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(For details, refer to the solenoid specifications of each type of valve.) 14 No.JSY1000V-OMW0004-A JSY1000/3000/5000 series Specific Product Precautions 6 Be sure to read this before handling.

In addition, in the case of trouble, please send it back to the supplier for repair or replacement. 21 No.SY3000V-OMM0002-B Revision history A Safety instructions Po B NEW SY7000 Safety instructions Tightening torque Construction WQ 1st Printing :oS 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications

(1) (2) (3) 2(A)3(R)() (4) (5) 3(R) (6) 2(A)() (7) (8) (9) (10) (11) (12) 1 (ISO VG32) (13) 3(R) (14) (15) (16) (17) (18) (19) (20) (21) (22) 1. 2. 3. 4. 5. 6. 7. * 12 VEX-OMV0001 : VW 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice

Item CH2 measured value: 16-bit signed integer Bit offset 47 46 45 44 43 42 41 40 39 38 37 36 35 34 33 32 Item CH32 measured value: 16-bit signed integer Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item CH4 measured value: 16-bit signed integer Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Error diagnosis CH4 diagnosis CH3 diagnosis CH2 diagnosis CH1 diagnosis Reservation

Refer to Connecting to other series on page 16-3-21.

D E G H J K L M N Model Rc 1/8, 1/4 NPT 1/8, 1/4 LVA1 20 33 49.5 10 27.5 11 4 11 27.5 4.2 M5 x 0.8 Rc 1/4 NPT 1/4 LVA2 57.5 30 36 44 11 31.5 13 4 20 37 3.5 26.5 M3 x 0.5 Rc 3/8 NPT 3/8 LVA3 77.5 36 47 56 15 41.5 17.5 7.5 34 46 5.5 37.5 Rc 1/2 NPT 1/2 Rc 1/8 NPT 1/8 Rc 1/8 NPT 1/8 LVA4 96 46 60 68 22 55 18 8 42 57 5.5 48 Rc 3/4 NPT 3/4 LVA5 129 58 75 84 26 68 27.5 8 56 71 6.5 62 17-5-21

(mm) Electrical entry P Port size A B C D E F H K L M N Model Grommet: G Conduit: C DIN terminal: D Conduit terminal: T Q R Q R Q R S Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 45 44 43 58 40.5 46.5 99 43 66 83 1/8 VCW21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 46 44 44 58 41.5 46.5 99 44 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 56.5 46 54.5 60 52 48.5 101 54.5 68 99 1/4

pling 1 3 Magnet 14 Damper l 5 Cushion damper Rubber t6 Molor cover Fl6sin l 7 Photo micro snsol tl0stric lmabr$ $enies t)(F ur &hdim clnil & D|ju flilir Greater than 50% duty cycle?

'/s stl=0.44 300 (3") ]/s & 1/a st. 1/e &r/l st. 1/e & 1A st. 400 (4) 1/s &1/a st. r/s & 1/a st. 1/e &14 st. Series NCQT Dimensions Spring Extend NCQTBO-OT T Type Bore,, 9t4,F' I 60re ,b,:!

L1 E1 R1 U1 A1 U1 R1 A MM NDH10 NZ MM NDH10 NX NX E1 L1 30 40 50 60 60 20 22 28 40 40 12 12.5 16.5 23.5 23.5 16 19 24 34 34 32 40 50, 63 80 100 32 40 50, 63 80 100 14 19 24 26 26 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 M10x1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20

19 24 26 26 20 22 28 40 40 30 40 50 60 60 12 16 19 24 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20 30 30 12.5 16.5 23.5 23.5 Bracket Combinations Bracket combination table -Refer to table together with combination drawings.

19 24 26 26 20 22 28 40 40 30 40 50 60 60 M10 x 1.25 16 19 24 34 34 M10 x 1.25 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20 30 30 12 M14 x 1.5 M14 x 1.5 12.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 16.5 CS1 23.5 23.5 C76 Bracket Combinations C85 Bracket Combinations Available Refer to table together

19 24 26 26 20 22 28 40 40 30 40 50 60 60 M10 x 1.25 16 19 24 34 34 M10 x 1.25 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20 30 30 12 M14 x 1.5 M14 x 1.5 12.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 16.5 CS1 23.5 23.5 C76 Bracket Combinations C85 Bracket Combinations Available Refer to table together

19 24 26 26 36 20 22 28 40 40 46 30 40 50 60 60 92 M10 X 1.25 M14 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 M27 X 2.0 12 16 19 24 34 34 34 M10 X 1.25 M14 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 M27 X 2 10 11 14 20 20 27 16 19 24 34 34 42 40 50 64 80 80 10 10 14 22 22 25 10 10 14 22 22 25 14 14 20 30 30 32 14 14 20 30 30 32 28 28 40 60 60 64 12.5 16.5 23.5 23.5 100 119 28.5 Combinations of Support

6 AR25(K)-B 30 34 43.9 5.4 15.4 55 2.3 25.7 32.5 16 6 AR30(K)-B 41 40 45.8 6.5 8 53 2.3 31.1 38.5 19 7 AR40(K)-B 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 AR40(K)-06-B 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AR50(K)-B 70 66 65.8 11 13 90 3.2 AR60(K)-B 70 66 65.8 11 13 90 3.2 *1 The dimension of B is the length when the filter regulator knob is unlocked. *2 For the AR20(K)-B only, the position

Dust seal band Stainless steel 8 Housing A Aluminum die-cast Chromating 19 Bearing 9 Housing B Aluminium alloy Anodized 20 Bearing 10 Bearing holder Aluminium alloy 21 Roller shaft Stainless steel 11 Motor mount Aluminium alloy Anodized 22 Wiper Assy Bearin 8 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http: / /www.smcworld.com

BIT 4 Stp-No.bit3 (7) 20 Step designation BIT 5 Stp-No.bit4 (20) 8 BIT 6 Stp-No.bit5 (8) 21 BIT 7 Stp-No.bit6 (21) 9 Stp-No.bit7 (9) 22 SET-ON 10 Temporarily stops the program run by means of the ON input. (3) Temporary stop HOLD READY 23 BUSY < 2 > 11 (16) Emergency stop (nonlogical input) Performs an emergency stop when ON input stops.

N347 Slide Tables MXH, MXS, MXQ, MXF, MXW, MXP MX Series Integrated Cylinder and Guide Bearing 6 Styles Multiple Mounting and Porting Configurations Bore Sizes from 6mm to 25mm Wide Range of Options Q Q Table of Contents Q Q Q MX Series Features .pages 4-5 Q Safety Instructions . pages 6-22 MXH .pages 9-11 MXS.pages 12-14 MXQ.pages 15-17 MXF .page 18 MXW.page 19 MXP.pages 20-21

Zuazobidea 14, Pol. Ind. Jundiz, E-01015 Vitoria Phone: 945-184 100, Fax: 945-184 124 Belgium SMC Pneumatics N.V./S.A. Nijverheidsstraat 20, B-2160 Wommelgem Phone: 03-355-1464, Fax: 03-355-1466 Greece S.

14 Series ZR Large Size Vacuum Module: Ejector System How to Set Vacuum Pressure Hysteresis Pressure trimmer selects the ON pressure.