CM2

1 !

ZQ-OM01401

L 1. (b ) 2. R 3. L 4.

Angle Seat Valve

M5, 1/8, 3.2 to 6 1, 1.6, 2.3, 3.2 N.C.

Precautions 1

Auto switch mounting Bore size (mm) 40 32 25 20 D-A9 D-M9 D-M9W Note 1) Note 1) Note 1) Note 1) 1 BM2-040 1 BM2-032 1 BM2-025 1 BM2-020 2 BJ3-1 2 BJ3-1 2 BJ3-1 2 BJ3-1 D-C7/C80 D-C73C/C80C D-H7 D-H7W D-H7NF BM2-040 BM2-032 BM2-025 BM2-020 D-B5/B64 D-B59W D-G5NTL D-G5NBL BA2-040 BA2-032 BA2-025 BA2-020 Note 1) Two kinds of auto switch mounting brackets are used as a set.

Compact Cylinder

Applicable bore size (mm) Model Port size Weight (g) Effective area (mm2) 32, 40 17 ASN2-M5 M5 x 0.8 1.8 5 50, 63 ASN2-01 3.6 1/8 4 Series CVQ Compact Cylinder With Solenoid Valve Construction With boss in head end e r t !0 !4 !2 u !3 o !1 w i q !5 y 50, 63 Basic Type Description No. Material Component Parts Rod end male thread Note !

Clean Regulator

2 1 Interior purge Package SRH Clean booth Class 100 Package 856 Clean Regulator SRH Series ARJ How to Order AR425 to 935 ARX 02 SRH 3 0 0 0 AMR Gauge port orientation ARM Body size 3 4 1/4 3/8 Nil: Standard ARP OUT IN Washing grade IR-A 0 1 Grade A Grade B Knob Gauge port IR R: R Specification Set pressure Gauge port 0 1 IRV 0.02 to 0.2 MPa 0.05 to 0.7 MPa OUT IN VEX Relief mechanism There

Cylinder with Lock Series MNB

9i @2 q r y#0 $0 $2 w $3 #8 @9 A C B Section A !2 !2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !1 $7 o $8 e $1 !2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Component Parts Qty. 2 1 1 2 1 1 3 1 1 1 1 1 2 1 2 2 1 1 Qty. 1 1 1 1 1 1 1 1 1 1 1 1 2 1 1 1 No. No.

CG1

1 !2 !3 !4 !5 !6 !7 !8 !

MU

1, !2, and !3 MUB40-PS Hard anodized Aluminum alloy Cylinder tube e MUB50-PS Chromated Aluminum alloy Piston r MUB63-PS Hard chrome plated Carbon steel Piston rod t Seal kit includes !1 to !3. Order the seal kit, based on each bore size.

MU

1, !2, and !3 MUB40-PS Hard anodized Aluminum alloy Cylinder tube e MUB50-PS Chromated Aluminum alloy Piston r MUB63-PS Hard chrome plated Carbon steel Piston rod t Seal kit includes !1 to !3. Order the seal kit, based on each bore size.

ALF400 to 900, ALT-5/-9

Auto Feed Lube Port size Description Applicable model Symbol Nil 02 03 04 06 10 12 14 20 4 1 With bracket ALF400 to 600 B 8 3 Body size 2 1 F.R.L. 40 50 60 80 90 2 1 4 3 4 3 1 AV 1 1 1 4 1 2 1 1 2 2 1 Line pressure (MPa) AU 2 Thread type AF Nil N F Rc NPT G AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area

ALF400 to 900, ALT-5/-9

Auto Feed Lube Port size Description Applicable model Symbol Nil 02 03 04 06 10 12 14 20 4 1 With bracket ALF400 to 600 B 8 3 Body size 2 1 F.R.L. 40 50 60 80 90 2 1 4 3 4 3 1 AV 1 1 1 4 1 2 1 1 2 2 1 Line pressure (MPa) AU 2 Thread type AF Nil N F Rc NPT G AR Note 1) Tank pressure is removed when line pressure is stopped.

VFR4000-OMH0003

Especially when using a 3-position exhaust center valve or a single acting cylinder take appropriate measures to prevent malfunction by using it with an individual EXH spacer assembly(VVFS4000-R-04-1,2). 1. Precautions for 2-position double solenoid valves 5.

VFRA3000, 4000 Series

For 3-position exhaust center valve or single acting cylinder, take appropriate measures to prevent malfunction by using it with an individual EXH spacer assembly (VVFS3000-R-03-1,2 / VVFS4000-R-04-1,2). 5.

Precision Cylinder Series MTS

8 @1 r @4 w 12 to 40 @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w Rod cross section for 12, 16, 20, and 25 Rod cross section for 32 and 40 With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Parts list No. 1 2 3 4 5 No. Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Description Qty. Note Material Qty.

VFR5000 Series

Warning Caution 1) Current leakage When using a snubber circuit (C-R element) for surge protection of the output, a very small amount of electrical current will continue to flow even during the OFF state. This results in the valve not returning.

Pressure Switch/Reed Switch Type

IS10E-4004 IS10E-4006 + 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 3/4 AC20m AR20m, AW20m AWM20, AWD20 Nil Set pressure 0.1 to 0.4 MPa 0.1 to 0.6 MPa V V V V V V 30 66 52 28 16 a 6 Note 2) range + AC25m, AC30m AR25m, AR30m, AW30m AWM30, AWD30 Nil 0.5 m V V V V V V V V V Semi-standard Lead wire 32 73 56 30 13 L Z b 3 m 5 m length r V + Note 2) AC40m AR40m, AW40m AWM40, AWD40 Nil Scale plate MPa

VFR5000-OMN0001

industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -(1:) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 2 VFR5000-OMN0001 / / / / 1 1 3) 3) 1 1 () 3 VFR5000-OMN0001 VFR5000 Series 5 / 1 DC 3 () 0.1 2 C-R () C-R DC 3% AC 20% ( ) () () 3 3 EXH (VVFS5000-R-04-1,2) ( ) () 3 4 No.VFR5000-OMN0001 VFR5000 Series 5 / (SSR )AC 1) (C-R ) OFF 2)() 1 -10 1 1) M5 1/6~1/4 1

VFR3000-OMY0001

-2No.VFR3000-OMY0001 / 1 1.5 *3) *3)1 1 () No.VFR3000-OMY0001 -3- VFRA30004000 5 / () () () () -10 3 3 EXH (VVFS3000-R-03-1,2 VVFS4000-R-04-1,2) () () 3 , 4 VFR3000-OMY0001 VFRA3000,4000 5 1) 2) 1 ()ISO VG32 (MSDS) 3) 2 ()ISO VG32 1 1) M5 1/61/4 11.5Nm ) 2) Rc Nm Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc 1/2 2830 5 VFR3000-OMY0001 VFRA3000,4000 5 () () 5 3 30 ( ) 1 ()ISO