PFxx-OMK0003CN

PF-OMK0003CN-E A 1L(2) L () M315L L () / ZS-36-A1 1 L (2 ) (M315 L)2 ZS-36-A2 2 L (2 ) (M325 L)2 ZS-36-A3 3 L (2 ) (M335 L)2 ZS-36-A4 4 L (2 ) (M345 L)2 ZS-36-A5 5 L (2 ) (M355 L)2 -11No. PF-OMK0003CN-E DIN -12No. PF-OMK0003CN-E F 15[V]F.S.=5-1=4[V] (1%F.S.=40.01=0.04[V]) F.S. (full spanfull-scale) 90 -13No. PF-OMK0003CN-E 3%F.S.

PF-OMM0004_C

) -24No.PF-OMM0004-D 3 1 [P_1][n_1] 1 1 OUT1OUT2[P_2][n_2] [ tn][ tp] [F 1]OUT1(60)[F 2]OUT2(36) 30 (26) -25No.PF-OMM0004-D 2 [F 1] [F] 2 [F 1] OUT1 60 ON OFF 50% 5% ON OFF [F 2] OUT2 36 ON OFF 50% 5% OUT1 ON OFF 50 5 -26No.PF-OMM0004-D / [F3] 42 1 [F10] 43 [F20] 47 [F22] 48 OFF [F30] 50 OFF[] [F80] 51 [] [F81] 52 OFF [F82] 53 [*] [F90] 54 OFF [

HRX-OM-X037

Description Port size tightening piping torque specifications Chiller side 1 union 178 to 185Nm Circulating fluid outlet port Filter side Rc1 1 36 to 38Nm 1.0MPa or more CH1 Circulating fluid return port Rc1 2 36 to 38Nm 1.0MPa or more Tank drain port Rc3/4 2 28 to 30Nm Chiller side 1/2 union 64 to 70Nm Option T3 3/4 union 3 106 to 115Nm Circulating fluid outlet port Filter side Rc1/2

HRX-OM-X084

FLT Operation of this product will stop when the alarm occurs. 5.5 Advanced setting mode HRR Series 5-36 HRX-OM-X084 Chapter 5 Display and Setting of Various Functions Output of NOT TEMP READY 11. Press the [] key. Displays screen for setting the output of the NOT TEMP READY signal. The user can select whether thre is an output signal when alarm "AL13 NOT TEMP READY" occurs.

HRX-OM-W002

FLT Operation of this product will stop when the alarm occurs. 5.5 Advanced setting mode HRR Series 5-36 HRX-OM-W002 Chapter 5 Display and Setting of Various Functions Output of NOT TEMP READY 11. Press the [] key. Displays screen for setting the output of the NOT TEMP READY signal. The user can select whether thre is an output signal when alarm "AL13 NOT TEMP READY" occurs.

LEF-OM002xx

Electric actuators / Common precautions . 35 5.1 Design and selection . 35 5.2 Mounting . 36 5.3 Handling . 36 5.4 Operating environment. 37 5.5 Maintenance . 38 5.6 Precautions for actuator with lock . 38 6.

LEF-OM006xx

LEF-OM00601 / / / LEF Series LECSeries /LEC6 . 2 1/. 4 . 4 . 5 . 7 2 . 9 LEF / . 9 LEF/ . 12 . 14 . 15 3 . 17 . 17 . 18 . 21 . 27 4 . 30 5 . 31 51 . 31 52 . 32 53 . 32 54 . 33 55 . 34 56 . 34 6. 35 61 . 35 62 . 35 63 . 36 64 . 36 65 . 38 . 39 LEF Series/ (ISO/IEC) (JIS)1)2) *1) ISO 4414:Pneumatic fluid power -General rules relating to systems.

LEH_C

/LEHS .20 4.1 . 20 4.2 . 21 4.3 . 22 5.23 5.1 . 23 5.2 . 24 5.3 . 27 . 27 . 29 (1). 31 (2). 32 (3). 33 . 34 5.4 . 36 . 36 . 38 1 - 6.39 7.40 7.1 . 40 7.2 . 41 7.3 . 41 7.4 . 42 7.5 . 44 7.6 . 44 8.45 8.1 . 45 8.2 . 46 8.3 . 50 8.4 . 53 .54 2 - LEH Series / (ISO/IEC)(JIS)1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General

JXCx-OMU0004

LEHS 3 5mm/s LEHS10 LEHS20 LEHS LEHS 40 32 2.2 1.4 9 7 36 52 3.9 2.5 15.5 12 63 91 [N] 5.5 3.5 22 17 90 130 *LEHS10 30%F.S.LEHS20 25%F.S.LEHS3240 20%F.S.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

- 0OFF 1ON 0OFF 1ON Step No IN5 IN4 IN3 IN2 IN1 IN0 Step No OUT5 OUT4 OUT3 OUT2 OUT1 OUT0 32 1 0 0 0 0 0 32 1 0 0 0 0 0 33 1 0 0 0 0 1 33 1 0 0 0 0 1 34 1 0 0 0 1 0 34 1 0 0 0 1 0 35 1 0 0 0 1 1 35 1 0 0 0 1 1 36 1 0 0 1 0 0 36 1 0 0 1 0 0 37 1 0 0 1 0 1 37 1 0 0 1 0 1 38 1 0 0 1 1 0 38 1 0 0 1 1 0 39 1 0 0 1 1 1 39 1 0 0 1 1 1 40 1 0 1 0 0 0 40 1 0 1 0 0 0 41 1 0 1 0 0 1 41 1 0 1 0 0 1

LEYx-OMZ0015

Scket width across flats Max.thread depth [mm] Model Bolt tightening torque [Nm] [mm] LEY25 M8x1.25 12.5 13 17 LEY32 M8x1.25 12.5 13 22 LEY63 M16x2 106 21 36 Soket LEY100 M20x2.5 204 27 27 Work fixed / Rod end male thread Max.

