Rotary Clamp Cylinder: Standard ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 MK Series

-X 389 MK Series Specifications 12 16 20 25 32 40 50 63 Bore size (mm) Double acting 90 10 Clockwise, Counterclockwise Action Rotary angle Note 1) Rotary direction Note 2) Rotary stroke (mm) Clamp stroke (mm) Theoretical clamp force (N) Note 3) 7.5 9.5 15 19 10, 20, 30 10, 20, 30, 50 40 75 100 185 300 525 825 1400 Air 1.5 MPa Fluid Proof pressure Note 4) 0.1 to 0.6 MPa Operating pressure

Clean Room Regulator/Fluoro Resin Type Series SRF30

100 50 0 1 0 5 10 15 20 25 30 0 5 10 15 20 25 30 Time of water flow (min) Measuring time Test method and conditions The liquid contact portions were filled with sulphuric acid and left untouched for half an hour.

ITVH

100 0 25 50 75 100 Input signal [% F.S.]

Magnetic Separator FHM Series

0 1 5 10 50 100 100 90 80 100 90 80 70 60 50 40 30 20 10 0 100 200 300 400 500 100 200 300 400 500 100 200 300 400 500 Elimination ratio (%) Elimination ratio (%) Elimination ratio (%) 75 70 60 50 40 30 20 10 0 1 5 10 50 30 100 1 5 10 50 100 Flow-back count Flow-back count Flow-back count Explanation of graph Explanation of graph Example: Elimination ratio and concentration after using the

XLA Series

Vale specifications Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for

XLA- ∗ -F7NJ ∗ - ∗ Series

Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding

XLG Series

1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Flange type KF(NW) KF(NW),K(DN) Main material Body : Aluminum alloy, critical part : SUS304, FKM (standard seal material) Note 2 Surface treatment for body Outside: hard anodized Inside

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Range Back Pressure SMC 10 1.9 -750mmHg~72.5psi 0~100C 0~45psi (60psi) 79 109 45.5 Height Width Operator Dia. 1/2 LVQ40 Brand X 12.7 3.0 -737mmHg~71psi 2~65C 0~40psi 107.2 133.9 73.2 SMC 16 5.0 -750mmHg~72.5psi 0~100C 0~45psi (60psi) 126.5 141 75 Manufacturer Orifice Size Cv Factor Operating Press. Range Operating Temp. Range Back Pressure Height Width Operator Dia.

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

Port size Body style Port size One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 10 One-touch fitting for 12 VQ20 VQ30 Symbol C6 C8 C10 C12 A: Single unit Manual override None M: For manifold B(1) Locking style (Slotted) Note 1) Only normally closed DIN connector in-line style is possible.

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Optional accessory Blank plate ass'y: DXT199-22-1A EXH Relocation Spacerl DXT199-29-2TA SUP Relocation Spacar: (only for type 41, 42, 43): DXTl99-35-1TA 20 stations NVVsZs41-168'1.OlT --TStations a lf there are mof6 than 10 stations, supply 6ir and exhaust frctn both sid6s of manitold. NVV5Z5-4 2-( 05 ) 1 -r87T) Y -r.Stationsa asize ot A, B port E-?

CJ2Y Series ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) 10 15, 30, 45, 60, 75, 100, 125, 150 400 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 400 Symbol Specications -XAl Change of rod end shape -XC3 Special port location -XC9 Adjustable stroke cylinder/Adjustable retraction type Note 1) Manufacture of intermediate strokes at 1 mm intervals is possible.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

Optional accessory Blank plate ass'y: DXT199-22-1A EXH Relocation Spacerl DXT199-29-2TA SUP Relocation Spacar: (only for type 41, 42, 43): DXTl99-35-1TA 20 stations NVVsZs41-168'1.OlT --TStations a lf there are mof6 than 10 stations, supply 6ir and exhaust frctn both sid6s of manitold. NVV5Z5-4 2-( 05 ) 1 -r87T) Y -r.Stationsa asize ot A, B port E-?

Electro-Pneumatic Positioner Series IP8000/8100

IP8000 IP8100 Type Item Lever type lever feedback Rotary type cam feedback Single action Double action Single action Double action Input current Input resistance Supply air pressure Standard stroke Sensitivity Linearity Hysteresis Repeatability Coefficient of temperature 4 to 20mADC Note 1) 23515 (4 to 20mADC) 0.14 to 0.7MPa 10 to 85mm (Deflection angle 10 to 30) 60 to 100 Note 2) Within

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

10 stations) 16 16 stations Both sides (2 to 16 stations) Pilot specifications Note 1) Double wiring specifications: Single, double, 3 position and 4 position solenoid valves can be used at all of the manifold stations.

XL-OMY0003

SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5 10 XL-OMY0003 6-2 1 2 b 3 1 2 O 4 a aa b O O

Dual Rod Cylinder/Compact Type ø 6, ø 10, ø 15, ø 20, ø 25, ø 32 Series CXSJ

Bore size / Stroke (mm) Standard stroke Bore size 6 10 15 20 25 32 Made to Order (For details, refer to pages 1851 to 1954.) 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 Symbol Specifications XB6 XB13 XC6 Note) Heat resistant cylinder (10 to 150C) Low speed cylinder (5 to 50 mm/s) 10, 20, 30, 40, 50, 75, 100 Made of stainless steel XC19 Intermediate stroke (spacer) Fluoro rubber seals XC22 Note

AFF

(Element life check) Max. contact capacity: 10 VA AC, 10 W DC Rated contact voltage (max. operating current): 125 V AC (0.08 A), 30 V DC (0.33 A) Max. contact capacity: 10 W DC Rated contact voltage (max. operating current): 30 V DC (0.33 A) Pressure drop 0.1 MPa Symbol V: Degreasing wash, white vaseline Reed switch Reed switch Body/housing is degreasing washed.

VNH

VXA VN LVC LVA LVH LVD LVQ LQ LVN TI/ TIL PA PAX PB 17-4-35 6 Series VNH Construction 12 8 12(P1): External pilot port 10(P2) : Pilot EXH port Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10 3 3 7 7 4 8 11 4 5 11 10 1(P) Port 2(A) Port P Port A Port Valve element

Step Motor (Servo/24 VDC) Electric Actuator Miniature Rod Type LEPY Series LEPY6, 10

0 e Lead screw type [mm] r Stroke [mm] w Motor size q Size 6 10 Symbol Motor size Applicable size Nil Basic 6, 10 L Compact 10 Symbol Screw lead LEPY6 LEPY10 K 4 5 J 8 10 Symbol Stroke 25 25 50 50 75 75 y Actuator cable type1 t Motor cable mounting direction Nil Without cable S Standard cable R Robotic cable (Flexible cable)2 Top entry Entry on the left side Nil L 1 The standard cable should

MVGQ

Types S, Z 24 VDC: 7 to +10 %, 12 VDC: 4 to +10 % Type T 24 VDC: 8 to +10 %, 12 VDC: 6 to +10 % Note 1) Impact resistance: Made to Order Specifications (For details, refer to pages 1847.) Symbol Specifications No malfunction resulted from the impact test using a drop impact tester.