See individual series information for replacements. 5 port solenoid valve, metric - old style see replacement series SYJ5000 - New Style , Operating pressure range: 0.15 to 0.7 MPa , Response time (0.5MPa): 20 (2 pos. sgl/dbl) 35 (3 position) , Ambient and fluid temperature: Max. 50C , Lubrication: non-lube, VZ3000, VALVE, VZ3000 SOL VALVE 4/5 PORT, 2D, VZ3000, 0.41991 lb

35 (3 position) , Ambient and fluid temperature: Max. 50C , Lubrication: non-lube

See individual series information for replacements. 5 port solenoid valve, metric - old style see replacement series SYJ5000 - New Style , Operating pressure range: 0.15 to 0.7 MPa , Response time (0.5MPa): 20 (2 pos. sgl/dbl)     35 (3 position) , Ambient and fluid temperature: Max. 50C , Lubrication: non-lube

See individual series information for replacements. 5 port solenoid valve, metric - old style see replacement series SYJ5000 - New Style , Operating pressure range: 0.15 to 0.7 MPa , Response time (0.5MPa): 20 (2 pos. sgl/dbl)     35 (3 position) , Ambient & fluid temperature: Max. 50°C , Lubrication: non-lube

See individual series information for replacements. 5 port solenoid valve, metric - old style see replacement series SYJ5000 - New Style , Operating pressure range: 0.15 to 0.7 MPa , Response time (0.5MPa): 20 (2 pos. sgl/dbl) 35 (3 position) , Ambient and fluid temperature: Max. 50C , Lubrication: non-lube, VALVE, DBL SOL, BODY PORT *LQA, VALVE, VZ3000 SOL VALVE 4/5 PORT, BF, VZ3000

See individual series information for replacements. 5 port solenoid valve, metric - old style see replacement series SYJ5000 - New Style , Operating pressure range: 0.15 to 0.7 MPa , Response time (0.5MPa): 20 (2 pos. sgl/dbl) 35 (3 position) , Ambient and fluid temperature: Max. 50C , Lubrication: non-lube, VZ3000 BODY PT(M5, NON-US STD), VALVE, VZ3000 SOL VALVE 4/5 PORT, BI, VZ3000

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Cylinder stroke (mm) Nil C M Standard strokes (mm) 5, 10, 15, 20, 25, 30 Bore sizes (mm) Action 12, 16 D Double acting 20 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Auto switch specifications Manufacturing intermediate strokes Intermediate strokes can be manufactured in 1mm increments by installing spacers in a standard stroke cylinder.

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

EA) 25 1.4 32 5.5 (mm) EA EB HA Size CRJU05 CRJU 1 6.6 5.6 33.8 6.5 5.6 35.8 7.5 3.1 (mm) Rotation angle Q S JC JD BA BD A BH J BB D JB H BE BG BI JA SD BC DD UU N BF CB W CA Size 32.4 21.5 43 90 CRJB05 13.5 M4 x 0.7 5 30 11 19.5 20 M4 x 0.7 5g6 3.5 14.5 6.5 17.1 7 5.8 3.4 9.5 10h9 28 12.5 3.5 5.5 4.5 43.4 27 54 180 37.4 24 48 90 CRJB 1 16.5 M5 x 0.8 6 35 14 23.5 22 M5 x 0.8 6g6 4.5 15.5

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

S A 3H9 effective depth 2 3H9 effective depth 2 TD TB TC D (g6) DD (h9) Rotation A AU B BA BB BC BD BU H Size 42 (8.5) 29 8.5 17 53 (9.5) 31 9 26.4 6.7 10.6 2.2 16.7 23.1 18 20 12 14 5 6 10 15 90, 180 90, 180 W Q S US UW ab M TC TD TA Size Rotation 4.5 17 56 69 65 82 90 180 90 180 10 35 44 6 9 8 15.4 15.5 15 5.5 20 40 50 7 10 9 17.6 16 Dimension AU does not indicate the dimension when shipped

Compact Cylinder / Guide Rod Type

Lateral load resistance: 3 to 4 times that of standard Series CQ Non-rotating accuracy: 0.2 o or less + 0.1 + Series MGP Series MG 0.2 CQM Non-rotating accuracy + 0.5 + 1 Non-rotating Series CQ2K Non-rotating Series CQ2K Lateral load resistant Series CQ2 Lateral load resistant Series CQ2 2 3 1 4 6 8 Lateral load resistance Variations Variations Standard stroke Cushion (mm) 5 10 15 20 25 30 35

Smooth Cylinder Series CQSY

With auto switch 10 to 60C (with no freezing) Rubber bumper Female thread JIS class 2 +1.0 0 Through-hole/Both ends tapped 5 to 500 mm/s 0.5 l/min (ANR) or less Minimum Operating Pressure JIS symbol Unit: MPa Bore size (mm) Minimum operating pressure 12 16 20 25 0.03 0.02 Standard Stroke Table Bore size (mm) 12, 16 20, 25 Standard stroke (mm) 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35

Rotary Table Series MSU

S Single vane Applicable auto switches/Refer to pages 26 through 35 for detailed auto switch specifications. Lead wire length (m) Order example: MSUA20 single vane type (connection port side position selected) 1. Standard type (without auto switches), rotation 90, side port position MSUA20-90S 2. With switch unit (without auto switches), rotation 180, side port position MDSUA20-180S 3.