Series VCS

For subsonic range Where P1 + 0.1013 = (1 to 2) (P2 + 0.1013) Formula based on Cv factor Q = 197.8Cv P (P2 + 0.1013) kg/h Formula based on effective area Q = 11.0S P (P2 + 0.1013) kg/h [650] (133) 0.2 [646] (120) 0.1 S = 2.8mm S = 5.9mm S = 9.2mm S = 11.7mm S = 6.3mm S = 9.7mm S = 14.4mm S = 10.8mm S = 15.3mm S = 24.8mm Flow rate Q kg/h VCS212 VCS213 VCS214 VCS215 VCS 13 VCS314 VCS315

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Box type (Built-in silencer) B S 07 ZH 06 06 Body ported type (Without silencer) D S 07 ZH 01 01 01 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com EXH. port size Note) Nozzle diameter Symbol Size Style One-touch One-touch One-touch One-touch One-touch Screw-in Screw-in

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X Olhr specificalions are lhe same as lor $andard lype. r.rc"rel raiGtin=sl IFFFEI--IF]@]xes There is no stick-slip phenomenon at a low-speed drive of 10-50mm/s, (0.2 2 in/s), and all strokes drive at a constant speed smoothly.

FSQ seies

piLl lanp lighls wh6n hlo swilches a turned ON Eran0e P$s!

39

CKZT Clamp Arm 40 Mounting hole Bore size 40 80 Equivalent Power clamp cylinder European type D1 H D2 D1 D2 H symbol S B 6 7 16 6 9 25 8 20 8 10.2 10.2 25 Bore size Only S type is available for A015 of 40. 40 80 40 Arm mounting position 80 Equivalent Right D1 D2 Offset H R A015 A045 Offset 15 Offset 45 Center D1 D2 C H Left D1 D2 L H Cylinder Specifications 80 Equivalent 40 Bore size Angle

Compact and Lightweight

The standard bracket and silencer are not assembled with the product, but shipped together. 20 54.5 228 Body Ported Type Vacuum Ejector ZH Series Body Ported: ZH05D A--to ZH20D A--S L S L One-touch and screw-in connection ZK2 SUP. EXH. ZQ L4 ZR ZB H2 Connection thread 2 ZA VAC.

HRX-OM-Y098

Configuration One thermo-chiller for one controller. 2 2 R D R D 3 3 S D S D 5 5 S G S G Controller Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

HRX-OM-X037

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-14 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

11-cqp2-e

Grease pack part no.: GR-S-010 (10 g) CQ2B16-S-PS CQ2B20-S-PS CQ2B25-S-PS Set of left nos. !4. CQ2B32-S-PS CQ2B40-S-PS CQ2B50-S-PS Seal kit includes !4. Order the seal kit, based on each bore size. Since the seal kit does not include a grease pack, order it separately. Grease pack part no.: GR-S-010 (10 g) 79

MHZ2/MHZJ2

Single acting (normally open) Single acting (normally closed) Without auto switch (built-in magnet) Nil D S C Select an applicable auto switch model from the table below.

Regulator with Integral Pressure Gauge

Surface of panel Surface of panel OUT SMC MPa MPa MPa MPa MPa MPa K K K K K K P P P P P P C C C C C C U U U U U U O O O O O O S S S S S S L L L L L L H H H H H H to to to to to to IN 58 Bottom of panel Bottom of panel 45 1 I N 1 I N 1 I N C S M C S M C S M 1 I N 1 I N 1 I N 2 OUT 2 OUT 2 OUT C S M C S M C S M 2 OUT 2 OUT 2 OUT In case of ARG30, dimension in height can be reduced by approx

Cylinder with Lock Series MNB

B2 H S + Stroke ??

AC Servo Motor Driver (Pulse input type)

(Note) The value will be -1500 to 1500 kpulse/s when kpulse/ -9 s 9 inputting command pulse.