3

F C37 1/2 15 G Stainless steel B 100 VAC Grommet With surge voltage suppressor C 110 VAC 5 20A N.C. H C37 3/4 20 J Stainless steel D 200 VAC E 230 VAC 6 25A N.C.

AC Servo Motor Driver (CC-Link Type)

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

Title not found

Figures in body of chart are suggested minimum rod diameters Exposed Length of Piston Rod (IN) Tons 10 20 40 60 70 80 100 120 1/2 3/4 1 3/4 13/16 1-1/16 1 5/8 7/8 1-1/8 1-1/4 1-3/8 1-1/2 11/16 15/16 1-3/16 1-3/8 1-1/2 2 3/4 1 1-1/4 1-7/16 1-9/16 1-3/16 3 13/16 7/8 1-1/8 1-3/8 1-9/16 1-5/8 1-7/8 4 15/16 1 1-3/16 1-1/2 1-5/8 1-3/4 2 2-1/4 5 1 1-1/8 1-5/16 1-9/16 1-3/4 1-7/8 2-1/8 2-3/8 7-1/

Title not found

Figures in body of chart are suggested minimum rod diameters Exposed Length of Piston Rod (IN) Tons 10 20 40 60 70 80 100 120 1/2 3/4 1 3/4 13/16 1-1/16 1 5/8 7/8 1-1/8 1-1/4 1-3/8 1-1/2 11/16 15/16 1-3/16 1-3/8 1-1/2 2 3/4 1 1-1/4 1-7/16 1-9/16 1-3/16 3 13/16 7/8 1-1/8 1-3/8 1-9/16 1-5/8 1-7/8 4 15/16 1 1-3/16 1-1/2 1-5/8 1-3/4 2 2-1/4 5 1 1-1/8 1-5/16 1-9/16 1-3/4 1-7/8 2-1/8 2-3/8 7-1/

VCC

Cleaning unit Note 2) Unit Standard unit (with gate valve) Part number (Mountable valve number) G06 G04 G02 02 04 06 08 10 12 14 16 18 20 40 U side (OUT port side) Stations Note 1) 4 5 2 3 1 Gate 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 39 40 Description/Model 2 port valve 2 port valve (Sliding type) VCC12-00 D side Valve options 2 port valve (Diaphragm type) VCC12D-00 Blanking

Model Selection 1

5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).

3

With arm Port side M With Arm Rotary direction: R During unclamping (Extension end) Rotary direction: L During unclamping (Extension end) Model (mm) N N O P U V AD 18 18 22 22 MKB32-Z MKB40-Z MKB50-Z MKB63-Z 67 67 88 88 45 45 65 65 20 20 22 22 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 15 to 25 15 to 25 30 to 40 30 to 40 10 mm Clamp stroke M Rod state Model O P 10 50 mm 85.5 150.5 93 158 103

MGQ

20 25 25 28 36 24 17.5 25 20 18.5 21 16 16 20 20 25 30 Grooves (Except 12, 16, 20, 25) (mm) Use grooves section a and section b in the figure below of the cylinder body for firmly fixing in the following case.

REC

2, 4, 6, ) 10 15 60 60 + 45 (n 2) D-C73C D-C80C DH7C 10 15 65 (n 2) 2 15 + 50 ( ) 65 + 50 (n 2) (n = 2, 4, 6, ) (n 2) 2 15 + 50 ( ) D-B5/B64 D-G5NTL 10 15 75 (n = 2, 4, 6, ) 75 + 55 (n 2) (n 2) 2 20 + 50 ( ) D-B59W 15 20 75 (n = 2, 4, 6, ) D-A3 D-A44 D-G39 D-K39 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

MLGC

75 14 73 150 M8 x 1.25 162 W Y WH X Z Bore size (mm) 20 25 32 40 30 23 30 146 182 30 25 37 167 199 25 28.5 37 167 202 20 33 44 210 227 Without Rear Plate Stroke range (mm) Long Stroke Bore size (mm) 20 25 32 40 Bore size (mm) 20 25 32 40 Z R Y 250 to 400 190 14 129 350 to 500 207 14 146 350 to 600 210 14 146 350 to 800 236 15 191 Note) Dimensions marked with are not required for the one

