ISO Cylinder

13 10 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 12 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 16 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 20 KJ8D 12 9 8 24 16 36 16 13 M8 x 1.25 14 25 KJ10D 14 10.5 10 28 19 43 20 15 M10 x 1.25 13 Floating Joint: JA In the case of dimension without C M M U U D F B G B E E H C P A [mm] Bore size Part no.

Micro Mist Separator Series AFD20/30/40

Please contact SMC if an application under such conditions cannot be avoided. 10 One-touch fitting 10 One-touch fitting Component Parts Material AFD20 Zinc die-casted AFD30, AFD40, AFD40-06 Aluminum die-casted Note Description No. Platinum silver Body q Replacement Parts Part no. No.

Mist Separator Series AFM20/30/40

N.O. q Warning 1. Replace the element every 2 years or when the pressure drop becomes 0.1 MPa, whichever comes first, to prevent damage to the element. G e PPA w r AL Design Caution 1. Design the system so that the mist separator is installed in a pulsation-free location.

A_HEC-OM-K001

During Auto tuning Auto tuning failure A T 1 E R R 1 9 P V < 2 3 . 0 C # 1 A T F a i l u r e A u t o T u n i n g M O D E S h u t O f f C a n c e l : A T k e y <4> External sensor sampling cycle setting: Mode indication External Sensor Sampling Cycle. Default value: 180 sec. Setting range 10 to 999 sec.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

For connector cable of M8 connector, refer to page 90. 49 Series SYJ7000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) y e q t r q t r w w (B) 2 (A) 4 (A) 4 (B) 2 i i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 t q r w 5 (R1) 3 (R2)

Nozzle Type Ionizer

Description of LEDs q w e No. Description LED Color Contents q Power supply display PWR Green Lights up when the power supply is turned on. w Discharge/Irregular high voltage display ION/HV Green/Red Lights up when static electricity is discharged. (Green)/Lights up if an abnormal high voltage discharge occurs.

2.0

LPV22 (N.O.) y y r r t i t u u o e e w w q q Component Parts No.

ChemicalThermo-con

Applicable Fluid Examples Applications Chemical Operating temperature range Chemical Operating temperature range Cleaning equipment 50 to 140F (10 to 60C) 50 to 140F (10 to 60C) Deionized water Ammonia hydrogen peroxide solution Plating equipment 50 to 104F (10 to 40C) 50 to 140F (10 to 60C) Hydrofluoric acid Sodium hydroxide 50 to 122F (10 to 50C) 50 to 140F (10 to 60C) Sulfuric acid (except

Air Cylinder

G G 4 x J Width across flats KA MM RY D E d e C B H1 10.2 L f B1 AL h + L C B A K ZZ + L + Stroke F N RT N M S + Stroke H ZZ + Stroke (mm) M Bore size Stroke range AL B B1 C D E F G H1 J K KA (mm) A (mm) Without reinforcement ring With reinforcement ring 40 50 63 80 30 35 35 40 40 27 32 32 37 37 60 70 85 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

e C B AL H1 L RR1 B C CZ CX 10.2 f l F K A N BN Hole dia.: CDH10 h + l Shaft dia.: CDd9 H S + Stroke ZZ + l + Stroke ZZ + Stroke Z + Stroke [mm] Bore size [mm] Stroke range [mm] A AL B B1 BN BP BQ C CDH10 CX CZ D E F GA GB GC GD GL GR H1 Without rod boot With rod boot 40 Up to 500 20 to 500 30 27 60 22 96 1/4 1/4 44 10 +0.058 0 15 +0.3 +0.1 29.5 16 32 10 85 15 26 54 10 10 8 50 Up to 600 20

HEC_W-E

Alarm Sequence Setting range : On, Off Indicated content : Use of temp. upper/lower limit alarm U p p e r / L o w e r T e m p . A l a r m S e q u e n c e M O D E < O f f sequence(Ex. : Off) Function : Determines whether or not temp. upper/lower limit alarm is output when power is turned on.

