Series MY3A/3B Mechanically Jointed Rodless Cylinder/Basic Type ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

V 12 V Relay, PLC Grommet 24 V Yes IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 12 V 3-wire (NPN equiv.)

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 40 285.5 21 273 No.

Power Valve Precision Regulator

VBA VBAT AP100 841 VEX13 Series 0 3 Specifications VEX1A33 VEX1B33 VEX113 0 3 VEX123 0 3 VEX133 0 3 VEX153 0 3 VEX173 0 3 VEX193 0 3 Model Port 1(P) 2(A) 3(R) M5 01 M5 01 01 02 01 02 03 02 04 04 06 10 12 14 10 20 1 8 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 2 1 1 1 1 1 Port size M5 M5 1 2 4 1 4 1 2 Operation Manual knob (Push locking slotted type) and Air operated type Manual knob (Push locking

A

31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 84.5 27.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth

VQ

L size 19 248 18 235.5 17 223 16 210.5 15 198 14 185.5 13 173 12 160.5 11 148 No. L size 20 260.5 30 385.5 29 373 28 360.5 27 348 26 335.5 25 323 24 310.5 23 298 22 285.5 21 273 No. L size Blank plate with 2 screws and gasket 39 498 38 485.5 37 473 36 460.5 35 448 34 435.5 33 423 32 410.5 31 398 No. L size 40 510.5 2.9-15

1

36 79 35 14 22 10 1/4 24 29.5 68.5 32.5 55 50 62.5 25.5 68.5 67 60.5 55 102 62.5 71 XSA3-3P(N) 40 40 88 40 16.5 24.5 3/8 29 32 77.5 35 64 52.5 71.5 28 77.5 69.5 69.5 57.5 104.5 71.5 73.5 6 XSA Series Special Option/Replacement Parts Special Option Special Electrical Entry Direction 2 1 S 5 G 1 XSA 2 Enter standard product number.

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

(mm) Elbow type TMH 6 8 10 12 Tube swivels 360 AS121F-M5-W2 M5 ASD Application to inch size tubing Metric size 6, 8, 10, 12 AS221F-01-W2 R1/8 AS221F-02-W2 R1/4 AS AS321F-02-W2 R1/4 Maximum operating pressure 1 MPa max.

Low torque Metal seal type Rotary joint

Name Material Remarks 1 Body Stainless steel 2 Spool Special stainless steel 3 Sleeve Special stainless steel 4 Plate Aluminium 5 O-ring H-NBR 6 Retaining ring Carbon steel 7 Retaining ring Carbon steel 8 Radial bearing MQR2 to 12-M5 Components / (MQR2 to 12 M5, 2 to 12 circuits) No.

ASD

Millimeter Inch With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 01 03 05 07 09 11 4 6 8 10 12 04 06 08 10 12 Thread _ Meter thread (M5) Unified thread (10-32 UNF) R(PT) N NPT Port size M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AS ASN AQ ASV Needle Valve/Flow Characteristics AK ASD230F ASD330F ASD430F ASS 100 200 400 1.5 6 3 07, 08, 09, 10, 11 Effective area (mm2) Flow

9.8

(Refer to Copy function on page 8.) 3 Series ZSE10(F)/ISE10 Dimensions ZSE10(F)/ISE10 M5 6.4 (7.7) (30) 2 x 3.3 M5 x 0.8 (12) 1.2 25 13 3.5 9.8 51.8 4.2 ZSE10(F)/ISE10 M5R 1.2 6.4 25 51.8 4.2 9.8 4.5 M5 x 0.8 4 Digital Pressure Switch Series ZSE10(F)/ISE10 ZSE10(F)/ISE10 01 6.4 2 x 3.3 1.2 Width across flats 10 Width across flats 12 11 13 13 25 3.5 8 R1/8 9.8 12.5 51.8 4.2 ZSE10(F)/ISE10

