High Vacuum L Type Valve

Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No. Bellows assembly (7) XL1A63-2-101 XL1A80-2-101 Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Note 1) Bellows assembly contains the valve seal 1. It does not contain the valve seal 2.

AME

/4, 1 1, 1 1/2 1 1/2, 2 36 9 205 19 100 106 3 106 10 AME450 Related poroducts 212 22 107 106 3 106 10 36 221 21 10 14 9 90 55 110 50 88 3.2 44 66 96 257 314 406 30 40 30 10 15 15 16 20 24 9 11 13 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 4.5 4.5 6 239 291 403 22 32 42 128 167 235 122 160 220 3 122 160 220 10 10 10 AME550 AME650 AME850 AME450SAME, #4 AME550SAME, #5 AME650SAME

AMF

3.2 Related poroducts 36 9 205 19 100 106 3 106 10 1 2 3 4 , AMF450 1 212 22 107 106 3 106 10 36 221 21 10 14 9 90 55 110 50 88 3.2 , , , 1 1 3 4 44 66 96 257 314 406 30 40 30 10 15 15 16 20 24 9 11 13 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 4.5 4.5 6 239 291 403 22 32 42 128 167 235 122 160 220 3 122 160 220 10 10 10 AMF550 AMF650 AMF850 1 2 1 2 1 2 1 AMF450SAME, #4 AMF550SAME

IR1000/2000/3000

P36201021 7 NBR Damper P36202026 P36202026 2.5 x 1 8 NBR O-ring 2 x 1.25 2 x 1.25 9 NBR O-ring 4.5 x 1 4.5 x 1 4.5 x 1 4.5 x 1 10 x 1.3 10 NBR O-ring 27.8 x 1.5 JISB2401 P11 JISB2401 P11 27.8 x 1.5 11 NBR O-ring JISB2401 P5 Note 2) JISB2401 P5 Note 2) 12 NBR O-ring JISB2401 P16 Note 2) JISB2401 P16 Note 2) 13 NBR Seal (A) P36203015 P36203015 14 NBR Seal (B) P36203016 P36203016

PSxx-OMU0008CN

DC1224 V10% DC1224 V 10 DC(+) DC(-) 8 DC1224 V10% DC1224 V 10% DC(+) DC(-) 9 ( ) 10 11 -73No.PS-OMU0008CN-D No. / 5m / 12 1015 10 SI (kPaMPa) ( ) 13 SI kPa,MPa 14 15 16 FUNC 17 -74No.PS-OMU0008CN-D No. 4 m 4 m FUNC (Er13) 18 10 10 () 19 () / ( ) () -75No.PS-OMU0008CN-D 80 mA 7 F.S.(3.5F.S.) 1 1F.S. 1 -76No.PS-OMU0008CN-D ZSE20C ZSE20CF ISE20C ISE20CH () () () () SUS630SUS304

VCS

3 PA 0.54 13 0.8 4 1/4 (8A) 3/8 (10A) 1/2 (15A) 1/4: 0.42 3/8: 0.40 1/2: 0.49 VCS3 3 0.80 19 0.5 5 1.0 PAX 1.4 33 0.2 7 2.1 50 0.1 10 PB 0.35 8.4 1.0 3 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) 1/4: 0.58 3/8: 0.55 1/2: 0.62 3/4: 0.78 0.60 14 1.0 4 0.85 20 0.7 5 VCS4 1.0 4 1.4 33 0.3 7 2.1 50 0.12 10 Note 1) Refer to page 17-2-42 in model selection regarding port size and orifice size combinations

Step Motor Controller With Step data Teaching Function (Servo / 24VDC)

Electric actuators / Common precautions 19 9.1 Design and selection 19 9.2 Mounting 20 9.3 Precautions for Use 20 9.4 Operating environment 21 9.5 Maintenance 22 9.6 Precautions for electric actuator with lock 23 10.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

SYJ300-OMU0003

SYJ700 1 1 SYJ700-9-1(-Q) 1/8 7 2 SYJ700-9-2(-Q) 1/4 3 8 V111(T)4 Assy SYJ5000-13-3A 5 Assy 6 SUS CE -Q 3 SYJ700 SYJ7000 SYJ700 SYJ7000 SYJ7000 3 A B Assy SYJ700-3-1A(-Q) SYJ700-3-2A(-Q) SYJ700 SYJ700 M3 : 0.8N.m O 21 No.SYJ300-OMU0003 Assy SYJ72(R)(-Q)) (SYJ74(R)(-Q)) SYJ700-10-1A M3 : 0.8N.m :SYJ700-10-2A , (SYJ700-5-3) SYJ700-10-1AAss'y CE SYJ700-10-2A-1-Q SYJ700

NARM Series

Option: Pressure gauge G15-10-01 How to Order NARM2000-4A2-N01G G15 P10 01 Symbol Units Nil MPa P PSI Common IN Individual IN IN M5 x 0.8 .39 (10) Max. pressure indication 10 150PSI (1.0MPa) .59 (15) IN OUT OUT *Pressure gauge for 30psig (0.2MPa) is not available.

