Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Clean Rodless Cylinder Series CYP

P (port f)] WB WA R 4-J Depth JK Inner cover holding screw TA TA WB WA TB TB R W (mm) C ED A EK B F E G H HA HB HG HI HL HP HS HT J JK K Model +0.030 0 CYP15 5.4 9.5 8 4 9.5 12.5 4H9 6.5 45 19.5 8.5 8.5 23 38.6 44 27 19.5 M6 x 1 10 21 +0.030 0 CYP32 8.6 6H9 13 12 14 6 25 8.5 75 39 19 19 39 64.9 73.5 49.5 39 M10 x 1.5 12 20 LD LW MM M N L P PA PB Q QW R T TA TB W WA WB Y Z Model CYP15 5.6

PF2A/PF2W

MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.

VS7-6

Unit/Specifications Air filter (w/auto-drain, w/manual drain) 5m Filtration Regulator 0.05 to 0.85MPa Set press.

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

7 w o Open condition Normally open !9 t y !5 i u !6 q r !1 !0 !2 Normally closed Closed condition !4 !3 Component Parts Material Note Description Material Note No. No.

Clamp Cylinder with Lock Series CLK1

cushion valve Top width across flats 3 4-M6 x 1 Thread depth 12 GA W GB 17 1010 32 3 BX 14 30 45 45 M 3 Approx.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

3 MGC Lube with double end lock CBA1-63A-PS-W CBA1-50A-PS-W CBA1-40A-PS-W CBA1-80A-PS-W CBA1-100A-PS-W 1 Lock bushing Zinc bronze die cast !4 Non-lube with double end lock 1 Lock spring Steel wire Zinc chromated !5 CBA1N63A-PS-W CBA1N50A-PS-W CBA1N40A-PS-W CBA1N80A-PS-W CBA1N100A-PS-W MGF 1 Bumper Urethane !6 @8, @9, #0, #1, #3, #4 are packed together as one set of packings.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

3 Lube with double end lock CBA1-63A-PS-W CBA1-50A-PS-W CBA1-40A-PS-W CBA1-80A-PS-W CBA1-100A-PS-W Lock bushing 1 Zinc bronze die cast !4 MG Non-lube with double end lock Lock spring 1 Steel wire Zinc chromated !5 CBA1N63A-PS-W CBA1N50A-PS-W CBA1N40A-PS-W CBA1N80A-PS-W CBA1N100A-PS-W Bumper 1 Urethane !6 MGP @8, @9, #0, #1, #3, #4 are packed together as one set of packings.

IC

0 q CONTROLLER PRESSURE OUT w e w r RUN 4 3 2 1 F.R.L. CH kPa 4 3 2 1 SW t e AV y D-IN RUN UP SET P-ON AU DOWN STOP READ r u AF i AR o Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com t y u i o IR !

CUJ

3 w e q !1 r y o e t !2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 Built-in magnet Without magnet Single acting u i r y o e w i e u !

VZ1000

(Non-locking) 2-2.6 (Mounting hole for manifold) (Mounting screw) 4-M5 x 0.8 (Piping port) 2-M3 x 0.5 depth 8 (Mounting screw) L plug connector (L) VZ1120-L-M5 M plug connector (M) VZ1120-M-M5 DIN terminal (D) VZ1120-D-M5 (Lead wire length) Applicable cable O.D. 3.5 to 7 300 300 (Lead wire length) : With light/surge voltage suppressor 3-3-12 Series VZ Made to Order Specifications: Please

VPA4

VVPA4 5 0 04 04 1 Thread type Nil Rc G NPT NPTF VP 5 port Air operated manifold F N T 5 Base size Rc A, B Port size Rc 3 4 6 1 VVPA450 Symbol 04 Port size VVPA460 1 2 3 4 Mixed 1 06 10 M (2) Piping Note 2) In the case of mixed specifications, indicate M and specify port location sparately on a manifold specification sheet.

High Power Cylinder Series RHC

0 o w !6 !5 !4 !3 y r t !1 A A Enlarged view of A Component Parts Description No.

Compact Proportional Solenoid Valve Series PVQ

Series PVQ10 Dimensions L plug connector PVQ13-L--M5 & + ! ! ' "()* % "#$ % ! ! ' ()* ( + #$ ( + Interface "#$ % & ' "()* % & ' M plug connector PVQ13-M--M5 , . & + ! ! ' "()* % "#$ % ! !

With Factory Installed

When using seal tape, leave one thread exposed when wrapping fitting or pipe. 0.25 f-t-+-t---t-+--j--+--:--t--+-I Set point -~V '" Q. ::; O Mount vertically. c.> 0.2 :; :2 l' Q. Qi '5 0 ~ 5l :r 0. 31<.-t-~-+---="I--;;::'--t-t_1 Q. 0.15 f-t.,---+t--t-+---1--+-t--t-l 8Tightening torque of mounting screw (M3) for gauge is 3-Skgf . cm.

AWM20 to AWM40

w t t q q IN OUT IN OUT e y y e r u r u Drain Drain Component Parts No.

AWM20 to AWM40

w t t q q IN OUT IN OUT e y y e r u r u Drain Drain Component Parts No.

HRX-OM-X071

Applicable model HRR050-A/W-40-T1 HRR050-A/W-40-T2 Rated flow50/60Hz common*1 L/min 16 24 Maximum pump head 50/60Hz common*2 m 50 Pump Output W 400 750 Circuit protector A 10 Recommended earth leakage breaker capacity A 10 Due to an increase in heat generation of the pump. The cooling reduces about 400W from the value in the catalog.

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only, Fixed Unit: kPa, MPa), Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: D [Panel Mount Adapter + Front Protection Cover, (ZS-46-D)]

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only, Fixed Unit: kPa, MPa), Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: A1 [Bracket A, Vertical Mounting (ZS-46-A1)]