MPa) Without light/surge voltage suppressorWith light/surge voltage suppressorAC S, Z typeR, U typeVP342Standard (0.2 to 0.7)13 or less38 or less16 or less38 or less

0.5 MPa) Without light/surge voltage suppressorWith light/surge voltage suppressorAC S, Z typeR, U typeVP742Standard (0.2 to 0.7)19 or less44 or less22 or less44 or less

voltage suppressorAC S, Z typeR, U typeVP344Standard (0.2 to 0.7)13 or less38 or less16 or less38 or less

5 Pa?m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s

MPa) Without light/surge voltage suppressorWith light/surge voltage suppressorAC S, Z typeR, U typeVP342Standard (0.2 to 0.7)13 or less38 or less16 or less38 or less

MPa) Without light/surge voltage suppressorWith light/surge voltage suppressorAC S, Z typeR, U typeVP342Standard (0.2 to 0.7)13 or less38 or less16 or less38 or less

MPa) Without light/surge voltage suppressorWith light/surge voltage suppressorAC S, Z typeR, U typeVP742Standard (0.2 to 0.7)19 or less44 or less22 or less44 or less

light/surge voltage suppressorAC S, Z typeR, U typeVP344Standard (0.2 to 0.7)13 or less38 or less16 or less38 or less

light/surge voltage suppressorAC S, Z typeR, U typeVP542Standard (0.2 to 0.7)14 or less39 or less17 or less39 or less

0.5 MPa) Without light/surge voltage suppressorWith light/surge voltage suppressorAC S, Z typeR, U typeVP742Standard (0.2 to 0.7)19 or less44 or less22 or less44 or less

light/surge voltage suppressorAC S, Z typeR, U typeVP544Standard (0.2 to 0.7)14 or less39 or less17 or less39 or less

light/surge voltage suppressorAC S, Z typeR, U typeVP342Standard (0.2 to 0.7)13 or less38 or less16 or less38 or less

light/surge voltage suppressorAC S, Z typeR, U typeVP342Standard (0.2 to 0.7)13 or less38 or less16 or less38 or less

light/surge voltage suppressorAC S, Z typeR, U typeVP342Standard (0.2 to 0.7)13 or less38 or less16 or less38 or less

light/surge voltage suppressorAC S, Z typeR, U typeVP342Standard (0.2 to 0.7)13 or less38 or less16 or less38 or less

MPa) Without light/surge voltage suppressorWith light/surge voltage suppressorAC S, Z typeR, U typeVP342Standard (0.2 to 0.7)13 or less38 or less16 or less38 or less

voltage suppressorAC S, Z typeR, U typeVP344Standard (0.2 to 0.7)13 or less38 or less16 or less38 or less

when operating [W] Note 8)Max. instantaneous power consumption [W] Note 9)BasicCompactLEHZ1666 to 143 to 85 to 80/5 to 50Slide screw + Slide camLinear guide (No circulation)?

when operating [W] Note 8)Max. instantaneous power consumption [W] Note 9)BasicCompactLEHZ201016 to 4011 to 285 to 100/5 to 50Slide screw + Slide camLinear guide (No circulation)?

light/surge voltage suppressorAC S, Z typeR, U typeVP344Standard (0.2 to 0.7)13 or less38 or less16 or less38 or less