VCL

0.2 10 2.1 50 0.1 3 0.35 8.4 2.0 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) 1/4 : 0.58 3/8 : 0.55 1/2 : 0.62 3/4 : 0.78 4 0.60 14 1.1 5 0.85 20 0.7 VCL4 2.0 4 7 1.4 33 0.3 10 2.1 50 0.12 Note 1) Refer to page 17-2-32 in model selection regarding port size and orifice size combinations.

VNC

50 33 50 0.7 0.5 1 2 VC 3 4 1.0 0.8 VDW 1.4 1.2 1 VQ 1 4 1 2.4 2.2 VX2 5.2 5.0 32 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 2 1 3.8 3.6 VX3 7.0 6.8 40 JIS Symbol Valve type Operation N.C.

V

(mm) 0 stroke Stroke end 2~8 0.8 1.2 10~32 1 3 40, 50 2 5 H O W T O O R D E R S E E N E X T P A G E F L AT T Y P E F L AT W I T H R I B Y Model A B C D E F G F L AT T Y P E Flat Flat with rib ZPT10 U C 10 12 12 21 32.5 55.5 68.5 3 1.7 E:M5x0.8 E:M3x0.5 Model A B C Y ZPT13 U C 13 15 12 21 32.5 55.5 68.5 3 1.8 D F D F ZPT16 U C 16 18 12.5 21.5 33 56 69 3.5 1.2 ZPT02U 2 2.6 1.2 3 6 5 8 0.8

Series SY100 3 Port Solenoid Valve Rubber Seal

Blank Plate Assembly Combination with Solenoid Valve and Gasket Manifold Base Parts No.: SY100-77-1A Body ported Base mounted Cross round head screw SY100-33-1 (M1.7 X 13, Matt nickel plated) Cross round head screw SY100-33-2 (M1.7 X 7, Mat nickel plated) Blank plate A SY100-77-1 Gasket VJ100-20-1 VJ100-6-2 Gasket VJ100-6-1 Gasket Applicable base Sub-plate SS3Y130 type SS3Y131 type SS3Y1S41

Series SYJA300 3 Port Air Operated Valve

Refer to p. 0-33 to 0-36 for Safety Instruction and common precautions.

VCA

219 244 255 240 251 284 295 2 103 114 139 150 117 128 161 172 L1 Side ported L2 VV2CA3 L1 Front ported L2 L1 Side ported L2 VV2CA4 L1 Front ported L2 (mm) Dimensions Electrical entry Grommet: G Conduit: C DIN connector: D Conduit terminal: T A B C E F G H J1 J2 J3 K L M N Model Q 30 32 R 36 41 S 50 52 T 32 38 U 54 57 V 66 69 W 30 36 X 71 74 Y 101 104 Z 65.5 71 55 62 26 31 17 19 19.5 21 33

VFA3000

Caution Refer to p.0-33 to 0-36 for Safety Instruction and common precautions. 3.2-13 VFA3000 Dimensions/Body Ported 2 position single: VFA3122-F 01 02 SlA VlA SlA VlA VM/VR VH 2 position single: VFA3130-01 02 3.2-14 VFA3000 Dimensions/Body Ported 2 position double: VFA3230-01 02 3 position closed center/exhaust center/pressure center: VFA3 30-X1 01 02 3 4 5 3.2-15 VFA3000 Dimensions/Base

XL

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

silencer) ZX Model ZR Maximum suction flow rate (/min (ANR)) Air consumption (/min (ANR)) Connection (One-touch/Screw-in) Max. vacuum pressure Model Nozzle diameter (mm) (kPa) Body type Weight (g) ZM ZH05B 0.5 Type S Type L Type S Type L Type S/Type L 5 8 13 12 20 23 6/Rc 6/Rc 24 34 46 40 70 78 8/Rc 10/Rc 5 8 13 12 20 23 24 34 46 40 70 78 55 75 95 65 110 150 85 135 185 SUP VAC EXH 28 28 33

