A-HEC-OM-J004

5.4.9 Details of Control Setting Mode . 5-12 5.4.10 Selection of EV Output Setting Mode . 5-15 5.4.11 Details of EV Output Setting Mode . 5-15 5.4.12 Selection of Communication Setting Mode . 5-18 5.4.13 Details of Communication Setting Mode . 5-18 5.4.14 Initial Value and Setting Range for Each Mode . 5-20 5.5 Alarms. 5-21 5.5.1 Content of Alarms . 5-21 5.5.2 Troubleshooting . 5-23 Chapter

High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

Speed Controller with

-08A 8 15.2 13.5 56 8.5 18.1 37.1 35.5 19 13.8 AS3002F-06A 6 13.2 11.5 57.8 9.8 21.7 42.9 41.3 21.8 25 12 20.5 17 18.1 AS3002F-08A 8 15.2 13.5 63.8 19 20 AS3002F-10A 10 18.5 16.5 68.6 21 24.8 AS3002F-12A 12 20.9 18.5 73.8 10.9 22.8 44 42.4 22.1 22 29.1 AS4002F-10A 10 18.5 16.5 4.3 8 18.8 26 74.7 11.3 23.7 51.3 49.7 28 33 14 26.2 21 36.3 AS4002F-12A 12 21.7 18.5 79.1 22 42 4.5 8 16.6

PF2A/PF2W

CM01-8DP4S DDK Ltd. 16-11-15 12 Series PF2D Dimensions PF2A703H/706H/712H Internal circuit and wiring example to are terminal numbers.

Slider Type/Ball Bushing Bearing

2 t r @2 @1 #3 #4 @9 #1 #2 @5 @7 @4 @6 CY1H10 CY1H10-B CY1H10-BS CY1H10@3 @8 #0 t Material Note Component Parts No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 No.

CE2

12-53 for details.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

OUT1 12 to 24 VDC 12 to 24 VDC Load Load Load White OUT2 White OUT2 Load Blue DC () Blue DC () -R: NPN (2 outputs) + Auto-shift input -S: NPN (2 outputs) + Auto-shift input -T: PNP (2 outputs) + Auto-shift input -V: PNP (2 outputs) + Auto-shift input Brown DC (+) Brown DC (+) Load Gray Auto-shift input Gray Auto-shift input Load + + Black OUT1 Black OUT1 12 to 24 VDC 12 to 24 VDC Load

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Display + 12 to 24 VDC 2% F.S.1 digit (25C 3C) Display accuracy Black OUT Light up when output is turned ON. (Green) Indicator light Load Enclosure IP40 Environment resistance Blue DC () 3.4 3-wire 25AWG 2 m Lead wire with connector 1098 Series ARP20/30/40 Series ARP20K/30K/40K Specific Product Precautions 1 10 21 10 21 Be sure to read this before handling.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Display + 12 to 24 VDC 2% F.S.1 digit (25C 3C) Display accuracy Black OUT Light up when output is turned ON. (Green) Indicator light Load Enclosure IP40 Environment resistance Blue DC () 3.4 3-wire 25AWG 2 m Lead wire with connector 1098 Series ARP20/30/40 Series ARP20K/30K/40K Specific Product Precautions 1 10 21 10 21 Be sure to read this before handling.

JXCx-OMT0001CN

Option 1 1 -49No.JXC-OMT0001CN-C () 11:() 12:() LE 800 1 1

Digital Flow Switches

White Load 50 OUT2 2 12 to 24VDC + Load (41.5) 3 Blue PF2W7T--67(-M) Connector pin numbers 4 3 77 34 2 1 Pin no.

MQQ

21 Series MQM For other dimensions, refer to basic style on page 10-5-20.

MQQ

21 Series MQM For other dimensions, refer to basic style on page 10-5-20.

JXCx-OMU0026

INP (31)(28)(23)(20)(15)(12)(7)(4) Start to move to the position set in Step No.3. BUSY (32)(29)(24)(21)(16)(13)(8)(5) (19) Step No.3 is turned ON. (OUT1 and OUT0 are turned ON) Note) (20) INP is turned OFF. (21) BUSY is turned ON. (22) The DRIVE is turned OFF. Flow chart (Reference) (23) INP is turned ON. (1) Select Step No.1. (Turn IN0 ON.) (24) BUSY is turned OFF.

Digital Flow Switches, Series PF2A, Series PF2W

White Load 50 OUT2 2 12 to 24VDC + Load (41.5) 3 Blue PF2W7T--67(-M) Connector pin numbers 4 3 77 34 2 1 Pin no.

Modular Type Lubricators Series AL

Body Size 21 31, 41 Description Metal Bowl Metal Bowl With Sight Glass Residual Pressure Relief Valve Symbol Nil V NPT Threads Applicable Model Combo All All Description Without Valve With Downstream Valve Port Size Symbol 02 03 04 Applicable Body Size 21 31 41 Port Size 1/4 3/8 1/2 Accessories Symbol Nil C D Applicable Body Size All 31, 41 31, 41 Description None Float Auto Drain (N.C.)

JXCx-OMT0002

JXC-OMT0002-C 12.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Description Side cover Bearing retainer Sensor rail Bumper End cover A End cover B Inner cover Motor cover Auto switch Magnet Brake Material Note 50W/100W Ball screw/Slide screw 1 2 3 4 5 6 7 8 9 10 11 Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy IIR PC PC PC PC Rare earth magnet 12 13 14 15 16 17 18 19 20 21 22

LEF-OM002xx

Product Outline . 21 3.1 System construction . 21 3.2 Setting Function . 22 3.3 Step data setting method . 25 3.4 Parameter setting method . 31 4. Wiring of cables / Common precautions . 34 5.

C92

pivot E Bore (mm) R1 d2 CK S5 K1 K2 L3 G1 L1 G2 EM G3 CA H6 10 11 13 15 15 18 22,5 31 10 10 11 11 15 15 18 20 10 12 12 16 16 20 25 32 5,5 5,5 6,6 6,6 9 9 11 14 38 41 50 52 66 76 94 118 51 54 65 67 86 96 124 156 10 10 14 14 18 20 28 34 21 24 33 37 47 55 70 97 4 4 6 6 6 6 18 23 18 22 30 35 40 50 60 88 26 28 32 40 50 60 70 90 31 35 45 50 60 70 90 126 32 36 45 50 63 71 90 115 8 10 12 12 14 15