Prevents Micro-Bubbles

VX3 Valve type Material VXA 0 1 2 N.C. N.O. Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 VN Symbol 01 02 01 02 02 03 03 04 04 06 10 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Body class Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.

High Purity Chemical Valve

LVN Valve type Material TL/TIL 0 1 2 N.C. N.O. Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Symbol 01 02 01 02 02 03 03 04 04 06 10 Body class LQ3 Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.

Fieldbus system EtherNet/IP compatible SI Unit

: direct 1: swap 16 bit 2: swap 32 bit 3: swap all 01h to 74h IO-Link master 0Ah Get/Set Byte swap USINT 1 0: 2/2/2/2 1: 4/4/4/4 2: 8/8/8/8 3: 16/16/2/2 4: 32/2/2/2 5: 16/16/8/8 6: 16/16/16/16 7: 24/24/8/8 8: 24/24/24/24 9: 32/32/8/8 10: 32/32/32/32 75h IO-Link master Process data mapping USINT : Port1/Port2/Port3/Port4 process data size (I/O byte) 1: The instance number 01h to 0Ah is allocated

HRX-OM-I051

. 7-6 Chapter 8 Appendix . 8-1 8.1 Specification . 8-1 8.1.1 System specification . 8-1 8.1.2 Refrigerant with GWP reference . 8-11 8.1.3 Communication specification. 8-12 8.1.4 Alarm signal selection . 8-14 8.2 Outer Dimensions . 8-15 8.2.1 Part 1 . 8-15 8.2.2 Part 2 . 8-15 8.2.3 Part 3 . 8-16 8.3 Flow Chart . 8-17 8.3.1 Part 1 . 8-17 8.3.2 Part 2 . 8-18 8.4 Offset Function . 8-19 8.4.1

Plug-in Unit

PW 0 0 0 1 1 1 9 9 9 PW LRUN 2 2 2 8 8 8 3 3 3 7 7 7 4 4 4 6 6 6 SD RD LERR. 5 5 5 L RUN SD RD x10 x1 24V 0V +24V 24G DA DB FG DG L ERR.

45

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

Modular Type Air Filters Series AF

Modular Type Air Filters Series AF Air Filter Series AF Filtration (m) Model Options Port size AF10 M5 x 0.8 AF20 1/8, 1/4 AF30 1/4, 3/8 Bracket AF40 1/4, 3/8, 1/2 5 Float type auto drain AF40-06 3/4 AF50 3/4, 1 AF60 1 Page 328 through to 336 Mist Separator Series AFM AFM20 1/8, 1/4 AFM30 1/4, 3/8 Bracket 0.3 Float type auto drain AFM40 1/4, 3/8, 1/2 AFM40-06 3/4 Page 338 through to 344 Micro

45

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

: Hold 2: Clear / PD Out invalid 4..5 Idle output (IO-Link) 0: Clear 1: Hold 2: Force ON 6..7 Idle output (DO) 0: 2 / 2 / 2 / 2 1: 4 / 4 / 4 / 4 2: 8 / 8 / 8 / 8 3: 16 / 16 / 2 / 2 4: 32 / 2 / 2 / 2 Process data mapping Port1/Port2/Port3/Port4 (Input and Output) 4 0..7 0 L+ control Port 1 0: L+ ON, 1: L+ OFF 1 L+ control Port 2 0: L+ ON, 1: L+ OFF 5 2 L+ control Port 3 0: L+ ON, 1: L+

HRX-OM-K003

Flow Chart . 8-8 8.3.1 Part 1 . 8-8 8.3.2 Part 2 . 8-8 8.4 Offset Function . 8-9 8.4.1 Example of offset function . 8-10 8.5 BAND/READY function . 8-12 8.6 Anchor Bolt Mounting Position . 8-13 8.7 Compliance . 8-14 8.8 Thermo Chiller Daily Inspection Sheet . 8-15 Product Warranty . 8-19 HRW Series TOC-3 HRX-OM-K003 Table of Contents HRW Series TOC-4 HRX-OM-K003 Chapter 1 Safety Chapter 1

