WRF100

Contents q Cover L (1 pc.) w Cover R (1 pc.) e Top covers (2 pcs.) r Hexagon head bolts (4 pcs.) t Flat washers (4 pcs.) y Cover mounting bolts (8 pcs.)

AIR COMBINATION

Press the push button to exhaust the condensate of the C3SF(-W)-A and C4SF(-W)-A. Check the element periodically and replace it with a new one if necessary. If it is found that outlet pressure drops or the flow is restricted, check the condition of the element. The manual exhaust for emergency case can be performed by counterclockwise rotation of the handle in AD17-A and AD27-A.

Air Cylinder MGQ Series Compact Guide Cylinder

MGOM.,/Slide bearing MGQL,,/Ball bush bearing MGQL12-25-3O more stroke MGOM'12-2s-Lil . 5 O l O O , MGQM32-1OO t l01ooT P=o.5MPa 1 ,*"1 -Tt r t r . l 080 ; , . d63 t t , 5od ' l4oo o50 E;\ .' !

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

VCS

AZ-T-VCS Valve model no. on page 17-2-42/46 Seal part no. Valve w For VCS20 OR-1860-120P Tilt the screwdriver down in direction q so that the clip slides out in direction w.

Booster Relay Series IL100

0 Exhaust portr Adjusting springe Upper diaphragmw Upper diaphragm chamberq SIG Lower diaphragmy Lower diaphragm chambert OUT IN1 Springo Valvei Pistonu IN2 56 Series IL201/211/220 Construction 2 12 IL211 IL201 1 r r e t e !2 !2 u t u w w i !9 i !9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !

Series 10-, 21- AW-B Filter Regulator

K F 10 AW B 30 03 BG JN K F 21 AW B 30 03 BG JN Copper, fluorine and silicone-free + Low particle generation q r t y w e Filter regulator Option/Semi-standard: Select one each for a to g.

Electric Slide Table / High Precision Type 《 AC servo motor 》

LECSS-T,LECSN-T]Absolute 22-bit encoder (Resolution: 4194304 p/rev) Encoder [LECSC-T]Absolute 18-bit encoder (Resolution: 262144 p/rev) Power Horizontal 45 65 consumption [W] *5 Vertical 145 175 Horizontal 2 Standby power consumption when operating [W] *6 Vertical 8 Max. instantaneous power consumption [W] *7 445 724 Type *8 Non-magnetizing lock specifications Lock unit Holding force[N] 131

VR4151/4152

Component Parts w q Description Brass Brass t r Description Stainless steel Material Note No. Material Note No.

AS

2 w y r u e !2 t i q o !0 !1 i q o !0 !1 Component Parts No. Material Note No.

VNB

G E C T D DL S Z L 1, 2, 3, 4 (Only G)(Except G) 5, 6, 7 (Except DL)(Only T) (Only T) 17-4-13 2 Series VNB How to Order Seal material Body option Nil V Standard Vacuum pilot A B C NBR seals FKM seals EPR seals Thread type Bracket (valve size: 1/2/3/4.)

VT317

When an electric current is applied to the molded coil r, the armature t is attracted to the core y, and through the push rod u, it pushes down the spool valve w. Then, port P and port A are connected. At this time, there will be gaps between the armature t and the core y, but the armature will be magnetically attracted to the core y.

CDQ2BP series

. l b t t . l b kwh Volume ins 16387 in3 16.387 ft3 0.0283 ft3 28.329 gal(U.S.)3.785 Volume mm3 6.10 x 10-5 cm3 (cc) 0.0610 m3 35.320 L 0.0353 L 0.2642 Weight g 0.0353 kg 2.2046 1.356 N . m 1.356 J 3.6 l\rJ mm3 cm3 (cc) m3 L L rn3 in3 Energy ft3 N. m f t 3 J gar(u.s.)

Platform Cylinder Series CXT

QW RW S T W X Y Z Bore size (mm) 32 CXW 60 33 140 19 157 33 10.5 7.5 40 84 35 180 21 187 39.5 11 8 Note) Rc, NPT and G ports can be selected.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

NA Enclosure IP67 Refer to Note 1) of the w SI unit specifications. w q e r y t u i q Series t P, E port location r Valve stations 1 2 3 U D B For 32-output SI unit 10-SV1000 10-SV2000 10-SV3000 U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Symbol 02 Stations Note 2 stations Double wiring Note 1) w SI unit specifications 16 02 16 stations y SUP/EXH block

2/3 Port Solenoid Valve for Chemicals

3 Sleeve 7 Iron Spacer 8 PBT r Return spring 9 Stainless steel w Board assembly 10 e Casing 11 PBT q Plug 12 NBR O-ring 13 NBR 3 Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM10/100 Construction/Base Mounted Type LVM13R LVM14R LVM16R !2 !0 !2 !0 !2 !0 !1 !1 !1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No.

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

3 Sleeve 7 Iron Spacer 8 PBT r Return spring 9 Stainless steel w Board assembly 10 e Casing 11 PBT q Plug 12 NBR O-ring 13 NBR 3 Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM10/100 Construction/Base Mounted Type LVM13R LVM14R LVM16R !2 !0 !2 !0 !2 !0 !1 !1 !1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No.

1

r e t y i u OUT IN (Port 1) (Port 2) o Poppet Component Parts No.

3M/SMseries

++t&F Eft!

Compact Cylinder with Air Cushion and Lock Series RLQ

Rod side cylinder port Rc, NPT, G 1/8 Head side cylinder port Rc, NPT, G 1/8 Approx. 55.4 Approx. 40.4 Head side cylinder port Rc, NPT, G 1/8 Rod side cylinder port Rc, NPT, G 1/8 Approx. 55.4 Approx. 40.4 w e r t q u i y w e r t q u i y Approx. Max. 77.4 Approx. Max. 77.4 Approx. 53.8 Approx. Max. 59.4 Approx.