In-line Air Filter

20 0.7 MPa 0.7 MPa 10 10 0 20 40 60 80 100 0 0 0 50 100 150 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC74 6 ZFC75 8 0.1 MPa 0.3 MPa 0.5 MPa 0.1 MPa 0.3 MPa 30 30 Differential pressure [kPa] Differential pressure [kPa] 0.5 MPa 0.7 MPa 20 20 0.7 MPa 10 10 0 50 100 150 250 200 0 0 0 100 200 300 400 500 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC76 10 ZFC77 12 0.1 MPa 0.3

Digital Flow Switch (Integrated display type)

I max. 92% 8% 90% 10% PFM710 80% 20% 0.2 to 7.0 L/min 0.2 to 7.4 L/min 0 to 7.4 L/min 3.80 V 15.2 mA 70% 30% 60% 40% 92% 8% 0.5 to 25.0 L/min 0.5 to 26.3 L/min 0 to 26.3 L/min 5.00 V 20.0 mA 90% 10% PFM725 80% 20% 0.5 to 20.0 L/min 0.5 to 21.0 L/min 0 to 21.0 L/min 4.20 V 16.8 mA 70% 30% 60% 40% 92% 8% 1.0 to 50.0 L/min 1.0 to 52.5 L/min 0 to 52.5 L/min 5.00 V 20.0 mA 90% 10% PFM750 80% 20%

Digital Flow Switch (Remote type monitor unit)

As a whole product, the fluid temperature range is specified as 0 to 90 oC. -69No.PF-OMN0012-H Characteristics graph Analogue output (Flow) (PF3W504/520/540) A B C Voltage output 1 V 1.5 V 5 V Current output 4 mA 6 mA 20 mA (PF3W511) A B C Voltage output 1 V 1.4 V 5 V Current output 4 mA 5.6 mA 20 mA (PF3W521) A B C Voltage output 1 V 1.5 V 5 V Current output 4 mA 5.9 mA 20 mA Rated flow

Parallel Type Air Gripper

Specifications 1-1 Specifications Specifications Model MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 MHZ2-32 MHZ2-40 Cylinder inside diameter (mm) 10 16 20 25 32 40 Fluid Air Double acting: D 0.2 to 0.7 0.1 to 0.7 Operating pressure (Mpa) Normally open: S 0.35 to 0.7 0.25 to 0.7 Normally Single acting closed: C Ambient and fluid temperature (oC) 10 to 60 Repeatability (mm) +/-0.01 +/-0.02 Maximum operating

JXCx-OMY0004

Initial Setting method 18 4.1 GSDML file and icons 18 4.2 GSDML file installation 18 4.3 Addition of JXCPH controller to PROFINET network 19 4.4 Registration of the device name of the JXCPH controller to be connected 20 4.5 Assign Device Name 20 5.

Output block / Power block

Total Output block current consumption (20 mA / point) + Total output load current consumption + Total valve manifold current consumption = 3.1 A.

SMC Wireless System EtherNet/IP ® compatible

No.EX-OMU0028-D PRODUCT NAME SMC Wireless System EtherNet/IP compatible MODEL / Series / Product Number EX600-WEN# (Base) EX600-WSV# (Remote) Contents Safety Instructions 2 SMC Wireless System Features 10 SMC Wireless System Outline 11 Outline 11 System configuration 12 Base 13 Remote 14 Definition and terminology 15 Assembly 17 Mounting and Installation 20 Installation 20 Model Indication

SMC Wireless System PROFINET compatible

No.EX-OMW0006-D PRODUCT NAME SMC Wireless System PROFINET compatible MODEL / Series / Product Number EX600-WPN# (Base) EX600-WSV# (Remote) Contents Safety Instructions 2 SMC Wireless System Features 10 SMC Wireless System Outline 11 Outline 11 System configuration 12 Base 13 Remote 14 Definition and terminology 15 Assembly 17 Mounting and Installation 20 Installation 20 Model Indication and

SL5200

0.14 30 0.21 15 0.10 20 0.14 10 0.07 10 0.07 5 0.03 0 0.00 0 0.00 0 20 40 60 80 100 120 Flow rate (slpm, N2) 0 4 8 12 16 20 24 28 32 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Compact Guide Cylinder JMGP Series ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Symbol Rubber bumper Bore size [mm] Standard stroke [mm] 12 (10 x 2) 16 (12 x 2) 10, 20, 30, 50, 100 20 (16 x 2) 25 (20 x 2) 20, 30, 50, 100, 150 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) 25, 50, 100, 150, 200 Intermediate strokes are available as a special order. Refer to pages 10 and 11 for cylinders with auto switches.

