Table of Contents

Auto switches are shipped together but not assembled. 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Action D Double acting Port thread type Type M5 x 0.8 Rc1/8 NPT1/8 G1/8 Bore size 6, 10, 16, 20, 25 32 32 32 Symbol Standard stroke (mm) 6, 10, 16 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50, 60 5, 10, 15, 20, 25, 30, 40, 50, 60, 70, 80, 90, 100 Nil TN TF Applicable Auto Switches/Refer

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

.) 10 10 13 13 16 Vacuum entry (Refer to Table 1 for applications.) 16 20 20 25 25 32 32 Table 1 Vacuum entry/Mounting thread diameter 40 40 Mounting thread diameter 50 50 10 to 16 20 to 50 Pad diameter (mm) M5 x 0.8 M5 x 0.8 M8 x 1.25 Thread diameter, Piping diameter Connection Pad type Symbol B5 B8 B5 F Ball joint Vacuum entry 4 tube 04 One-Touch fitting 6 tube 06 Pad material 8

SV

Double wiring specifications 09 02 9 stations 20 Note) For 20 stations (2) 2 stations Specified layout (Up to 18 solenoids possible.)

Guide Cylinder/Compact Type Series MGC

70 95 125 60 32 M8 x 1.25 1/8 104 12 38 67 4 11 8 7 M12 x 1.75 depth 21 45 82.5 115 150 75 38 M8 x 1.25 1/8 115 12 47 T U V W WH W X Y Z Bore size (mm) 20 25 32 40 30 16 112 53 50 23 30 146 182 30 20 132 63 60 25 37 167 199 25 20 132 63 60 28.5 37 167 202 20 25 162 73 70 33 44 210 227 Without Rear Plate Stroke range (mm) Long Stroke R Z Y Bore size (mm) 20 25 32 40 Bore size (mm) 20 25 32

Vacuum Pad: Ball Joint Type

Pad diameter 10 10 Vacuum entry port (Refer to Table (1) for applications.) 13 13 16 16 20 20 Table (1) Vacuum Entry/Mounting 25 25 32 32 Mounting 40 40 10 to 16 20 to 50 Pad dia. 50 50 M10 x 1 M14 x 1 Thread dia./ Port size Connection Symbol A10 A14 B5 M5 x 0.8 Pad type B01 Rc 1/8 Female thread Vacuum entry F Ball joint type N01 NPT 1/8 T01 NPTF 1/8 04 4 tube Material One-touch fitting

Plug-in/Plug Lead: Single Unit

03 04 VVQ5000-P-1(Plug-in type) VVQ5000-P-5(Plug lead type) 179 (Plug-in type) 133 (Plug lead type) 32 16 By mounting individual SUP spacers on a manifold block, it is possible to provide individual supply ports for each valve. 1 P 40.3 1(P) 4(A) 2(B) 03: Rc 3/8 04: Rc 1/2 1(P') 5(R1) 3(R2) Circuit diagram Plug-in type Plug llead type Individual EXH spacer 03 04 03 04 VVQ5000-R-1(Plug-in

Compact Hydraulic Cylinder

Standard Strokes Bore size (mm) Standard strokes (mm) 20 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 80 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility

Vacuum Ejector Series ZM

20 20 Suction flow rate 10 10 10 Flow characteristics are expressed in ejector vacuum pressure and suction flow.

-fl Seies

O-ring O,O Non plug-in type @ o End plate (kit) assy MEF363LR-04-t End plates O Joint/clamp O,O . Gasket O,O . O-ring O,O Plug-in type MEF373LH-04-1 End plates O . Joint/clamp O,O . casket O,O .

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

O-ring O,O Non plug-in type @ o End plate (kit) assy MEF363LR-04-t End plates O Joint/clamp O,O . Gasket O,O . O-ring O,O Plug-in type MEF373LH-04-1 End plates O . Joint/clamp O,O . casket O,O .

45

stations maximum) Mounting position Symbol Stations U side Stations Symbol D U D side U side 2 to 10 stations 02 2 stations Manifold base (5 stations) B 2 to 20 stations Both sides M Special specifications SS5X3-45-05DRS-C6 20 20 stations For special specifications, indicate separately by the manifold specification sheet.

Compact Manifold Regulator Series ARM5

(Full Span) Display accuracy 230 Calibration angle Limit indicator With limit indicator 17.5 L side end block R side end block 6 28 OPEN 56 SMC 56 1.5 SMC 28 20 7 7 20 R E V 18 O 26 26 18 C 22 32.5 32.5 14.5 Port Plug Bushing VVQ0 58A Part no.

Vacuum Unit

Low noise 60 ZK2A07 (Silencer exhaust) ZK2G07 (High-noise reduction silencer exhaust) 46 dB (A) 1 50 1 Nozzle size: 0.7 (Under SMCs measurement conditions) 40 Noise level [dB (A)] 30 Reduces high-frequency range from 2000 to 20 Hz. 20 10 0 200 2000 20 Frequency [Hz] Suction flow Improved by up to approx. 20% Max. suction flow [L/min (ANR)] Nozzle size Exhaust type 40 80 Approx. 20% High-noise

SZ3000

(up to 24 solenoids possible) 20 20 20 stations 20 stations Connector mounting position Mounting position Symbol D PG: Flat cable connector (20 pins) PH: Flat cable connector (10 pins) D Side Note Symbol 02 Note Symbol 02 Stations Stations 2 stations 2 stations ... ... ... ...

7

VXZ Height Weight Class H/24 VDC Class H/DIN terminal Seal material: EPDM 7%Smaller 20%Lighter VXS (90 g) (7 mm) Approx.

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8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

LEC-OM02904

DC24V 2. 20 3. 4. 5. 6. 7. 8.

Compact Cylinder

Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 5, 10, 15, 20, 25, 30 20, 25, 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 50, 63, 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50 Intermediate strokes are available as a special order.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

(mm) 4 6 8 10 12 (1) AS221FE-01 AS231FE-01 20, 25, 32 R 1/8 AS221FE-02 AS231FE-02 20, 25, 32, 40 R 1/4 AS321FE-03 AS331FE-03 40, 50, 63 R 3/8 AS421FE-04 AS431FE-04 63, 80, 100 R 1/2 Note 1) Elbow type only Note 2) Distinction between meter-out/meter-in types by appearance Those are distinguished by the lock nut.

HRX-OM-Y120

HRX-OM-Y120-D Operation Manual Communication function Thermo-chiller Air-Cooled refrigerated type Water-Cooled refrigerated type HRL100-A-20/40 HRL100-W-40 HRL200-A-20/40 HRL200-W-40 HRL300-A-20/40 HRL400-A-40 Keep this manual available whenever necessary 2023 SMC CORPORATION All Rights Reserved To Users, Thank you for purchasing SMCs Thermo chiller (hereinafter referred to as the product