SMC Corporation of America
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q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

units Flow range: 0.5 to 4 L/min (symbol 04) (reference value) Nil S P W -56No.PF-OMW0004-B Flow range: 2 to 16 L/min (symbol 20) (reference value) Nil S P W -57No.PF-OMW0004-B Flow range: 5 to 40 L/min (symbol 40) (reference value) Nil S P W -58No.PF-OMW0004-B Operating pressure and proof pressure Nil: Without unit S: Flow adjustment valve P: Stop valve W: Flow adjustment valve + Stop valve

B t 120 327 188 (519) w w 84 OUT 2-R 1 r IN 53 DRAIN G 1/4 Note Parts list Dimensions (mm) A B No.

5 w !9 !0 !7 u !7 w @1 !9 !3 @3 !2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

DC+ 1 Brown q N.C. 2 Not used w DC 3 Blue e IN: 1 to 5 V 4 White r Power supply/Output connector (8P) Power supply/Output connector (accessory) i u y t r e w q Pin No. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

40 40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 19 21.5 23 33.5 34 34.5 8 5 to 50 11.5 5 to 50 H J L P Q QA R S SA T W Y Z Model ZC(D)UKD16 ZC(D)UKD20 ZC(D)UKD25 ZC(D)UKD32 ( ): In the case of a mounted auto switch.

9.4.15 HRL200-W-40-T2 CH1 .9-19 9.4.16 HRL100/200-W-40-T2 CH2 .9-19 9.5 Pump Capacity . 9-20 9.5.1 HRL100-A/W-40 CH1 .9-20 9.5.2 HRL200-A/W-40 CH1 .9-20 9.5.3 HRL300-A-40 CH1 .9-21 9.5.4 HRL-A/W-40 CH2 .9-21 9.5.5 HRL100/200/300-A/W-40-T2 CH1 .9-22 9.5.6 HRL300-A-40-T3 CH2 .9-22 9.6 Types of Hazard Labels . 9-23 9.6.1 Positions of danger warning label .9-24 9.7 Standards . 9-25 9.8 Daily

Angle K 5 Z 10 M 10 P 0.5 DIN rail bracket Q 1 2 3 5 Symbol Type R Angle Nil None S T W Include Z 10 1-2-2.

5 t r !9 !8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o !3 y !1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.

*6 23 40 50 Standby power consumption when operating [W] *7 16 15 48 43 48 104 Max. instantaneous power consumption [W] *8 Type Non-magnetizing lock specifications Lock unit Holding force [N] 20 39 78 78 157 108 216 *9 Power consumption [W] *10 2.9 5 Rated voltage [V] 24 VDC 10% * 1 The speed is dependent on the workload.

Refer to p.2.8-4 and 2.8-5 for the details of effective holding force and allowable overhanging distance. MHR MHK MHS MHC2 MHT2 MHY2 MHW2 MRHQ Auto switch 2.8-9 Series MHY2 Construction Closed 10 16 20, 25 r o !8 e w !7 t !5 r o !8 e !6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !

Port lype t f f i XCl6l Airlon:NP a N||mhar ^l cwitihac a Number of switches --a:T 1 p" With auto switch . Mounting ends tal ioh hole Both J r,rr.rt o, n ,r o*nnt tnoit -.r, ,.rt*lt r Type ol auto switch (Rail mounled) @ Bore size . Reed switch isee P.11 lor detaits.) Cylinder stroke (mm) 1 0 , 1 5 , 2 0 1 0 , 1 5 , 2 0 Solid state switch (see P.ll tordetails.)

LVC DIN terminal: D Conduit terminal: T Cable 6 to 12 LVA F S Q 27.5 34 F (Q) LVH LVD LVQ LQ R C U 25 LVN C (44) R E R TI/ TIL G1/2 E PA G1/2 A H D (S) B B A H D 2-P Port size 2-P Port size PAX 2-M Thread depth N 2-M Thread depth N PB L L K K N.C.