DOC1023125

Actuator mounting A L Model Bolt size A L [mm] [mm] EQFS25 M4 4.5 24 EQFS32 M5 5.5 30 EQFS40 M6 6.6 31 15 - Body mounting example For bottom of housing B Body mounting reference plane Positioning pin position (Mounting reference plane) Body mounting reference plane Positioning pin position (Mounting reference plane) Positioning pin position (Bottom of housing B) Positioning pin position Body

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

x 0.8 depth 5 Piping port 2 x 3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 M5 x 0.8 depth 5 Piping port 2 x 3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 13 13 777

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 Symbol Specifications -X12 Lubricant: Vaseline -X21 Grease-free (Seal: Fluorine-coated) + Throttle valve (Without check valve) -X214 Throttle valve (Without check valve) Note) M5 size: S (with seal) is not necessary. 611 A AS Series Construction AS1201-M5 AS2201/3201/4201 AS3201-02 o !1 w r u y e t !5 !2 !4 q !0 !3 i Component Parts No.

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

1 Thread size M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 M5 port only Note 1) AS221: Electroless nickel plated Note 2) AS221: Steel Note 3) Meter-in type: Black zinc chromated 15-9-8 2 Speed Controller with One-touch Fitting Elbow Type (Metal Body) Series AS Flow Rate and Effective Area AS321-03 AS421-04 AS221-01 AS221-02 AS121-M5 Model Tubing O.D. 12 10 10 8 6 8 4, 6 6, 8 Controlled

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

Process Gas Diaphragm Valve

Construction Diaphragm Seat Body 1110 B Diaphragm Valve for Ultra High Purity Air operated type Series AZ3542 & 4542 Dimensions inch (mm) AZ3542 & 4542 Ports: 2PW (Welded) Ports: 2P (Machined) M5 x 0.8 Actuation port Actuation port M5 x 0.8 1.57 (40) 1.57 (40) FORGED BODY BAR STOCK BODY Note) 2.24 (57) 2.24 (57) 0.44 (11.2) 0.44 (11.2) A A B A A Connections: MV, FV Connections: MV B A A A

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

2-P (Piping port) G E G NN ( I ) D X NA R Mounting nut N W K N F S + Stroke F ZZ + Stroke H B E G Mounting nut NN NA F N 12CY3B15 (mm) L 57 66 70 80 92 J 6 6 8 8 10 K 11 8 10 15 16 I 12 15 18 23 G 5.5 7.5 7.5 8 11 H 13 20 20.5 22 29 F 10 13 13 16 16 E 2 2 2 2 3 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 B 35 36

Safety Instructions

Class H coil: AWG18 Operating Port Tightening Torque Class B coil: AWG20 Torque (Nm) Operating port M5 1/6 turn with a tightening tool after first tightening by hand 0.8 to 1.0 (1) Rc, NPT 1/8 0.8 to 1.0 SMC 2. Use of metal fittings Do not use metal fittings for piping on taper threads made of resin, as this may cause damage to the threads. 3.

Series AP3500

q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

VEX1

Body size Port size Port M5 01 Nil M5 01 1(P), 2(A), 3(R) M5 IR-A A Body ported 8 1 Without sub-plate M5 IR Base mounted B Position for port P1 8 1 IRV 3 VEX1 3 10 G 5 VEX VEX SRH Regulator valve Option Bracket Foot Pressure gauge Silencer for bleed port Dimensions of port P1 B F G SRP Type Precision regulator Operation Air operated type Manual knob type Fixed orifice SRF

PA3000/5000/PAX1000

FLUID OUT) Pump chamber B Pump chamber A Check valve Shaft Suction port (FLUID IN) Diaphragm B Diaphragm A Drive chamber A Drive chamber B Control unit 1.

