MXS Series Air Slide Table

70 76 80 ZZ 108 108 108 118 131 172 213 271 311 N 4 4 4 4 6 6 6 8 8 G 22 22 22 22 20 26 32 40 30 H 45 45 45 55 35 35 35 38 40 NN 2 2 2 2 3 4 5 6 7 I 12 12 12 12 12 33 50 67 82 J 47 47 47 57 70 90 114 155 180 K 35 45 55 65 75 100 125 150 175 Z 90.5 90.5 90.5 100.5 113.5 154.5 195.5 253.5 293.5 MXS25-10 MXS25-20 MXS25-30 MXS25-40 MXS25-50 MXS25-75 MXS25-100 MXS25-125 MXS25-150 162 218 258 64

MXH Series Compact Slide

4 10 10 20 10 64 4 15 74 25 20 4 20 74 25 4 20 25 40 84 4 30 30 40 30 84 4 40 20 94 50 20 6 50 104 70 25 6 25 60 70 114 6 30 30 36 Compact Slide MXH Series Auto Switch Specifications Auto Switches/Proper Mounting Position for Stroke End Detection A 22 D-A9 D-F9 D-F9 W B W 20 (22) A D-A9 V D-F9 V D-F9 WV W B Dimension inside ( ) is for model D-A9 V.

Process Pump <Fluororesin Type> Series PA3000

2-M5 with depth 8 139 10 10 120 95 Bottom view without foot SUP (P1) Rc, G, NPT, NPTF 1/4 Manual reset Air pilot actuation reset (Rc, G, NPT, NPTF 1/8) FLUID OUT Rc, G, NPT, NPTF 3/8 140 8 110 14 6 81 84 67 30 13 26 10 FLUID IN Rc, G, NPT, NPTF 3/8 EXH (P2) Rc, G, NPT, NPTF 1/4 PAP331m(with tube inlet/outlet) P11m P13m 152 2-M5 with depth 8 4-7 139 64 10 10 120 95 Bottom view without foot

Electro-Pneumatic Valve NVEP/NVEF Series

UJ I 2-Forled \bBion DIMENSIONS A B c o E F G H J K M P R s T 1.57 (40) 2.52 (64) 2.20 (56) 1.77 (45) 4.80 (1221 1.97 {50} 0.98 (25) 1 . 1 0 (28) 0.51 (13) 4.45 (113) ?

PC Wiring System Series PCW

Compatible PLC Manufacturers Input 32 points Input 32 points Output 64 points OMRON Corporation Mitsubishi Electric Corporation Fuji Electric Co., Ltd. Hitachi Ltd.

Clean Room Regulator/Fluoro Resin Type Series SRF30

1 2 SMC 4-5.5 41.7 Integral fittings/SRF30-S IN OUT 67.7 32.3 52 (112) Pilot port identification symbols and port types (marking) Symbol R N Port type Rc 1/8 NPT 1/8 12 R 75 52 64 1 2 SMC 4-5.5 41.7

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(3.6Cv) 33 (1.8Cv) 28 (1.6Cv) PB 36 (2.0Cv) 75 (4.2Cv) 78 (4.3Cv) AEA Exhaust side effective area (mm) when P2 = 0.5MPa (72.5psi) 68 (3.8Cv) 38 (2.1Cv) 69 (3.8Cv) BEB Dimensions (mm) 1in=25.4mm SMC 64 181 2 B SMC D 68.5 P 1 X 12 5 R1 3 R2 PE T A 4 41 103 282 40 Base Mounted Type Series VQ5000 Flow Characteristics Conditions Upstream pressure: 0.7MPa ARBQ5000-00-A (PA) ARBQ5000-00-B (PB)

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

(Initial value) Note 3) Value for high pressure type (1.5W) specifications Note 4) Value for low power consumption (0.5W) specifications 64 Series VQ1000/2000 VQ1000/Flat Cable Kit with Terminal Block Stations VV5Q11G0-(D) Broken lines and dimensions inside ( ) indicate type [-D] (with DIN rail mounting bracket).

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6-4.4 6-6.6 8-8.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 40 50 65 70 88 90 P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYA/In-line type C D G Fd C (K flange) B H 45 A E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

PE port 3/8 NPTF P(SUP) port M5 x 0.8 External pilot port 21 18 (Only external pilot type (R)) 44.5 1/4 NPTF 11 50 R(EXH) port L type plug connector (L) DIN connector (Y) 92 300 (Lead wire length) 96 MAX.10 88.5 92.5 Indicator light Pg.7 Applicable cord O.D. 3.5 to 7 64 Cover diameter 1.5 Cross sectional area 0.23mm2 93.5 R P 86 3 1 R P 3 1 M type plug connector (M) 98.5 (Lead wire lengh)

DOC1020530

When setting up the device as a generic device Set the I/O communication format (input) Output data to Instance 150 and map size to 64 bytes. Set the I/O communication format (output) Input data to Instance 100 and the map size to 64 bytes.