VQ5000

Indicate 10 to 12 stations on the manifold specification sheet.) One station is used for serial unit mounting.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

V] 10 [V] 10 [pulse] 10 [pulse] 0 0 10 [pulse] 10 [pulse] -10 [V] -10 [V] CW direction CW direction App. 20 APPENDIX Setting value Output item Description Setting value Output item Description 0A Feedback position (Note 1, 2, 3) (10 V/1 Mpulse) 0B Feedback position (Note 1, 2, 3) (10 V/10 Mpulse) CCW direction CCW direction 10 [V] 10 [V] 1 [Mpulse] 10 [Mpulse] 0 0 1 [Mpulse] 10 [Mpulse] -

Cylinder with Lock

e C B H1 BN N F AL A K H U 10.2 f l L RR B C CZ CX h + l S + Stroke Z + Stroke ZZ + Stroke Z + l + Stroke ZZ + l + Stroke (mm) Bore size (mm) Stroke range (mm) 40 50 63 80 100 A AL B B1 BN BP BQ C CDH10 CX D E F GA GB GC GD GL GL1 GR H1 J K CZ H +0.058 0 +0.3 +0.1 Up to 500 30 27 60 22 96 1/8 1/8 44 10 29.5 16 32 10 85 15 50 16 12 12 10 8 M8 x 1.25 6 51 15 +0.070 0 +0.3 +0.1 Up to 600 35

LEC-OM07605CN

D A C Logo 39.0 23.8 12.7 B A B C D E 10120-3000PE 10320-52F0-008 22.0 33.3 14.0 10.0 12.0 AWG 24, 26, 28, 30 9 5 10. 10 .2 10.1 .2 10.2 .4 10.3 .5 10.3.1 .5 10.3.2 .6 10.4 .7 10.5 .7 10 1 10. 10 10.1 10.1[AL. 50 1] [AL. 51 2] 70% (120%(full load current)) LE-TT5 T6 a T7 T8 T9 b 10 2 10. 1000 1000 100 100 [s] [s] 10 10 1 1 0.1 0.1 100 20 0 100 200 300 0 50 15 0 250

Programless controller Step motor (servo 24 VDC)

Please refer to the specifications of the electric actuator for more details. *3) "10" to "15" in decimal number are displayed as follows in the 7-segment LED. Decimal display 10 11 12 13 14 15 Hexadecimal display A b c d E F 13 No. JXC-OMU0029-A 3.2 Parts description The detailed descriptions of each part are as follows: (e) (d) (c) No.

A_HEC-OM-I009

U p p e r / L o w e r T e m p . A l a r m S e q u e n c e M O D E < O f f On : Output Off : Not output (Alarm for high and low temperature limit is not detected until the temperature reaches the target temperature after the power is supplied.)

Speed Controller with

2 w y r u e !2 t i q o !0 !1 i q o !0 !1 Component Parts No. Description Body A Handle Body B Needle Seat ring Needle guide Material Note No.

NCG/CG1

CGIK Basic Style Bore size (mm) Stroke range (mm) A GB GA F B1 D E AL C H KA NA P TA TC ZZ I H1 MM S TB J 20 25 32 40 50 63 10 10 10 10(13) 12(14) 12(14) 12 12 12 13 14 14 2 2 2 2 2 2 Up to 200 Up to 300 Up to 300 12 14 18 25 30 32 18 22 22 30 35 35 15.5 13 17 17 19 27 27 14 9.2 5 6 6 8 11 11 M4 x 0.7 depth 7 24 35 40 40 50 58 58 8 10 10 14 18 18 1/8 1/8 1/8 1/8 1/4 1/4 11 11 11 12 13 13

HAW

) Q R Cooling water outlet 87 G (H) K J Cooling water inlet S T 2 x 2 x U Mounting holes D N Drain C (A) B (M) W Rc (mm) B C D E F G H J K L M N P Q R S T U V W Y Z 473 ZA HAW2-04 HAW7-06 HAW22-14 HAW37-14 HAW55-20 HAW75-20 HAW110-30 Model A 360 570 948 1354 1612 2112 1724 1 2 3 4 1 2 1 2 3 4 3 4 3 4 3 4 1 2 1 2 3 4 395 10 10 12 18 18 18 18 4.5 4.5 4.5 6.0 6.0 6.0 8.0 94 94 150 139 139 139