25

Bar length symbol 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 ZVB IZS40-E3 IZS40-E4 IZS40-E5 2 1 1 1 2 2 2 1 2 Standard model no.

Series IRV10/20 Vacuum Regulator

Vacuum Regulator Series IRV10/20 RoHS How to Order Standard connections IRV 20 C08 Accessory w Body size 10 20 Max. flow 140 l/min (ANR) Max. flow 240 l/min (ANR) None Note 1) Nil With pressure gauge Note 2) Note 3) (IRV10: With GZ33-K-01, IRV20: With GZ43-K-01) G Note 3) ZN ZP ZA ZB With ZSE30A-01-N-ML With ZSE30A-01-P-ML With ZSE30A-01-A-ML With ZSE30A-01-B-ML NPN open collector 1 output

PF2D

2 w y r !0 e New PFA q Body New PFA w Sensor Super PFA e Tube PPS r Housing A PPS t Housing B PPS y Housing C POM u Bushing PPS i Cap FKM o Gasket FKM !0 O-ring Stainless steel 304 !1 Thread PVC !2 Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

212

LVR20-T07(06) 8 27 56 33.5 126.2 LVR40-T11(10) 14 64.5 100 40 183.3 E K J J Breathing port M5 x 0.8 5 Applicable Fluids Regulator for Chemical Liquids Material and Fluid Compatibility Check List Chemical Compatibility Acetone Note 1, 2) Ammonium hydroxide Note 2) Isobutyl alcohol Note 1, 2) Isopropyl alcohol Note 1, 2) Hydrochloric acid Note 2) Ozone Hydrogen peroxide Concentration 5% or

KA

10 28.4 28.4 21 1 2 KAY10-U04 30 49 51 31 35 22 1 4 3 8 KAY12-U02 KAY12-U03 49.5 50.5 27 28 17 20.9 17 12 28.5 45.4 45.4 22 1 2 KAY12-U04 31 51.5 22 55 Reference dimensions after Uni thread installation.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

n = 1 + 2 + 3 1 MX Load factor n 1 = m/mmax Item Note Review m mmax is the maximum load mass MTS 1. Max. load mass 2 = M/Mmax MY Review M1, M2, M3 Mmax is the allowable moment 2. Static moment CY 3 = Me/Memax Review Me1, Me3 Memax is the allowable moment 3.

Clean Room Rodless Cylinder Series CYP ø15, ø32

9 Bumper Chrome molybdenum steel Clear hard anodized $3 NBR Plate A @0 O-ring Aluminum alloy $4 Clear hard anodized Carbon tool steel Plate B @1 C type snap ring for shaft Aluminum alloy $5 NBR Cushion seal @2 O-ring NBR 8-17-9 Series CYP Dimensions E Depth ED 4-MM Thread depth M T Y L T K PA 4-Counterbore dia B Counterbore depth C F 4-LD QW PB N E depth EK Q + Stroke Z + Stroke A G Stroke

Hydraulic Filters

indication switch (CB-H) Blanking cap Suction Filter with Case FH99 Series Micromesh 74, 105, 149 Negative pressure 1/2, 3/4, 1, 1 1/4, 1 1/2, 2, 2 1/2, 3, 3 1/2, 4 502 Differential pressure indicator (CB-H) Differential pressure indication switch (CB-H) Air breezer Cap Suction Guard FHG Series Micromesh 74, 105, 149 Negative pressure 1/2, 3/4, 1, 1 1/4, 1 1/2, 2, 2 1/2, 3 506 Differential

Soft Start-up Valve AV2000/3000/4000/5000

Quick exhaust Normal operation High speed supply B 1/2 PP PA C D PP PA 1(P) 2 2(A) 1 1/2 PP = approx.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

2 !3 @2 @1 @5 !1 !0 Section AA' @0 u @8 r y !6 @3 @4 e !7 w i t q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A' @6 #2 @8 @9 #0 !8 !9 #1 @7 !4 !

MLGC

2 No.

Title not found

l \ l l / v \ d l / t , . 1 , \ 1 b d t / . , , . , \ 1 6 -;i;-5*1-rTNVZ3420 NVZ3440 ^^n+irrr. umiint^ 4r&.q+\rh *"s* NVZs120-OM-M5 NVZ3140-OM-017 NVZ3540 Wry NVZ352O Model Body type )a of aqtuation ry:,:' sl:c i 2 position Single N\23120-OO-n5 o.2 0.17 Double Nvzlt220-OO-r5 o.2 0.26 (120) 3 position Closed center N\rz3it20-OO-[|5 0.18 0.43 (195) 10-32 Nom.

MGQ

9 to @2.

MLGC

2 No.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

l \ l l / v \ d l / t , . 1 , \ 1 b d t / . , , . , \ 1 6 -;i;-5*1-rTNVZ3420 NVZ3440 ^^n+irrr. umiint^ 4r&.q+\rh *"s* NVZs120-OM-M5 NVZ3540 Wry NVZ3140-OM-017 NVZ352O Model Body type )a of aqtuation ry:,:' sl:c i 2 position Single N\23120-OO-n5 o.2 0.17 Double Nvzlt220-OO-r5 o.2 0.26 (120) 3 position Closed center N\rz3it20-OO-[|5 0.18 0.43 (195) 10-32 Nom.

MGC

wire Diagnostic indication (2-color indication) PLC (B59W) B59W Grommet G79 H7A1 H7A2 H7B H7C H7NW H7PW H7BW H7BA H7NF 3-wire (NPN) IC circuit 5 V, 12 V 3-wire (PNP) Grommet K79 K79C 2-wire 12 V Connector Relay, PLC 3-wire (NPN) IC circuit 24 V Diagnostic indication (2-color indication) 5 V, 12 V 3-wire (PNP) Grommet 2-wire Water resistant (2-color indication) 12 V 4-wire (NPN) With

AMH

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 1 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMH850 1 2 13 42 348 220 57.5 220 10 Please refer to Made to Order Specifications of Series AMH on pages 14-20-55 to 14-20-57. 14-20-35

S

the total amount of vertical deflection NC D X 2 N N O O F A U T O S W I T C H E S A U T OS W I T C H C A P A B L E A U T O S W I T C H 2 Pieces S 1 Piece See Accessories Without Auto Switch D With Auto Switch S T R O K E A D J U S T M E N T S T R O K E ( I N C H) M O U N T I N G With Adjustment Bolts (Std) B With Shock Absorber BC With Cap Type Shock Absorber BCS With One Cap Type Shock

AME

AME150 AME250 AME350 AME450 AME550 AME650 AME850 Model Note) 200 500 1000 2000 3500 6000 12000 Rated flow (l/min (ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMG850 1 2 13 42 348 220 57.5 220 10 14-20-7