Thomas Oil-less Diaphragm Compressor / Vacuum Pump Flow Rate: .53 LPM , .53 LPM, Max Pressure: 8.4 PSIG / 580 bar , 8.4 PSIG / 580 bar, Voltage (DC): 3, DC Motor Type: Standard, Item Dimensions: Length: 1.3 in / 33 mm Width: .55 in / 14 mm Height: .91 in / 23 mm , Length: 1.3 in / 33 mm, Width: .55 in / 14 mm, Height: .91 in / 23 mm, Net Weight: .4 lbs

Thomas Oil-less Rotary Vane Compressor / Vacuum Pump Flow Rate: 33 LPM , 33 LPM, Max Pressure: 20.3 PSIG / 1400 mbar , 20.3 PSIG / 1400 mbar, Max Vacuum: 27.5 in HgV / -930 mbar , 27.5 in HgV / -930 mbar, Voltage (DC): 12, DC Motor Type: Standard, Item Dimensions: Length: 8.27 in / 210 mm Width: 2.32 in / 59 mm Height: 2.32 in / 59 mm , Length

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

17.5 12.7 5/32" 20.3 9.3 10.8 33.8 28.8 10-32 UNF 8 9.6 9.3 30.1 25.1 34.5 3/16" 23.3 16.5 21.3 11.4 8 31.9 1/4" 20.7 13.7 21.6 12 17 1/8" 24.4 8.4 17.5 12.7 13.1 30.9 9.3 5/32" 24.9 9.3 18 37.3 3/16" 23.9 16.5 26.8 11.4 14 35.2 30.2 14.2 NPT 1/8 12.7 10.9 32.1 27.1 38.2 19 1/4" 25.6 17 29.9 13.2 16.2 12.9 40.8 21 5/16" 28.2 18.5 30.9 15.2 39.6 32 5/32" 21.9 16 30.6 10.4 16.2 10.9 41.6 33

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

22.9 36.3 30.9 13.5 14 26.9 24.9 6 11.6 5/32" 9.3 10.9 18 NPT 1/8 AS231FG-01-08 AS231FG-N01-05 35.2 30.2 27.1 32.1 28.2 40.8 18.5 16.2 23.9 30.9 26.8 14 8 15.2 3/16" 11.4 12.9 21 14 10.9 16.5 12.7 AS231FG-02-04 AS231FG-N01-07 21.9 39.6 36.3 16 16.2 25.6 30.6 29.9 4 10.4 1/4" 13.2 10.9 32 18.5 19 16.2 12.9 AS231FG-02-06 AS231FG-N01-09 25.2 42.1 40.8 17 18.4 28.2 34 30.9 6 12.8 5/16" 15.2 33

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

21 21 18.4 R 1/4 40.4 35.4 18.5 17 34.4 29.4 AS231FG-02-08 AS231FG-N02-03 28.2 45.6 40.1 18.5 21.9 35.2 30.6 8 15.2 5/32" 10.4 12.9 36 32 16 18.3 10.9 16.2 AS231FG-02-10 AS231FG-N02-05 31 48.4 42.6 21 23.9 38.7 31.1 10 18.5 3/16" 11.4 40 33 17 20.2 NPT 1/4 AS331FG-02-06 AS231FG-N02-07 40.4 35 34.4 29.4 25.2 47 45.6 17 25.6 38.5 34.2 6 12.8 1/4" 13.2 60 19 36 18.5 17.5 12.9 18.3 20.6 AS331FG

