ZMA

10 8 5 4 ZZMA Stations 04 ZQ 10 10 8 6 ZZMA Stations 04B Effective area of external silencer is 160 mm2.

A

M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000/3000/4000/5000 Modular F.R.L.

Soft Start-up Valve AV2000/3000/4000/5000

M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000/3000/4000/5000 Modular F.R.L.

Miniature Regulator Series ARJ310

One-touch fitting ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 Note) M5 x 0.8 female thread is cut inside the pipe.

PA3000/5000/PAX1000

10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

IR1000/2000/3000

-X465 0.1 to 1 Set pressure range (MPa) Desolution of setting and display (MPa) Power supply voltage Specifications AU 0.001 Class 10 With M5 fitting (Applicable tubing O.D. 6) Pressure switch Cleanliness Breather port 12 to 24 VDC 10%, Ripple (p-p) 10% or less (With reverse connection protection) 45 mA or less (but 70 mA or less at current output) AF IR1000/2000: With M5 fitting (Applicable

Dedicated Controller Series LC1 Uniaxial Type

Mounting bracket Ass'y Mounting screws Controller model M3 x 0.5 LC1-1-N3 LC1-1B-N3 M5 x 0.8 LC1-1-N5 LC1-1B-N5 M3 LC1-1-L3 LC1-1B-L3 M5 LC1-1-L5 LC1-1B-L5 Note) This controller comes with either the T-nuts or T-brackets as accessories.

Booster Regulator Series VBA1110 to 4200 1

G46-10-01 2 pcs. G27-10-R1-X209 2 pcs. G27-10-R1-X209 2 pcs. G46-10-01 2 pcs.

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

6, 10, 15, 20, 25, 32, 40 50, 63 Magnetically Coupled Rodless Cylinder Series 12-CY3B How to Order Clean series 12 Special treatment on sliding part Bore size (mm) 300 15 12 CY3B Cylinder stroke (mm) Type Bore size Port thread type Symbol 6 10, 15 M3 x 0.5 M5 x 0.8 Rc NPT G Nil 20, 25, 32, 40 50, 63 TN TF Model Maximum manufacturable stroke Cushion Bore size (mm) Standard stroke (mm) Port

Quick Exhaust Valve Series AQ

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 15-12-1 2 Series AQ Construction AQ1500/1510 AQ2000/3000/5000 Component Parts Material/Model No.

MANIFOLD, CLEAN ROOM, 3 PORT SOLENOID VALVE, VVD, 81.00000 lb

ZSP1

10 2-3.3 Mounting hole 16-7-4

PSxx-OML0002CN

DC1224 V10 DC12 24 V10 9 DC(+) DC(-) / / 10 ( ) 11 / 5 m / 12 1015 10 "-M" (kPaMPa) ( ) "-M" 13 SI kPa,MPa -53No.PS-OML0002CN-G No. 14 15 16 FUNC 17 4 m 4 m FUNC 18 10 10 () 19 () ( ) () / -54No.PS-OML0002CN-G 80 mA 7 F.S.(3.5F.S.)1 1 F.S. -55No.PS-OML0002CN-G ZSE30A() ZSE30AF() ISE30A() 0.0-101.0 kPa -100.0100.0 kPa -0.1001.000 MPa 10.0-105.0 kPa -105.0105.0 kPa -0.1051.050

Process Pump Series PA3000/5000/PAX1000 Series PB1000

10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min 1m = 3.28ft 1l/min = 0.035SCFM Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

1

thread depth M 15 15 Spacer Grommet: GS Flat terminal: F Conduit: C 280 G F F G 11 300 G F Terminal part Flat terminal connector 11 23 9 H C 15 6.5 H C H C G1/2 Terminal: T DIN terminal: D F G Applicable cable O.D.: 6 to 12 F G Width across flats 22 G1/2 32 (44) H 31.5 25 C H C G1/2 J J Dimensions [mm] Model A B Bs C D E F L M P [inch] Grommet: G Grommet: GS Conduit: C Flat terminal: F DIN

ITV0000

Tightening of M3, M5, and M6 connection threads 1) M3 After tightening by hand, tighten an additional 1/4 rotation with the correct tool. 2) M5 and M6 After tightening by hand, tighten an additional 1/6 rotation with the correct tool. Overtightening can cause damage to the threads and/or air leakage due to deformation of the gasket.

VEX-OMY0001

No.VEX-OMY0001 1) 2) 3) 1.351.45Nm P8,9 02 03 04 02 03 04 04 06 10 10 12 01 02 01 02 14 20 VEX312VEX322VEX332VEX342VEX350VEX370VEX390( ) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A ( ) VEX1-18-2A VEX3-32-2A P2 AN120-M5 AN103-01 AN210-02 1) VEX1-9-1P VEX4-2A-P VEX1-11-2 VEX4-4 DXT152-14-1A NXT013-3 VO307K-1 2) 3) VEX322 VEX342 Rc A 1/8 1/4 F G VVEX2 VVEX4 B 1/4 3/8 N NPT ( ) VEX1-17

Safety Instructions

Connecting Female Thread: G Approx. spanner tightening angle after tightened by hand deg Standard torque (Nm) Nominal size of uni thread 1 8 1 4 3 8 1 2 30 to 45 15 to 30 15 to 30 15 to 30 3 to 4 4 to 5 8 to 9 14 to 15 2. Gasket can be recycled 6 to 10 times. It can be replaced easily when it has sustained damage.

Ozone Resistant

40 30 20 10 0 Initial value Measuring point 6 4.