Lightweight and Compact

Environmental friendly as refrigerant R410A Convenient functions Self diagnosis function and check display Page 70 Page 71 Timer operation function/Unit conversion function/Power failure auto-restart function/Anti-freezing operation function 41 types of alarm codes Communication function Page 71 Easy maintenance Page 69 Equipped with serial communication (RS232C/RS485) and contact I/Os (2

33

HED Polypropylene skid HEA Model Weight [kg] Dimensions [mm] HRSE012-A-10 35 Height 745 x Width 465 x Depth 575 HRSE018-A-10 HRSE012-A-10-T 42 Height 745 x Width 465 x Depth 620 HRSE018-A-10-T HRSE012-A-20 38 Height 745 x Width 465 x Depth 575 HRSE018-A-20 HRSE024-A-20 HRSE012-A-20-T 45 Height 745 x Width 465 x Depth 620 HRSE018-A-20-T HRSE024-A-20-T HRSE012-A-23 41 Height 790 x Width 470

Refrigerated Air Dryer

Evaporation thermometer Capillary tube 93 C IDFAE Series Dimensions IDFA3E to 15E1 A B A D E Q C F G C M N L P K 4 x 13 In case of IDFA3E IDFA4E to 15E1 Dimensions (mm) B C D E F G K L M N P Q A Model Port size IDFA3E IDFA4E IDFA6E IDFA8E IDFA11E IDFA15E1 15 Rc 3/8 226 410 473 67 125 304 33 36 154 21 330 13 Rc 1/2 453 498 283 275 455 270 31 42 80 240 80 15 15 Rc 3/4 485 568 355 300 300 314 41

Environment

LEY -X5 LEFB/Belt Drive 11LEFS Horizontal 11LEJS 14 LEFB32 25A12 LEC 10 Work load: W [kg] LEC S 8 LEC SS-T LEFB25 6 LEC Y 4 Motorless LEFB16 2 0 LAT 0 500 1000 1500 2000 Speed: V [mm/s] LZ LC3F2 41 LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication SpeedWork Load Graph (Guide) Servo Motor (24 VDC) The following graph shows the values when moving force is 250%

0.021250/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l4236Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%864 (Horizontal)/12 (Vertical)960.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type17.5 (78)524 VDC ?10%

adjustment rangeOutlet air set pressure rangeOutlet air set temperatureOutlet air pressure dew pointOutlet air temperature stabilityOutlet air temperature display accuracyPower supply Note 4)Operating currentEarth leakage breaker capacityCompressor inputHeater inputNominal filtration ratingCleanliness of the filter outlet sideIDH4-20Compressed air3.5 to 17.6 scfm (100 to 500 L/min [ANR])41

adjustment rangeOutlet air set pressure rangeOutlet air set temperatureOutlet air pressure dew pointOutlet air temperature stabilityOutlet air temperature display accuracyPower supply Note 4)Operating currentEarth leakage breaker capacityCompressor inputHeater inputNominal filtration ratingCleanliness of the filter outlet sideIDHA6-23Compressed air7.1 to 28.3 scfm (200 to 800 L/min [ANR])41

0.02 35 or less1250/20Ball screw + Belt (Motor parallel)Sliding bearing (LEYGlM), Ball bushing bearing (LEYGlL)41 to 104F (5 to 40C)90 RH or less (No condenstation)l4236Servo motor (24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%864 (Horizontal)/12 (Vertical)960.33 (0.15) (Screw mounting), 0.37 (0.17) (DIN rail mounting)Non-magnetizing operation type17.5524 VDC ?10%

0.021250/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l4236Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%864 (Horizontal)/12 (Vertical)960.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type17.5 (78)524 VDC ?10%

Fluid: air , Operating pressure range (MPa): 0.15 to 0.7 , Ambient and fluid temperature: -10 to 50° C (no freezing) , Maximum operating frequency: 10Hz, SYJ3000 valve, 4/5 PORT SOLENOID VALVE, 41 lb

Fluid: air , Operating pressure range (MPa): 0.15 to 0.7 , Ambient and fluid temperature: -10 to 50° C (no freezing) , Maximum operating frequency: 10Hz, SYJ3000 valve, 4/5 PORT SOLENOID VALVE, 41 lb

Fluid: air , Operating pressure range (MPa): 0.15 to 0.7 , Ambient and fluid temperature: -10 to 50° C (no freezing) , Maximum operating frequency: 10Hz, SYJ3000 valve, 4/5 PORT SOLENOID VALVE, 41 lb

Fluid: air , Operating pressure range (MPa): 0.15 to 0.7 , Ambient and fluid temperature: -10 to 50° C (no freezing) , Maximum operating frequency: 10Hz, SYJ3000 valve, 4/5 PORT SOLENOID VALVE, 41 lb