MHx-OMU0057

6 MHZ2-16 M40.7 1.6 4.5 MHZ2-20 M50.8 3.3 8 L L MHZ2-25 M61 5.9 10 MHZ2-32 M61 5.9 10 MHZ2-40 M81.25 13.7 13 Nm Lmm MHZ2-10 M30.5 0.69 5 MHZ2-16 M40.7 2.1 8 MHZ2-20 M50.8 4.3 10 MHZ2-25 M61 7.3 12 MHZ2-32 M61 7.9 13 MHZ2-40 M81.25 17.7 16 Nm MHZ2-10 M2.50.45 0.49 MHZ2-16 M30.5 0.88 MHZ2-20 M40.7 2.1 MHZ2-25 M50.8 4.3 MHZ2-32 M50.8 4.3 MHZ2-40 M61 7.3 D-Y59 D-Y69 D-Y7P 7 - 1. 2. 1.

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

size Lubrication Model Rubber Air M3 x 0.5 12-CY3B6 6 300 50, 100, 150, 200 M5 x 0.8 12-CY3B10 10 500 50, 100, 150, 200, 250, 300 15 1000 12-CY3B15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rc1/8 NPT1/8 G1/8 25 12-CY3B25 (Both sides) Non-lube 32 12-CY3B32 1300 Rc1/4 NPT1/4 G1/4 12-CY3B40 40 100, 150, 200, 250

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

Connector Series VQ100 VQ110-M-M5 46.3 About 300 (In case of latching) 35.3 Manual override (Lead wire length) About 300 (Lead wire length) 4.9 4.9 12.4 15 E Lead wire color : Red 12 2.5 17 Lead wire color : Black 22.7(Mounting hole) In case of latching type In case of locking knob type SMC VQ110 -*M 34.8 30.7 JAPAN (5.9) 5 (5.9) 5 (4.1) 5 11 7 P A 4.9 8.5 4.9 3-M5 (M3) 30.2 36.6 ( ) :

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

16 20 25 12 16 20 25 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 M5 x 0.8 M5 x 0.8 Double acting Single rod 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Suction flow rate L/min (ANR) Bore size (mm) 12/16/20/25 Size 5 12/16/20/25 Item Proof pressure 1.5

Low torque Metal seal type Rotary joint Series MQR

Name Material Remarks 1 Body Stainless steel 2 Spool Special stainless steel 3 Sleeve Special stainless steel 4 Plate Aluminium 5 O-ring H-NBR 6 Retaining ring Carbon steel 7 Retaining ring Carbon steel 8 Radial bearing MQR2 to 12-M5 Components / (MQR2 to 12 M5, 2 to 12 circuits) No.

Dual Speed Controller with One-touch Fitting Series ASD 1

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 1.5

MXU

3-wire (NPN) 2-wire Relay, PLC IC circuit 5 V, 12 V 3-wire (PNP) 12 V 2-wire Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Solid state switches marked with are produced upon receipt of order.

MXU

3-wire (NPN) 2-wire Relay, PLC IC circuit 5 V, 12 V 3-wire (PNP) 12 V 2-wire Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Solid state switches marked with are produced upon receipt of order.

CG1 Series ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Air Cylinder: Standard Type Double Acting, Single Rod

Air Cylinder: Standard Type Double Acting, Single Rod CG1 Series 20, 25, 32, 40, 50, 63, 80, 100 RoHS How to Order 100 CG1 20 N B Z N B 20 Z Bore size 100 CDG1 M9BW With auto switch With auto switch (Built-in magnet) Pivot bracket Made to Order Mounting Nil None For details, refer to page 293. 20 20 mm 25 25 mm 32 32 mm 40 40 mm 50 50 mm 63 63 mm 80 80 mm 100 100 mm N Pivot bracket is shipped

Electro-Pneumatic Proportional Valve

: 0.12 10% or less 3% or less 1MPa 12, 24VDC 0 to 2W 0 to 4W Class B Series PVQ How to Order P V Q 13 5 L 03 M5 Valve type Body materials Symbol A Nil Body Brass C37 Note for PVQ13 for PVQ31, 33 13 31 33 N.C.