Miniature Fittings Stainless Steel 316 MS Series Applicable Tubes: ø 3.2, ø 4, ø 6 Connection Thread: M5, R 1/8

KQB2 Universal tee M5 female x M5 female x M5 male Body rotates at 360 around the stud axis 4/2.5 x M5 MS-5UT MS-5AU-4 KS KX For soft nylon and polyurethane tube P.338 KM Push For reducing Rc 1/8 female to M5 female R 1/8 x M5 female 6/4 x M5 MS-5B MS-5AU-6 KF P.338 P.339 M Barb elbow for soft tube Plug Body rotates at 360 around the stud axis For soft nylon tube 3.18/2.18 x M5 Use to plug

VEX-OMY0001

AN103-01 AN210-02 1) VEX1-9-1P VEX4-2A-P VEX1-11-2 VEX4-4 DXT152-14-1A NXT013-3 VO307K-1 2) 3) VEX322 VEX342 Rc A 1/8 1/4 F G VVEX2 VVEX4 B 1/4 3/8 N NPT ( ) VEX1-17 VEX4-5 C 1/2 T NPTF 11 No.VEX-OMY0001 (2) () 3 2(A) 23(P2) 12(P1) a,b 12(P1),23(P2) (2) a 12(P1) 1(P)2(A)3 3(R) 3(R) b 23(P2) 2(A) 2(A)3(R)1 1(P) 1(P) 12(P1) 1 2 3 23(P2) 4 5 6 7 8 POM 9 -12No.VEX-OMY0001

Precision Clean Regulator

ARM Nil Standard Machined bleed port M5 thread Set pressure ARP X201 0 1 0.005 to 0.2 MPa 0.01 to 0.4 MPa X206 With bleed port fittings (Applicable tube O.D.: 4) IR-A Gauge port orientation IR Nil: Standard Port size IRV OUT IN Piping port size M5 x 0.8 Rc 1/8 Symbol M5 01 VEX Knob Gauge port SRH R: R specifications Symbol Gauge port SRP SRP OUT IN SRF Gauge port positions are indicated

Lubricator Series AL10 to 60

and caution plate for bowl in imperial units (PSI, F) Symbol 1 10 11 2 3 6 8 C R 3W Z Applicable model AL30 to 60 AL30 to 60 AL30 to 60 AL10 to 60 AL10 to 60 AL10 to 60 AL30 to 60 AL20 AL10 to 60 AL30 to 60 AL10 to 60 Body size F.R.L. 10 20 30 40 50 60 AV Thread type Metric thread (M5) Rc NPT G AU Nil AF N F AL20 Port size AR Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40

Base Mounted How to Order Manifold VQC1000 Series Plug-in Unit

A B A B A B A B A Nil Positive common Negative common N EX600 integrated-type (I/O) serial transmission system (Fieldbus system) PROFIBUS DP SI unit output polarity DeviceNet EtherNet/IP PROFINET CC-Link EtherCAT Nil Positive common D side Stations12345678n U side Negative common N Stations are counted from station 1 on the D-side.

3

Analog Output Flow rate/Analog output Fluid temperature/Analog output A B B Output Output A C Voltage output 0.6 V 1 V 04/20/40 11 21 C D C Current output 2.4 mA 4 mA 1 V 1.5 V 6 mA 1.4 V 5.6 mA 1.5 V 5.9 mA 5 V Voltage output 4 mA 20 mA Current output C D The values of B vary according to the range.

ASP

Metric size Inch size Pilot port Model Port size 6 8 10 12 1/4" 5/16" 3/8" 1/2" ASP330F-01 ASP430F-02 ASP530F-03 ASP630F-04 ASP430F-F02 ASP530F-F03 ASP630F-F04 ASP330F-N01 ASP430F-N02 ASP530F-N03 ASP630F-N04 M5 x 0.8 R 1/8 Rc 1/8 R 1/4 Rc 1/8 R 3/8 Rc 1/4 R 1/2 G 1/8 R 1/4 G 1/8 R 3/8 G 1/4 R 1/2 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/8 NPT 3/8 NPT 1/4 NPT 1/2 Note) Brass parts are all

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

Port size With One-touch fitting 01 M5 M5 R 1/8 R 1/4 R 3/8 R 1/2 02 03 04 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

Micro Mist Separator Series AFD20/30/40

Metal bowl PPA Applicable model Metal bowl with level gauge Metal bowl AL Optional specifications B B B B B N.O.: Black N.C.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B B O S 1/4 10 One-touch fitting Width across flats 17 O S (mm) With bracket Accessory specifications With auto-drain Port size Standard specifications Model M 2.3 2.3 2.3 2.3 B 115 170 204 208 L 40 53 70 70 H 22