LEC-OM02904

5 515-35 5.1 (No.PA) 52 5.1.1 53 5.1.2 54 5.1.3 55 5.1.4 56 5.1.5 57 5.1.6 57 5.1.7 58 5.1.8 59 5.1.9 5-10 5.1.10 5-11 5.2 (No.PB) 5-12 5.2.1 5-12 5.2.2 5-13 5.3 (No.PC) 5-20 5.3.1 5-20 5.3.2 5-21 5.3.3 5-24 5.3.4 5-27 5.4 (No.PD) 5-28 5.4.1 5-28 5.4.2 5-29 5.4.3 master-slave 5-33 6 616-12 6.1 62 6.1.1 62 TM 63 6.1.2 MR Configurator2 6.2 64

AC Servo Motor Driver (SSCNET Type)

Troubleshooting . 63 10.1 Alarms and warning list .63 10.2 Troubleshooting at power on .64 10.3 Alarm Display .65 -2- LECSS Series / Driver Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

AC Servo Motor Driver (SSCNET /H Type)

(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D 46 D 62 E 47 E 63 F 48 F 64 -14- 5. Parameter list (Driver side) Please configure the appropriate parameters to enable correct driver operation. Refer to [5.

LEC-W_C

LE ACT Controller(ACT Controller)2 /ACT Controller ACT Controller OS Windows7 64 LE-W2 Windows XP (32 ) Windows 7 (32 ) Windows 7 (64 ) ACT Controller / LECP6 (DC24V) LECA6 (DC24V) LECPA () ACT Controller 2 IO 5 - 3. 3.1 2 ABS()INC() ABS() 100mm 100mm INC() 30mm 30mm 30mm 6 - 0()(0 ) () 12 AREA ON (AREA)12 2 1 2 12 INP()ON INP()ON( ) 7 - 3.2 ABSINC3.1 INP ON INP ON 8 - () 12

ZQ-OM01401

No.ZQ-OM01401-B 8.6 1 2 32 4 5kPa ( ) 5 6) 7 31 - No.ZQ-OM01401-B 9. 9.1 ZQA [] 5 to 50 () 2] 1) 20 [m/s 2] 2) 100 [m/s CE / UKCA (EMC RoHS ) 1) 10~150Hz X,Y,Z 2 () 2) X,Y,Z 3 () ZQ05A ZQ07A ZQ10A [mm] 0.5 0.7 1.0 [MPa] 0.35 0.43 1) -80 [kPa] 1) 5 10 22 [L/min (ANR) ] 1) 15 25 47 [L/min (ANR) ] (P) 0.3 to 0.5 2) 0 to 0.45 3) [MPa] (PD) [MPa] 0.75 8 6 4 65 68 70 4) () 64

CC-Link-E

SW 40 SW 20 SW 10 SW 08 SW 04 SW 02 SW 01 Rat e BS4 BS2 BS1 0 O FF O FF O FF O FF O FF O FF O FF 0( 156kbps) O FF O FF O FF 1 O FF O FF O FF O FF O FF O FF O N 1( 625kbps) O FF O FF O N 2 O FF O FF O FF O FF O FF O N O FF 2( 2. 5M bps) O FF O N O FF : : : : : : : 3( 5. 0M bps) O FF O N O N 64 O N O N O FF O FF O N O FF O FF 4( 10M bps) O N O FF O FF D i gi t of 10 D i gi t of 1 Setting

EXxx-OMN0029CN

PGM 6 2 62 9 6 3 63 6 4 : : PGM 9 DeviceNetPGMHW/SW ON -21No.EX-OMN0029CN-D V_SEL SI () Settings1 SI 1 2 OFF OFF 32 4 byte() OFF ON 24 3 byte ON OFF 16 2 byte ON ON 8 1 byte Baud Rate EX600 Settings1 3 4 OFF OFF 1 Mbps() OFF ON 500 kbps ON OFF 250 kbps ON ON 125 kbps 1 Mbps() -22No.EX-OMN0029CN-D Settings2 1 2 OFF OFF 0 () 0 byte OFF ON 1 + 4 byte ON OFF 2 ++(10 ) 6 byte ++(64

EX260-SMJ_eng

M3 x 30 screw for connection to the valve manifold 64 6 4 Seal cap 1 pc. seal cap for unused fieldbus interface connector (BUS OUT) : If the number of occupied stations is set to 00 or a number above 64, the "L ERR" LED will turn on. DANGER indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.

VAC (50/60 Hz)Three phase 170 to 253 VAC, Single phase 170 to 253 VAC0.9Single phase 200 to 230 VAC (50/60 Hz)Single phase 170 to 253 VAC0.2CC-Link communication (Ver. 1.10)CC-Link Ver. 1.10 compliant cable (Shielded 3-core twisted pair cable) 11 to 642.5 M4000.2 or more1 station occupied (Remote I/O 32 points/32 points)/(Remote register 4 words/4 words) 2 stations occupied (Remote I/O 64