E-MY2_E_D

(See page 36, 37 and after for ALM display in case of alarm.) General 3 positions 5 positions General Manual alarm reset When alarm occur, press for recovery from alarm condition. External alarm reset Even if alarm occurs, it recovers from alarm condition by inputting emergency stop command externally for 50ms or more. Then operation is available.

Electric Actuator / Low profile slider type

Electric actuators / Low profile slider type Common precautions. 36 6.1 Design and selection . 36 6.2 Handling . 37 6.3 Mounting . 38 6.4 Precaution on maintenance . 41 7. Trouble shooting . 43 LEM Series / Low profile slider type Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

mb1

(Drill through) Note) Dd9 L l d m H B C CJ1 D Cotter pin 3 x 18l 4 x 25l 4 x 35l 0.040 0.076 0.050 0.093 0.065 0.117 NT-03 NT-04 NT-05 NT-08 NT-10 CD-M03 CD-M05 CD-M08 10 14 22 32 40 50, 63 80 100 32, 40 50, 63 80, 100 3 4 4 44 60 82 36 51 72 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 4 4.5 5 6 8 11 13 16 17 22 27 32 41 19.6 25.4 31.2 37.0 47.3 16.5 21 26 31 39 CJP CJ2 Note) When

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

. : 20, 25, 32 : GR-S-010(10 g) 40, 50 : GR-S-020(20 g) 713 MHW2 Series Dimensions MHW2-20D Flat finger type (Standard) 20 2 x M5 x 0.8 thread depth 7 (Mounting thread) 17 60 4 x M5 x 0.8 thread depth 10 (Mounting thread) Bottom through hole dia. 4.2 (Mounting hole) 45 2 x M5 x 0.8 thread depth 10 (Mounting thread) 35 23 26 27 36 18 23 7 2 21H9 +0.052 depth 3 0 +0.2 +0.1 12 16 36 26 4 x M4

3

C 1 B A Basic (mm) (mm) T 9 10.5 MKB20-Z MKB25-Z Model Yh9 18 23 A B C E F G 36 40 47 52 36 40 35.5 40.5 18 21 17.9 22.5 S 28 27.5 Clamp stroke Model Rod state 0 0.043 0 0.052 20 mm Q R 112.5 142 113.5 143 30 mm Q R 132.5 172 133.5 173 10 mm Q R 92.5 112 93.5 113 Retracted Extended Retracted Extended MKB20-Z 72 82 92 MKB25-Z 73 83 93 Note) The above figure is with the auto switch (D-M9) mounted

2–4

HS A B Reed switch Solid state switch D-A7 H D-A80H D-F7 D-J79 D-F7 W D-J79W D-F7BAL D-F7 F D-F7NTL 32, 40, 50 (mm) D-F7 D-J79 D-F7 W D-F79F D-J79W D-F7BAL D-F7LF D-A7 H D-A80H D-F7NTL Auto switch model A B Hs 9.5 13.5 11.5 Symbol A B Hs A B Hs A B Hs 32 40 50 32.5 36 42 10.5 13 16 13.5 17.5 15.5 32.5 36 42 11.5 14 17 14.5 18.5 16.5 32.5 36 42 32.5 36 42 6.5 9 12 6.5 9 12 9.5 13.5 11.5 Bore

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

H 6.8 L MDHR2-15 H 6.8 12-5-9 10 Series MHR2/MDHR2 Nominal Size 10 Without auto switch: MHR2-10R 3-M3 x 0.5 thread depth 6 P .C.D.24 (Mounting thread) MHR2-10E Port Location 33.4 32 B 36 8.5 120 120 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 9.5 M3 x 0.5

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

-X MRHQ A 12 12 MA DB Model A 5 4.7 B 14.5 14.5 15.5 15.5 -10R -10E -10R -10E MHR2 MDHR2 4 4 4 4 497 Series MHR2/MDHR2 Nominal Size 15 Without auto switch : MHR2-15R 3 x M3 x 0.5 thread depth 6 P.C.D.29 (Mounting thread) 44 42 MHR2-15E Port Location B 45 120 120 11 A C 36 M3 x 0.5 M3 x 0.5 Finger closing port Finger opening port 10 M3 x 0.5 Finger opening port M3 x 0.5 Finger closing port

Compact Guide Cylinder Series MGQ

46 41 68.5 69 M10 x 1.5 32 40 50 63 80 100 20 20 25 25 28 36 24 17.5 25 20 18.5 21 71.5 71.5 81 81 93 105 16 16 20 20 25 30 M10 x 1.5 M12 x 1.75 M14 x 2 Note) For intermediate strokes other than standard strokes, refer to the Manufacture of Intermediate Stroke on page 339.