kPa] [kPa] [L/min] [L/min] 100[L/min] 50[L/min] [kPa] [kPa] [L/min] [L/min] -58No.PF-OMJ0005CN-I PFM7-(N)01/(N)02

PFxx-OMO0004CN

[P_2][n_2][] [H_2][] [F 2] OUT2 OUT1 -40No.PF-OMO0004CN-E b. () [P2L][n2L][] () [P2H][n2H][] [ H2][] [F 2] OUT2 OUT1 -41No.PF-OMO0004CN-E c. 0999,999,999 L 3 (3) [P2.1][n2.1][] (3) [P2.2][n2.2][] (3) [P2.3][n2.3][] [F 2] OUT2 /OUT1 OUT1 -42No.PF-OMO0004CN-E d.

HRX-OM-M090

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-M090 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

HRX-OM-W038

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.

HRX-OM-W002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-8 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-W002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

D D D Body (material: A6063) K C C C C E E E E E E E E KF flange F F F Fn n n n (KF) () Heater (option) Auto switch H H H H J J J J G G G G B B B B A A A A A A A A Model A B C D E Fn G H J K XLC-25 50 120 48 1 12 40 26 39 27.5 8 XLC-40 65 171 66 2 11 55 41 63 36 9 8 XL-OMO0001-A 5 Guaranteed period and range The warranty period is 2 million cycles (under SMC endurance test conditions), 18

AC Servo Motor Driver (Pulse input type/Positioning type)

Press the "UP"and "DOWN"buttons to change the set value. d. Press the "SET"button. d. Press the "SET"button. The set value will light up. The set value will light up. * When the set value is flashing, it is not registered. * When the set value is flashing, it is not registered.

MHx-OMZ0004

D-M9-5 () D-M9N-5 D-M9P-5 3 NPN PNP IC PLC DC51224V(4.528V) 10mA DC28V 40mA 10mA 0.8V (40mA 2V ) DC24V 100A ON CE RoHS D-M9-5 M2.54L 13 - 5. 5-1. 1. () 2. 3. 4. 1. 5-2. 1. 2. 3. 4. Nm JMHZ2-16D M3x0.5 0.59 14 - 3 Force Sensor LAN LAN HAN D (5x10) M5x10 3.0Nm 15 - M6x23 6.3Nm M4x10 1.0Nm 16 - P145-2.

LEF-OM006xx

ON/OFF / / 2 3 3 2 1 2 / -20- 3.3. [] LEC LEC / P.32 5.3 <> NPNPNP LEFS16A-100 NPN <> INPIN []INP ON ON INP ON OFF -21- <> No.1 01 a b c d e f g h i j k a ABSINC No. 1 2 mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 ABS 250 50.00 3000 3000 0 0 0 100 48.00 50.00 0.50 1 ABS 250 0.00 3000 3000 0 0 0 100 0.00 2.00 0.50 ABS()/ / INC()// b c d e f 00 g h i 100%DC24V 250% j 12

LEF-OM007xx

The vacuum aspiration fluence shows the fluence immediately before piping in the actuator. 6 - How to Order Step motor (servo 24VDC) / Servo motor (24VDC) 11-LEFS 25 B 6N 1 100 1 ize Controller mounting Screw mounting type Screw mounting type Nil Nil 16 16 DIN rail mounting type DIN rail mounting type D D 25 25 I/O cable length 32 32 40 40 Without cable Without cable Nil Nil Motor 1.5m

LEJ-OM004xx

so plea s e contact with our com pany . (9) Driver type *4 (7) Cable type *4 *5 *6 Com patible driv er P owe r supply v oltage [V ] Without cable Nil Without driver Nil Standard cable S LECSA1S A1 100 to 120 Robotic (Flexible cable) R A2 LECSA2S 200 to 230 *4 Whe n [With d river] is sele cted, cable is include d.

180

Operating model: MHY2-16D Opening time: 0.15 s a = 40 (mm) b = 7 (mm) c = 8 (mm) d = 5 (mm) e = 10 (mm) f = 12 (mm) A part a b c B part e f d 2.

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

Rc(PT) Thread F G(PF) N NPT Accessories Options Table: Accessory/Option combinations Available Not available Depending on model L D J T AM150 R AM250 AM350 AM450 Applicable models Accessories /Options C C D -J -R AM550 AM650 AM850 Port size N.C. auto drain N.O. auto drain Accessories 06 3/4B 01 02 03 1/8B Drain guide 1/4B 10 14 20 1/4B 1B 11/2 B Options INOUT reversal 3/8B Element service

AMG

AFF Port size 3/4B 1/8B 01 02 03 06 10 14 AMl 1B 1/4B Note) Please refer to p.4.7-7 about "How to Order" case assembly. 3/8B 11/2B Related products 2B 20 04 1/2B Option combinations Available Not available D J R AMG150 AMG250 AMG350 AMG450 Applicable model Accessories Options C C D J R Accessories/Optional specification AMG550 AMG650 AMG850 Symbol N.C. auto drain N.O. auto drain Drain guide

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

Thread Rc(PT) Table: Accessory/Option combinations Depends on model l Not available Available F G(PF) N NPT Accessories Options C C D -J -R D J T AMH150 R AMH250 AMH350 AMH450 Applicable models Port size Accessories Options AMH550 AMH650 AMH850 B 01 B 06 10 14 1 8 3 4 1B N.C. auto drain N.O. auto drain Drain guide 1/4B IN/OUT reversal -T Element service indicator Accessories 02 03 1 4 3

Flow Control Equipment

D The air in the cylinder initially opens the piston valve and the check valve and discharges rapidly through the switching valve. The fully opened piston valve closes as shown in Fig. D when the pressure in the cylinder is lower than the set pressure. Then the air passes through the check valve and becomes discharged (Fig. D).

NAMUR Interface 3 Port Solenoid Valve Series VFN200N 1

VQZ Model Weight Weight (g) VFN200N/Flow Characteristics VZ Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) VFN212N-5D-02F 240 380 VS C 2.68 2.68 b 0.40 0.40 Cv 0.72 0.72 C 5.41 5.41 b 0.31 0.31 Cv 1.38 1.38 VFN212N-5D-02F-D 2 position Single solenoid VFN Double solenoid How to Order VFN212 5 D N 02 F Z NAMUR Interface Solenoid Voltage Nil D Single solenoid Double solenoid Thread

I

|vF3l3O (B) (A) ' 0 1 c 2 Clo6td C.l49r rd d#{Ft ffi# E I S E 2 {R2XPXB1) Low power consumption -1.8WDc (F2)(P)(F1l NVF3S3O Exh.Bt C.ii.. i{VF3,(3O (B) (A) c1 c2 ryffTfl-TTrl,* Er\llt'lll/'Es) EI SE2 Pr.aqa ConL. NVF353O f l Operating prs6sur range 2 pGiEon singb 20 -129 PSI S(1.5 -gkgF) 2 pssition double-15-128 P$l (1 -gkgflcm'?)