Vacuum

l xDiinensiom:With Sp*r 2 Nllt $enies I Indluifrnl Unll/ llalu (Dimensions in millimeters Valve: Applicable valve / NVJ300 (N.O. type) Nzxi-v@K38@@@ Spacer 2 Gor side Srf,f,r,r 2,/ZX1-s,2 Ak supply passur port Exterml vacuum rreestxe aoat Valve: Appllcable valve /Air operatd Nar-v@K6 Ak opEted EXrA) GXr A) M3XO,5 r ^ T ul . oi : l f r l | t M5xO.8 c (PV pdt) Air supply Exthal v Nol6) XDi.nensidrstFo

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

A96V A96 5 V Grommet Yes 12 V A93 A93V 24 V 100 V Relay, PLC 2-wire 3-wire (NPN) M9N M9NV IC circuit 5 V, 12 V M9P M9PV 3-wire (PNP) M9B M9BV 2-wire 12 V F9NW F9NWV Relay, PLC 3-wire (NPN) Diagnostic indication IC circuit 5 V, 12 V 24 V Grommet Yes 3-wire (PNP) F9PW F9PWV (2-color display) F9BW F9BWV Improved water resistance (2-color display) 2-wire 12 V F9BA Though it is possible

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

100 V, 200 V 12 V 2-wire 24 V CJ1 No 200 V or less Relay, PLC Yes Connector 24 V or less 5 V, 12 V No IC circuit CJP Grommet Diagnostic indication (2-color indication) Yes 3-wire (NPN) 3-wire (PNP) IC circuit CJ2 5 V, 12 V Grommet 12 V 2-wire CM2 Connector 3-wire (NPN) IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2-color indication) Yes 3-wire (PNP) 24 V CG1 Courtesy of Steven

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

D-A9V/M9(V)/M9W(V)/M9A(V)L with bore sizes of 40 to 80. q BMP1-032 w BMG2-012 MGJ MGP Besides the models listed in How to Order, the following auto switches are applicable. Refer to pages 1719 to 1827 for the detailed specifications.

C76

Yes A72H A72 Grommet 200 V Reed switch Solid state switch A73H C73 A73 100 V 12 V A80H C80 A80 CJ1 IC circuit No 100 V 5 V, 12 V Relay, PLC C73C A73C 2-wire Yes 12 V 24 V Connector C80C A80C CJP IC circuit No 24 V 5 V, 12 V Diagnostic indication (2-color) A79W Grommet Yes CJ2 F79 H7A1 F7NV 3-wire (NPN) IC circuit 5 V, 12 V F7P H7A2 F7PV CM2 Grommet 3-wire (PNP) J79 H7B

C76

Yes A72H A72 Grommet 200 V Reed switch Solid state switch A73H C73 A73 100 V 12 V A80H C80 A80 CJ1 IC circuit No 100 V 5 V, 12 V Relay, PLC C73C A73C 2-wire Yes 12 V 24 V Connector C80C A80C CJP IC circuit No 24 V 5 V, 12 V Diagnostic indication (2-color) A79W Grommet Yes CJ2 F79 H7A1 F7NV 3-wire (NPN) IC circuit 5 V, 12 V F7P H7A2 F7PV CM2 3-wire (PNP) Grommet J79 H7B

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

( 8 . 7 2 ) 2 . 3 1 ( 1 . 9 2 ) 0 . 6 2 ( 3 . 7 5 ) 6 . 6 2 ( 7 . 8 5 * n o i t a c i f i c e p s h c t i w s t a o l F e g a t l o V A 5 2 . 0 V 0 0 1 A 5 2 . 0 V 0 0 1 l e v e l h g i h r o f 2 , ) N O n w o d t a o l F ( l e v e l w o l a r o f 1 x i f f u S d d A . e l b a l i a v a s i h c t i w s t a o l f l e v e l h g i h d n a l e v e l w o l a h t o B : h c t i w s t a o l

Compact Cylinder with Lock Series CLQ

V,12 V Magnetic field resistant (2-color indication) 2-wire (Non-polar) 3-wire (NPN equivalent) IC circuit A96V A96 5 V A72 A72H Grommet 200V 100V Reed switch A93V A90V A93 A90 12 V IC circuit 100 V or less Relay, PLC 5 V,12 V 12 V 2-wire A73C A80C A79W 24 V Connector IC circuit 24 V or less 5 V,12 V Diagnostic indication (2-color indication) Grommet Solid state auto switches

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Load voltage Lead wire length (m) 0.5 (Nil) AC Wiring (output) Indicator light DC Auto switch model Applicable load Type Special function Electrical entry 3 (L) 5 (Z) Perpendicular In-line 3-wire (NPN) 5 V, 12 V M9N M9NV IC circuit 3-wire (PNP) M9P M9PV Solid state switch M9B M9BV 2-wire 12 V Relay PLC Grommet Yes 24 V 3-wire (NPN) F9NW F9NWV 5 V, 12 V IC circuit Diagnostic indication