MLGC

25 73 70 150 M8 x 1.25 162 W WH X Y Z Bore size (mm) 20 25 32 40 30 23 30 146 182 30 25 37 167 199 25 28.5 37 167 202 20 33 44 210 227 Without Rear Plate Stroke range (mm) Long Stroke Bore size (mm) 20 25 32 40 Bore size (mm) 20 25 32 40 R Z Y 250 to 400 14 190 129 350 to 500 207 14 146 350 to 600 14 210 146 350 to 800 15 236 191 Note) Dimensions marked with are not required for the one

Digital Flow Switches

50 20 40 Pressure loss (kPa) Pressure loss (kPa) 15 30 10 20 5 10 Flow rate (l/min) 0 200 0 50 100 150200250 300 400 350 450 500 20 50 100 150 Flow rate (l/min) Sensor Unit Construction PF2A710/750 PF2A510/550 Parts list No. 1 2 3 4 5 Description Attachment Seal Mesh Body Sensor Material ADC NBR Stainless steel PBT PBT Flow direction PF2A711/721/751 PF2A511/521/551 Parts list Material ADC

Digital Flow Switches, Series PF2A, Series PF2W

50 20 40 Pressure loss (kPa) Pressure loss (kPa) 15 30 10 20 5 10 Flow rate (l/min) 0 200 0 50 100 150200250 300 400 350 450 500 20 50 100 150 Flow rate (l/min) Sensor Unit Construction PF2A710/750 PF2A510/550 Parts list No. 1 2 3 4 5 Description Attachment Seal Mesh Body Sensor Material ADC NBR Stainless steel PBT PBT Flow direction PF2A711/721/751 PF2A511/521/551 Parts list Material ADC

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

L dimension 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VZ 285.5 21 273 No.

5 Port Solenoid Valve SY Series

port Type 20 Bar stock type Individual wiring SY3 20 SY5 20 SY7 20 P. 37 Direct piping to the main unit of a valve.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

9 11 14 114 140 170 54 68 84 24.5 28.5 35 5.6 6.8 8.6 18 22 26.5 40.2 50.2 62.7 40.5 50 62 39 49 61.5 53 64 75 14.5 15 20.5 50 60 80 60 80 100 Rc1/8 Rc1/8 Rc1/4 Centralized piping PF PP PG QW Q RR TT TTT VV WWW Model WW XXX Z YH PD PE ZZ (mm) MY1H25 MY1H32 MY1H40 32 42 37.5 15.5 12 14 23.3 28.5 35 20.5 16 20 14.5 16 20 15 16 23.5 206 264 322 42 51 59 7 8 9 37.5 47 59.5 12 16 18.5 220 280

PFxx-OMO0007CN

) [o10] [o11] [o12] (OUT2) 20) [o20] [o21] [o22] () -22No.PF-OMO0007CN (OUT1) 20) [1_n] [1_P] (OUT2) 20) [2_n] [2_P] [Anr] 20 1 atm()65R.H.

Suction cups with flange

-7A-X2 25 28 15 ZPG25C-7A-X2 25 28 1.8 ZPG32U-7A-X2 32 35 20 24.5 4.5 ZPG32C-7A-X2 32 35 20 24.5 2.3 ModelZPG20UT-7A-X2 ModelZPGB-7A-X2 (Suction cup formThin flat type) (Suction cup formBellows type) Dimensions Model A B D E F G H Y ZPG10B-7A-X2 10 12 5.5 13.5 21.5 26 5.5 13 ZPG13B-7A-X2 13 15 8.7 19 24 28.5 7.5 ZPG16B-7A-X2 16 18 10 21 25.5 30 8.5 ZPG20B-7A-X2 20 22 12.6 25 29 33.5 15 10.5

MGC

) Y R Z 20 25 32 40 50 20 25 32 40 50 20 25 32 40 50 100 st or more 250 to 400 88 14 119 125 st or more 350 to 500 88 14 131 150 st or more 350 to 600 90 14 136 200 st or more 350 to 800 101 15 156 250 st or more 350 to 1000 116 16 202 Note) Dimensions marked with are not required for the one without rear plate. 8-22-14 15 Series MGC Guide Cylinder Compact Type Dimensions Front face mounting

100

Multistage Ejector ZL3/ZL6 Series How to Orderp. 19 Ejector Specificationsp. 20 Supply Valve/Release Valve Specifications p. 20 Pressure Gauge Specificationsp. 20 Vacuum Pressure Switch Specificationsp. 21 Weightp. 21 Internal Circuits and Wiring Examplesp. 22 Exhaust Characteristics/Flow Rate Characteristicsp. 23 Time to Reach Vacuum/Break Flow Rate Characteristics/Vacuum Breaking Time