Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Pressure(MPa): -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: NPT, Auto

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 125, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Pressure(MPa): -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: NPT, Auto

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 150, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Pressure(MPa): -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: NPT, Auto

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 175, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Pressure(MPa): -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: NPT, Auto

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Pressure(MPa): -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: NPT, Auto

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 350, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Pressure(MPa): -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: NPT, Auto

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 400, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Pressure(MPa): -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: NPT, Auto

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 450, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Pressure(MPa): -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: NPT, Auto

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 500, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Pressure(MPa): -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: NPT, Auto

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 800, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Pressure(MPa): -, Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: NPT, Auto

Magnet: D (Built-in), Series: A2 (Standard), Mounting: F (Rod Flange), Tube Material: Aluminum, Bore Size: 40mm, Port Thread: TN (NPT), Stroke: 600mm, Rod Boot: None, Cushion: Air Cushion

Magnet: D (Built-in), Series: A2 (Standard), Mounting: F (Rod Flange), Tube Material: Aluminum, Bore Size: 40mm, Port Thread: TN (NPT), Stroke: 50mm, Rod Boot: None, Cushion: N (Rubber Bumper)

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

0.4 MPa setting (Ex.)10-ARP30-02BG 0.005 to 0.4 MPa Set pressure range Note1) 0.2 MPa setting (Ex.)10-ARP30-02BG-1 0.005 to 0.2 MPa 0.6 MPa setting (Ex.)10-ARP30-02BG-3 0.008 to 0.6 MPa Within 0.2% F.S.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

0.4 MPa setting (Ex.)10-ARP30-02BG 0.005 to 0.4 MPa Set pressure range Note1) 0.2 MPa setting (Ex.)10-ARP30-02BG-1 0.005 to 0.2 MPa 0.6 MPa setting (Ex.)10-ARP30-02BG-3 0.008 to 0.6 MPa Within 0.2% F.S.

HRX-OM-R028

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge temp. drop 4 High circulating fluid return temp. 5 High circulating

VCA

size (mm) 4 5 7 10 Symbol 4 5 7 10 Class 3 Class 4 Voltage 1 2 3 4 5 6 100VAC 200VAC 110VAC 220VAC 24VDC 12VDC Manual override None Slotted locking type (tool required) Nil B Consult SMC regarding other voltages.

IDUS/IDFS

(C) 50 55 60 65 70 80 15 15 15 15 15 15 10 10 10 10 10 10 5 5 5 5 5 5 1.64 1.37 1.30 1.23 1.16 1.09 1.26 1.05 1.00 0.95 0.89 0.84 0.88 0.74 0.70 0.66 0.62 0.59 30 1.56 1.30 1.24 1.17 1.11 1.04 1.20 1.00 0.95 0.90 0.85 0.80 0.84 0.70 0.67 0.63 0.60 0.56 32 1.50 1.25 1.19 1.12 1.06 1.00 1.15 0.96 0.91 0.86 0.82 0.77 0.81 0.67 0.64 0.60 0.57 0.54 35 1.40 1.17 1.11 1.05 0.99 0.94 1.08 0.90 0.86

Clean Regulator/Fluororesin Type

1.2 Weight (kg) 0.10 0.28 1.3 Particulate Generation Characteristics Flow-through Characteristics Particle concentration (particles/mL) Particle diameter: 0.1 m or larger 400 1000 350 Value of specific resistance to that of supplied DI water Resistivity (km) 300 100 250 200 150 10 100 50 0 1 0 5 10 15 20 25 30 0 5 10 15 20 25 30 Time of water flow (min) Measuring time (min) Test method

Stainless Steel Heat

(C) 50 55 60 65 70 80 15 15 15 15 15 15 10 10 10 10 10 10 5 5 5 5 5 5 1.64 1.37 1.30 1.23 1.16 1.09 1.26 1.05 1.00 0.95 0.89 0.84 0.88 0.74 0.70 0.66 0.62 0.59 30 1.56 1.30 1.24 1.17 1.11 1.04 1.20 1.00 0.95 0.90 0.85 0.80 0.84 0.70 0.67 0.63 0.60 0.56 32 1.50 1.25 1.19 1.12 1.06 1.00 1.15 0.96 0.91 0.86 0.82 0.77 0.81 0.67 0.64 0.60 0.57 0.54 35 1.40 1.17 1.11 1.05 0.99 0.94 1.08 0.90 0.86

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

Data A Correction factor for temperature (Series IDUS) Inlet air temp. ( C) Outlet air press. dew point ( C) Ambient temp. ( C) 50 55 60 65 70 80 15 15 15 15 15 15 10 10 10 10 10 10 5 5 5 5 5 5 1.64 1.37 1.30 1.23 1.16 1.09 1.26 1.05 1.00 0.95 0.89 0.84 0.88 0.74 0.70 0.66 0.62 0.59 30 1.56 1.30 1.24 1.17 1.11 1.04 1.20 1.00 0.95 0.90 0.85 0.80 0.84 0.70 0.67 0.63 0.60 0.56 32 1.50 1.25 1.19