125

0.28 0.6 0.7 VEX342-04 1/2 13 0.20 13 0.24 12 0.29 14 0.20 0.6 0.7 Base This is not a manual override.

Precision Regulator

Description IR1000 IR1010 IR1020 IR2000 IR2010 IR2020/2120 IR3000 IR3010 IR3020/3120 P362030-201 Bracket P36201023 P36202028 Pressure gauge234 G33-2-01 G33-10-01 G43-2-01 G43-10-01 G43-2-01 G43-4-01 G43-10-01 G33-4-01 G43-4-01 1 A bracket and two mounting screws (M5 x 35) To mount the bracket, remove two body screws (M5 x 30) on the name plate on the opposite side and replace the attached

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Operating: 0 to 50C, Stored: 10 to 60C (with no freezing and condensation) Resistance Operating or Stored: 35 to 85%RH (with no condensation) 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs., whichever is smaller.

Ｍ agnet Gripper Unit for Collaborative Robots

Dimensions .10 3-5. Connector and pin layout . 11 3-6. Center of gravity .12 4.Product Specifications .13 4-1.Magnet Gripper .13 4-2. 3-port solenoid valve .14 4-3. Auto switch .15 5.Operating method or operation .16 5-1Precautions for Design .16 5-2. Installation .17 5-3. Air supply .22 5-4. Piping .22 5-5. Operating environment .23 5-6. Lubrication .23 6.

Magnet Gripper Unit for Collaborative Robots

Dimensions .10 3-5. Connector and pin layout . 11 3-6. Center of gravity .12 4.Product Specifications .13 4-1. Magnet gripper .13 4-2. 3-port solenoid valve .14 4-3. Auto switch .15 5.Operating method or operation .16 5-1Precautions for Design .16 5-2. Installation .17 5-3.TMComponent .20 5-4. Air supply .24 5-5. Piping .24 5-6. Operating environment .25 5-7. Lubrication .25 6.

VVXA21/22

10 stations Symbol VVXA31 VVXA32 VXA31 5-00 Applicable valve TI/ TIL Port size (Individual port) 1 2 Rc Rc VXA32 5-00 1 8 1 4 PA All common ports are Rc 1/4.

3 Port Air Operated Valve Series SYJA300 1

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R P 27 30 (2) 7 12.7 VR A 9.2 VH 2 15 (Bracket) 10 VHS 11 Base mounted: SYJA34-M5 14 5 10 Manual override (Non-locking) 2-3.2 (External pilot port) (For mounting) 17 3 (For solenoid valve) 2.5 M3 x 0.5 (Pilot port) A 11 17.5 1.5 21 27 30 28.5 P R 1 (Breathing hole) 13 5 8.6 10 (P , A,

ZK2-C

DC24 V10% DC24 V10% DC(+) DC(-) 8 / / 9 () 10 / 5 m / 11 10 1015 "-M" ( ) (kPaMPa) "-M" 12 SI kPa,MPa -49NO.ZK2-OM00801-B No. 13 14 A () 15 () / ( ) () -50NO.ZK2-OM00801-B 80mA 3.5 F.S. 1 1 F.S. -51NO.ZK2-OM00801-B 100.0-100.0 kPa 105.0-105.0 kPa 500 kPa 0.1 kPa DC24 V 10(p-p)10() 40 mA NPN PNP OUT1OUT2 80 mA DC26.4 V 2 V (80 mA ) 2.5 ms (20,100,500,1000,2000 ms ) 0.2F.S

Magnet Gripper Unit for Collaborative Robots

Dimensions .10 3-5. Connector and pin layout . 11 3-6. Centor of gravity .12 4. Product Specifications .13 4-1. Magnet gripper .13 4-2. 3-port solenoid valve .14 4-3. Auto switch .15 5.Operating method or operation .16 5-1Precautions for Design .16 5-2. Installation .17 5-3. CRX Plug-in software .20 5-4. Air supply .27 5-5. Piping .27 5-6. Operating environment .28 5-7.

Ｍ agnet Gripper Unit for Collaborative Robots

Dimensions .10 3-5. Connector and pin layout . 11 3-6. Center of gravity . 11 4.Product Specifications .13 4-1. Magnet gripper .13 4-2. 3-port solenoid valve .14 4-3. Auto switch .15 5.Operating method or operation .16 5-1Precautions for Design .16 5-2. Installation .17 5-3. U R C a p .20 5-4. Air supply .26 5-5. Piping .26 5-6. Operating environment .27 5-7. Lubrication .27 6.