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

19.8 20.3 21.4 24.4 24.9 26.9 30.9 30.6 34 35.2 38.7 8.4 9.3 11.6 8.4 9.3 11.6 15.2 10.4 12.8 15.2 18.5 28.7 12.7 17.5 M5 x 0.8 8 8 28.8 33.8 25.1 30.1 9.6 9.3 10.8 31.8 13.5 20.6 ASV 17 31.8 12.7 17.5 9.3 13.1 AK 36.1 31.1 32.1 27.1 R 1/8 14.2 14.2 18 21 37.2 41.7 40.1 42.6 45.6 48.4 13.5 18.5 16 17 18.5 21 22.9 28.2 21.9 25.2 28.2 31 10.9 12.9 10.9 12.9 14 16.2 16.2 18.4 18.3 20.2 ASS 33

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

22.9 30.9 36.3 13.5 14 26.9 24.9 6 11.6 5/32" 9.3 10.9 18 NPT 1/8 AS231FG-01-08 AS231FG-N01-05 35.2 30.2 32.1 27.1 28.2 40.8 18.5 16.2 23.9 30.9 26.8 14 8 15.2 3/16" 11.4 12.9 21 14 10.9 16.5 12.7 AS231FG-02-04 AS231FG-N01-07 21.9 39.6 36.3 16 16.2 25.6 30.6 29.9 4 10.4 1/4" 13.2 10.9 32 18.5 19 16.2 12.9 AS231FG-02-06 AS231FG-N01-09 25.2 42.1 40.8 17 18.4 28.2 34 30.9 6 12.8 5/16" 15.2 33

Stroke Reading Cylinder and Counter

d9 T CW RR CL + Stroke A + Stroke (mm) Head side flange Rod side flange Common Foot type Rod side flange, Head side flange Double clevis type Bore size (mm) LT FT LA LB LE LH LX O A LD LS LY LZ FD FG FL FV FX FZ M A A A CD CL CU CW CX CZ RR T 32 40 50 63 M6 x 1 148 5.8 11.2 6.6 52.5 30 112.4 65 57 72.5 71 5.5 69.5 8 59 48 56 65 34 131 139 161 10 151 14 20 18 36 10 57.5 M6 x 1 7 11.2 6.6 33

Cylinder

58 63 1 68 J 73J 83 , 66 71 76 81 1 91 i 10 . . " ISore size A' ~i I D O'( A B e GA GB K MM CX E NN CK CU OC~ CH ' ,o j ' 1 Cr H I J (mni) .~ , ~ 6 7 9 14 16.5 3 1 0.5 11 M3 XO .S M10 X 1.0 6 17 , 6 18.5 20.4 3 16 4 12 1.6 18 3.4 8 26 ~-13 ( 10 10 20 5 M4XO.7 MlaXl.0 6.5 1.6 24 6 I 17 8 20,5 1 239 4.5 20 I 7 33 R l l~ . 5 L29 13.5. 12 24.5 6 15.5 6 18.5 M5 XO .8 M14 X 1.0 17 2.9 42 14 I

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

This could cause an auto switch malfunction. 14 30 14 Vacuum suction port Rc1/8 (NPT1/8, G1/8) Extension end adjuster 45.5 (Extension end adjuster) 15 6 N x M5 x 0.8 thread depth 8 Note 1) Note 2) Retraction end adjuster 6 14.5 (Extension end adjuster) 31 33 70 35 1.5 30 3 60 17.5 5H9 ( ) depth 5 +0.030 0 F 7 4 x M5 x 0.8 thread depth 8 18 2 N 1 x F 51 3 x M6 x 1 thread depth 13 5H9 ( )

Rotary Actuator/Vane Type

detecting position Auto switch mounting Auto switch adjustment D53 CRB2 Series Volume [cm3] Vane type Single vane Double vane Size 10 15 20 30 40 10 15 20 30 40 Rotating angle 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 100 90 100 Volume 1 (0.6) 1.2 1.5 1.5 (1.0) 2.9 3.7 4.8 (3.6) 6.1 7.9 11.3 (8.5) 15 20.2 25 (18.7) 31.5 41 1.0 1.1 2.6 2.7 5.6 5.7 14.4 14.5 33