80

C R E (AC type) [mm] Model Port size P B B1 C D E F B B1 2 x P Port size VDW1 M5(M6) 20 10 46.1 15 9.5 11 VDW2 M5(M6) 22 11 50.9 20 9.5 13.5 Mounting bracket dimensions Electrical entry Model Port size P U W X Y Grommet Q R VDW1 M5(M6) 28 11 34 17 15.5 30.35 VDW2 M5(M6) 33 14 39 20 17 33.9 464 A Compact Direct Operated 2 Port Solenoid Valve VDW Series Air Medium vacuum Water Dimensions

30

(inch) M Weight (g) D Note 1) L Model 2 x Applicable tube KQB2H01-00 KQB2H03-00 KQB2H07-00 KQB2H09-00 KQB2H11-00 KQB2H13-00 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 12 12.6 13.5 16.1 16.6 18.5 9 9 12 14 16 20 25 26.2 28 33.2 34.2 38 6.8 6.8 11.5 17.4 23.7 37 3.4 5.6 13.1 26.1 41.5 58.3 D M M L Note 1) D is maximum diameter.

CE2

Bore size (mm) 80 NLP-80A PDU-25Z PSD-33 x 25 P75 DSM-30 CA80-1609 CA80-1604 P5 Description Material No. 40 NLP-40A PDU-16Z PSD-22 x 16 P44 DSM-20 CA40-1606 CA40-1601 P3 50 NLP-50A PDU-20Z PSD-27 x 20 P50 DSM-25 CA63-1608 CA50-1602 P3 63 NLP-63A PDU-20Z PSD-27 x 20 P60 DSM-25 CA63-1608 CA63-1603 P3 100 NLP-100A PDU-30Z PSD-38 x 30 P90 DSM-35 CA100-1610 CA100-1605 P5 Piston seal Rod seal A

CV/MVGQ

For detailed specifications, refer to page 10-20-1. Bore size (mm) Part no.

20

Blow Gun New New RoHS 20% reduction 20% reduction with the SMC Blow gun + S coupler + Coil tube in power consumption 10% reduction with the Blow gun (VMG) only New New With cover Extension nozzle Added 100 mm and 150 mm lengths Pressure loss 1% or less Amount of electricity used in a factory Actuators 10% Air 20% DOWN 20% Air leakage 20% Coolant 30% Air blow 56% Air blow 70% Others 50% SMC

CE2

Description Material 40 NLP-40A PDU-16Z PSD-22 x 16 P44 DSM-20 CA40-1606 CA40-1601 P3 50 NLP-50A PDU-20Z PSD-27 x 20 P50 DSM-25 CA63-1608 CA50-1602 P3 63 NLP-63A PDU-20Z PSD-27 x 20 P60 DSM-25 CA63-1608 CA63-1603 P3 100 NLP-100A PDU-30Z PSD-38 x 30 P90 DSM-35 CA100-1610 CA100-1605 P5 Piston seal Rod seal A Rod seal B Brake piston seal Cushion seal Piston gasket Tube gasket Cushion valve seal

Electric Slide Table / High Precision Type 《 Battery-less absolute 》

218 210 to 420 Max. speed[mm/s] *1 *3 400 200 100 400 200 400 200 Actuator specifications Pushing speed[mm/s] 20 to 30 10 to 30 5 to 30 20 to 30 10 to 30 20 to 30 10 to 30 Max. acceleration/deceleration[mm/s2] 5000 Positioning repeatability [mm] 0.01 Lost motion[mm] *4 0.1 or less Screw lead[mm] 10 5 2.5 12 6 16 8 Impact/Vibration resistance[m/s2] *5 50/20 Actuation type Ball screw (In-line

Digital Gap Checker

For ISA3-G type, the range is up to 280, with a hysteresis of 20.

60

Test range Thermometer Equipment for test Pressure tap Pressure tap Restrictor in the downstream side Restrictor in the upstream side Flow meter 6d 2d 10d 20d Fig. (3) Test circuit based on IEC60534-2-3, JIS B 2005 20 Flow Characteristics Note) Use this graph as a guide. In the case of obtaining an accurate flow rate, refer to pages 16 to 20.

VXD21/22/23

Model Power source Frequency (Hz) 50 25 12 60 20 8 50 45 20 60 40 15 50 60 25 60 50 20 AC VXD21 DC AC VXD22 DC AC VXD23 DC Operating Fluid and Ambient Temperature Operating fluid temperature (C ) High temperature oil (3) Ambient temperature (C ) Temperature conditions Power source Water (Standard) Air (Standard) Oil (Standard) (D, E, N, P) High temperature water (3) (D, N) 99(4) 100(4) AC