VFM300

Air, Inert gas Fluid Operating pressure 0.15 to 0.9MPa (1) Ambient and fluid temperature Effective area (Nl/min) Maximum frequency (Mechanical operation style) 5 to 60C (No freezing) 18mm2(891.50) 300 c.p.m or less Lubrication Not required/Turbine oil #1 (ISO VG32) Main valveSUP, CYL port , EXH port 1 4 1 8 Port size Pilot valve (EXH)/M5 Option Foot bracket (2) Piping possible to any EXH

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

SOL.a 20 Station 1 SOL.b 18 20 19 SOL.a 16 Station 2 SOL.b 14 18 17 SOL.a 12 Station 3 SOL.b 16 15 10 SOL.a 8 Station 4 14 13 SOL.b 6 SOL.a 19 12 11 Station 5 SOL.b 17 SOL.a 15 10 9 Station 6 SOL.b 13 8 7 SOL.a 11 Station 7 SOL.b 9 6 5 SOL.a 7 Station 8 SOL.b 5 4 3 3, 4 2 1 24 VDC Triangle mark + 1, 2 Note 1) This circuits are for the specifications with up to 8 stations of 2 position double

IDG

Port size: Rc 1/8, 1/4 (NPT, G threads are not available.)

Serial Transmission System Series EX250 Series EX500

fitting 10 One-touch fitting 12 One-touch fitting Rc 1/4 Rc 3/8 G 1/4 G 3/8 Ports 2, 4 mixed 8 One-touch fitting N1 N3 N7 N3 N7 N9 N7 N9 N11 N9 N11 02N 03N 02T 03T M 1/8" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting 3/8" One-touch fitting 5/16" One-touch

Series IDG

8, 1/4 1/2 3/8, 1/2 0.25 (0.31) 0.43 (0.51) 0.66 (0.76) 0.74 (0.87) 0.77 (0.90) 1.50 (1.65) 1.50 (1.65) 1.55 (1.70) Note 1) With no freezing.

Manifold Specifications

2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations Rc 1/4 1 8 Rc Nil F N Z NPTE 01 Rc C6 One-touch fitting for 6 4(A), 2(B) port G 20 20 stations 1(P) port Rc 1/8, C6 NPT B7 One-touch fitting for 1/4" Rc 1/4 How to Order Type 43 VV5Z3 05 43 1 C4 1(P), 3/5(R) port thread type 4(A), 2(B) port size Stations 02 2 stations 3/5(R) port Nil F N Z NPTE Rc C4 One-touch fitting

90

5Pressure sensor assembly ZK2 VA1S A 8 1 ZK2 PS A One-touch fitting size Rated pressure range and specifications 6 8 7 9 6 One-touch fitting 8 One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting Metric size 0 to 101 kPa, Output: 1 to 5 V, Accuracy: 2% F.S. or less 100 to 100 kPa, Output: 1 to 5 V, Accuracy: 2% F.S. or less 1 Inch size 3 !

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

Note 1) 2 1/8, 1/4 3 3/8 4 1/2 Type Metric size Inch size 2 Elbow 3 Universal Tubing O.D. 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Tubing O.D. 23 3.2 Note 2) 04 4 06 6 08 8 10 10 12 12 16 16 Control type 0 Meter-out 1 Meter-in * Meter-out and meter-in types can be visually identified by color of the knob.

SMC Wireless System PROFINET compatible

Input Output EX600-W### (32 points) 0 1 4 EX600-W### (24 points) 01 3 Wireless unit WPN WSV EX600-W### (16 points) 01 2 EX600-W### (8 points) 01 1 EX600-W### (0 point) 0 1 0 EX600-DX#B (8 points) 1 0 EX600-DX#C (8 points) 1 0 EX600-DX#C1 (8 points) (with broken line sensor) 1 0 Digital input unit DX EX600-DX#D (16 points) 2 0 EX600-DX#E (16 points) 2 0 EX600-DX#F (16 points) 2 0 EX600-DY#

ISA2

to 6 stations Rc, NPT, G 1/8 IP66 (IP65 for solenoid valve.