VEX-OMY0001

02 01 02 14 20 VEX312VEX322VEX332VEX342VEX350VEX370VEX390( ) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A ( ) VEX1-18-2A VEX3-32-2A P2 AN120-M5 AN103-01 AN210-02 1) VEX1-9-1P VEX4-2A-P VEX1-11-2 VEX4-4 DXT152-14-1A NXT013-3 VO307K-1 2) 3) VEX322 VEX342 Rc A 1/8 1/4 F G VVEX2 VVEX4 B 1/4 3/8 N NPT ( ) VEX1-17 VEX4-5 C 1/2 T NPTF 11 No.VEX-OMY0001 (2) () 3 2(A) 23(P2) 12(P1) a,b 12(P1

Digital Flow Switch Series PFA For Air Series PFW For Water

Fluid velocity detection element Application examples Flow control of cooling water for welding gun Flow control of high frequency electric power supply cooling water, for wafer temperature regulation Flow control of N2 gas to prevent detection camera shimmering and lead frame oxidation Features 2 For Air For Air Digital Flow Switch Series PFA How to order Integrated display type PFA7 10 01

Speed Controller with

2 t i q o !0 !1 i q o !0 !1 Component Parts No. Description Body A Handle Body B Needle Seat ring Needle guide Material Note No.

AZ1000

2PW Delivery pressure Bonnet option Code Delivery pressure 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) Code Bonnet Standard Panel installation 4) No code P BP 01 Bonnet port (NPT 1/8 inch) 4) Panel mounting hole: dia. 1.56 inch (39.6 mm).

Hydraulic

T V V 2-Rc P Cushion adjustment screw 4-J GA F GA A MA a A MA a Air release R (max.)

Rotary Actuator/Vane Style Series CRB1

J, X, Z S, Y K, T J, X, Z Y K Z J J, T X S S, Y J, K, T X, Z J, K, T J, K, T S, Y J, K, T X, Z XA40 50, 63, 80, 100 XA41 XA42 XA43 50, 63, 80, 100 XA44 XA50 XA53 XA56 XA57 XA58 XA59 XA60 Change of double shaft length (Both sides with four chamfers) Axial: Bottom (Short shaft side) Change of double shaft length (With four chamfers, without keyway) Description Shaft type Applicable size

AC Servo Motor Driver (SSCNET /H Type)

If you turn on the power supply for the first time, refer to "LECSS2-T Operation Manual, chapter 4. -16- 6.2.1 Start up the Setup software (MR Configurator2TM) Connect the PC and LECSS2-T using the USB cable. Turn on the power of the LECSS2-T. Start application MR Configurator2.

Thermo-chiller/Rack Mount Type

Fittings and Tubing S Coupler KK Tubing T S Coupler/Stainless Steel (Stainless Steel 304) KKA Series T TU TH TD TL TLM Material Nylon Polyurethane FEP (Fluoropolymer) Modified PTFE (Soft fluoropolymer) Super PFA PFA Metal One-touch Fittings KQB2 Stainless Steel 316 One-touch Fittings KQG2 Stainless Steel 316 Insert Fittings KFG2 Fluoropolymer Fittings LQ 7 C O N T E N T S HRR Series Thermo-chiller

A_HEC-OM-K001

During Auto tuning Auto tuning failure A T 1 E R R 1 9 P V < 2 3 . 0 C # 1 A T F a i l u r e A u t o T u n i n g M O D E S h u t O f f C a n c e l : A T k e y <4> External sensor sampling cycle setting: Mode indication External Sensor Sampling Cycle. Default value: 180 sec. Setting range 10 to 999 sec.

EX120/121/122

y y t Shown with cover removed.

DOC1020530

For details, refer to "LECSN-T Operation Manual, Section 4.1.

VQ7-6/7-8

0 t t r i u w y e q r i w e q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !

AMX-OM-L025_e

Fi l t rat i on rat i ng0. 01 m ( Fi l t rat i on ef f i ci ency99. 9% ) O ut l et cl eanl i ness: 100 or l ess / f t 3 of 0. 3 m or m ore of part i cl e ( 35 or l ess / 10L ( AN R) ) To get t he best perf orm ance f rom your purchase, be sure t o read t hi s m anual caref ul l y bef ore use.

VQ7-6/7-8

0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

V

P O R T T H R E A D Nil PT* Remove (N) when ordering T NPTF T Y P E 1 Body Ported 3 Manifold Type Common SUP 5 Manifold Type Individual SUP Vacuum SERIES NZM VACUUM EJECTOR MANIFOLD D I M E N S I O N S NZM VA C U U M E J E C T O R M A N I F O L D 1 10 Stations Common supply and exhaust M a i n t e n a n c e a n d a d j u s t m e n t i s p o s s i b l e w i t h o u t d i s a s s e m b l

Tie-rod Type Hydraulic Cylinder

T V V 2 x Rc P 4 x J GA F GA A MA a CHM A MA a Cushion adjustment screw Air release R (max.)

JIS Standard Hydraulic Cylinder

2 @2 @4 t e !0 CH2G Series !3 @3 r @5 !

“Going to

, MI T el: (248) 299-0202 FAX: (248) 293-3 Quebec T el: (418) 654-1997 FAX: (418) 654-1998 Nashville,TN T el: (615) 331-0020 FAX: (615) 331-9950 Newark, NJ T el: (908) 253-3241 FAX: (908) 253-3452 Indianapolis, IN T el: (800) 762-7621 FAX: (317) 898-3896 T oronto T el: (905) 812-0400 FAX: (905) 812-8686 West Region Rochester, NY T el: (716) 321-1300 FAX: (716) 321-1865 Milwaukee,WI T el:

AMX-OM-L024_e

Fi l t rat i on rat i ng0. 01 m ( Fi l t rat i on ef f i ci ency99. 9% ) O ut l et cl eanl i ness: 100 or l ess /f t 3 of 0. 3 m or m ore of part i cl e ( 35 or l ess / 10L ( AN R) ) Fol l ow i ng envi ronm ent s l ead to cause breakage. B roken pi eces i nj uri ng i f broken.

AMX-OM-L023_e

Fi l t rat i on rat i ng0. 01 m ( Fi l t rat i on ef f i ci ency99. 9% ) O ut l et oi l m i st concent rat i on: 0. 08 ppm ( Fi l t er i nl et : 24ppm ) Fl ui d ot her t han com pressed ai r Ai r pressure m ore t han 1. 0 M Pa** and 0. 05M Pa* or l ess Fol l ow i ng envi ronm ent s l ead to cause breakage.