Base mounted plug-in manifold for VQ5*0* valve, Maximum 12 stations available as standard, D-sub connector reduces installation labor for electrical connection, D-sub connector - 25 pin, Select top or side receptacle position to meet available space requirement, 6 port sizes available, VV5Q51/55 BASE MT 1/2, VALVE, VV5Q51/55 MANIFOLD, RM, VV5Q51/55 BASE MT 1/2, 18.73929 lb

10%3023Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3023Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3023Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3019Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3019Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

The use of 34 pin connectors allows up to 16 stations with double solenoids.Tie rod base manifold for SV1000 valve, D-sub connector or flat ribbon cable, Maximum number of solenoids: 24, Number of connectors: 26, 25, 20, 10 pins, Maximum 20 stations available as standard, 6 port sizes available, Optional DIN rail mount, MFLD, PLUG-IN, D-SUB CONNECTOR, VALVE, SS5V1 MANIFOLD SV1000, UN

Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

Precision Clean Regulator Series SRP

mounting hole 40 8.5 20 28 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 41 1.6 Port size A B IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3

Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Stations: 6 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: Rc1/4, Thread: -, Control Unit: -, Voltage of Air Release Valve: -

Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Stations: 6 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: Rc3/8, Thread: -, Control Unit: -, Voltage of Air Release Valve: -

Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Stations: 6 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: Rc1/4, Thread: NPTF, Control Unit: -, Voltage of Air Release Valve: -

Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Stations: 6 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: Rc3/8, Thread: NPTF, Control Unit: -, Voltage of Air Release Valve: -

Base Mounted Wiring: Base Mounted Plug-in w/D-sub Connector on D Side, Stations: 6 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 3/8, Thread: -, Control Unit: -, Release Valve Rated Voltage: -

Base Mounted Wiring: Base Mounted Plug-in w/D-sub Connector on D Side, Stations: 6 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 1/4, Thread: -, Control Unit: -, Release Valve Rated Voltage: -

Base Mounted Wiring: Base Mounted Plug-in w/D-sub Connector on D Side, Stations: 6 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 3/8, Thread: NPTF, Control Unit: -, Release Valve Rated Voltage: -