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Load voltage Lead wire length (m) 0.5 (Nil) AC Wiring (output) Indicator light DC Auto switch model Applicable load Type Special function Electrical entry 3 (L) 5 (Z) Perpendicular In-line 3-wire (NPN) 5 V, 12 V M9N M9NV IC circuit 3-wire (PNP) M9P M9PV Solid state switch M9B M9BV 2-wire 12 V Relay PLC Grommet Yes 24 V 3-wire (NPN) F9NW F9NWV 5 V, 12 V IC circuit Diagnostic indication

Compact Cylinder with Solenoid Valve/

V Relay, PLC Yes Grommet 24 V 3-wire (NPN) Diagnostic indication 2-color indication IC circuit 5 V, 12V 3-wire (PNP) 2-wire 12 V A96 A93 A90 A96V A93V A90V IC circuit 5 V 3-wire (NPN equivalent) Yes 100 V 12 V Grommet Relay, PLC 24 V 2-wire 100 V or less 5 V, 12 V IC circuit Solid state auto switches marked with are produced upon receipt of order.

Modular F.R.L. Unit

(The SI unit type is provided for use in Japan.) 01 02 03 04 06 10 1/8 V 1/4 V V V 3/8 V V 1/2 V 3/4 V V 1 V 17 Series AC Spacers and Brackets Accessories Spacer (X) D Center of F.R.L. body C 1 X-X B X RELEASE 2 Y200 Y400 X Applicable model A 6 3 4 5 5 B 27 35.5 47 57 61 C 15 18.5 26 31 33 D 33 48 59 65 70 Model Y100 Y200 Y300 Y400 Y500 Seal AC10, AC10A, AC10B AC20 AC25, AC30 AC40 AC40-

Vacuum

l xDiinensiom:With Sp*r 2 Nllt $enies I Indluifrnl Unll/ llalu (Dimensions in millimeters Valve: Applicable valve / NVJ300 (N.O. type) Nzxi-v@K38@@@ Spacer 2 Gor side Srf,f,r,r 2,/ZX1-s,2 Ak supply passur port Exterml vacuum rreestxe aoat Valve: Appllcable valve /Air operatd Nar-v@K6 Ak opEted EXrA) GXr A) M3XO,5 r ^ T ul . oi : l f r l | t M5xO.8 c (PV pdt) Air supply Exthal v Nol6) XDi.nensidrstFo

CNS

100 st 0.2 280 V W 0.1 100 200 300 400 500 Maximum speed: V (mm/s) Cylinder stroke Movement distance of load Step (2) Find the bore size.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

3 Product image Socket Socket Plug Plug Socket For DeviceNetTM (Plug, A-coded) Number of functional poles M12: 5 pins Key type A-coded (Normal key) DeviceNetTM / CANopen2 5 3 4 4 3 5 1: DRAIN: NC 2: V+: NC 3: V: NC 4: CAN H 5: CAN L 1: DRAIN 2: V+ (Red) 3: V (Black) 4: CAN H (White) 5: CAN L (Blue) 1: 2: 3: CAN GND 4: CAN H 5: CAN L 1 2 Pin assignment 2 1 Plug, A-coded Socket, A-coded (

VXA21/22

VX t Vaccuum pressure (Torr) The absolute pressure is expressed. 0 Torr=Absolute pressure 0.760 Torr=Atmospheric pressure (Gauge pressure 0 Kgf/cm2) (1 torr=1.33 X 102 Pa) VNl VQ Electrical Terms q Volt-ampere(VA) Volt-ampere is the product of voltage (V) and current (A). Power dissipation (W): For AC , W=V/A cos.

CHKD/CHKG

CHN CHM Examples of D-A9(V), M9(V), M9W(V), M9A(V) models mounted on CHKD.

Table of Contents

Reed Switch: Direct Mounting Style D-A90(V)/D-A93(V)/D-A96(V) . Solid State Switch: Direct Mounting Style D-M9N(V)/D-M9P(V)/D-M9B(V) . 2-color Indication, Solid State Switch: Direct Mounting Style D-F9NW(V)/D-F9PW(V)/D-F9BW(V) . Safety Instructions . Warning . Actuator Precautions . Caution on Design . Selection . Mounting . Piping. Lubrication . Air Supply. Operating Environment.

3 Port Solenoid Valve Rubber Seal Series SY100 1

S070 Entry is the same as standard products. 0 V Body option VQ Nil A Standard Large flow capacity Standard 0.55 W VKF Energy-saving type Rated voltage 0.22 W 5 6 VQZ 24 VDC 12 VDC 0 W 62 ms VZ VS Applied voltage VFN 24 V 0 V High flow type 0.8 W Energy-saving type 0.3 W 0 W 62 ms Low Wattage Specifications (0.45 W) How to Order

3 Port Solenoid Valve Rubber Seal Series SY100

standard products. 0 V Body option VQ Nil A Standard Large flow capacity Standard 0.55 W VKF Energy-saving type Rated voltage 0.22 W 5 6 VQZ 24 VDC 12 VDC 0 W 62 ms VZ VS Applied voltage VFN 24 V 0 V High flow type 0.8 W Energy-saving type 0.3 W 0 W 62 ms Low Wattage Specifications (0.45 W) How to Order SY1 X200 Entry is the