3.2 D-M9N, P (3-wire) D-M9P DC (+) Brown [Red] Most sensitive position 6 22 3.2 D-M9B (2-wire) OUT Black [White] DC (-) Blue [Black] Most sensitive position 6 22 D-M9B OUT (+) Brown [Red] OUT (-) Blue [Black] 15 Solid State Switches: Direct Mount Type D-F9NV, D-F9PV, D-F9BV Refer to www.smcworld.com for details of products compatible with overseas standards.
1 0.2 35 25 22 Home position switch Cable length 200 Connector 1.5 [5.5] 25 (4) Refer to page 100 for connection cables.
16 24 43 45 39 80 62 80 M 14 8 18.5 A 14 42 17 L 54.3 47.3 49.3 60.5 54.5 17 24 10 21 22 19 22 34 12 22 Connection thread Reference dimension after screwing into R threads.
AC50, AC55 AC60, AC50B AC55B, AC60B Y610-04 1/2 Y610-03 3/8 22 81 57 53 30 Notes) in model numbers indicates a thread type. No indication is necessary for Rc; however, indicate N for NPT, and F for G. Separate interfaces are required for modular unit.
Description Contents MHF2-20D2 MHF2-20D1 MHF2-20D 20, 21, 22 MHF20-PS MHF20-PS MHF20-PS Seal kit 3, 4, 5, 6, 14, 16,19 Mounting screw MHF-A2002-2 MHF-A2002-1 MHF-A2002 Finger assembly 8 Series MHF2 Dimensions MHF2-8D Scale: 80% 2.5H9 +0.025 0 depth 2.5 16 2.5H9 +0.025 0 depth 2.5 2-M3 x 0.5 thread depth 7 Mounting thread 3 28.3 3.4 36 32 2-M3 x 0.5 thread depth 4 15.8 22 Mounting thread E
Dimension table Unit: mm Model A B D2 E D1 -0.016 -0.043 12f8 15 7 11 52.8 MHZ2-10 -0.016 -0.043 16f8 20 10 15 58.7 MHZ2-16 -0.020 -0.053 20f8 22 12 19 70.5 MHZ2-20 -0.020 -0.053 25f8 25 15 24 82.9 MHZ2-25 Other dimensions and specifications correspond to the standard type.
or less 0.2 600 0.27 0.17 1.1 0.21 0.23 0.90 1 8 VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Exhaust center 3 position VZS2450 22 or less 600 0.2 0.31 0.13 1.3 0.25 0.12 1.1 1 8 VZS Pressure center VZS2550 600 22 or less 0.2 0.33 0.19 1.4 0.26 0.12 1.2 1
0.2 4-M5 x 0.8 Effective length 8 6.5H7 +0.015 0 13h7 0 0.018 30 0.2 30 0.2 40 38 31 32 57.5 109 + Stroke 21 130 + Stroke 22 0.2 4-M5 x 0.8, effective length 8 28 0.2 22 Rod end male threads 0 0.018 13h7 Width across flats 11 M8 x 1.25 M8 x 1.25 12.8 15 13 5 12 14.5 6 41.5 Stud bolt part number: MT-S25 Rod end nut part number: NT-02 12 Width across flats 14 With end lock 3 124.5 + Stroke
G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv factor 0.8
(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5
64 5.6 M4 x 0.7 7 Rc 1/8 38 95 7 107 11 62 5 REAR25 20 21.5 40 28 72 5.6 M5 x 0.8 6.5 Rc 1/8 43 105 7 117 15 70 6 REAR32 26 24 50 35 79 7 M6 x 1 8.5 Rc 1/8 54 116 7 130 13 76 7 REAR40 34 26 60 40 93 7 M6 x 1 11 Rc 1/4 64 134 7 148 15 90 8 10-2-22 22 Sine Rodless Cylinder Basic Type Series REAR Proper Auto Switch Mounting Position (Detection at stroke end) A B RE A B REC C D CX 10 to 20 CY
(mm) Electrical entry P Port size A B C D E F H K L M N Model Grommet: G Conduit: C DIN terminal: D Conduit terminal: T Q R Q R Q R S Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 45 44 43 58 40.5 46.5 99 43 66 83 1/8 VCW21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 46 44 44 58 41.5 46.5 99 44 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 56.5 46 54.5 60 52 48.5 101 54.5 68 99 1/4
Series VXD21/22/23 Construction/Principal Parts Material Normally Closed (N.C.) Normally Open (N.O.)
Series VXR21/22/23 Construction/Principal Parts Material Normally Closed (N.C.) Normally Open (N.O.)
Fittings & Tubing Air Cylinders Rotary Actuators How to Order 11 Vacuum suction type Clean series 11 M D HR 2 10 R M9B S 22 M D HR 2 10 R M9B S Number of fingers Copper, fluorine and silicone-free + Low particle generation Number of auto switches 2 2 fingers Nil S 2 pcs. 1 pc. 22 Vacuum suction type Nominal size 10 15 20 30 Auto switch Without auto switch (without magnet) Nil Connecting
90.9 119.4 123.4 152.3 31.3 40 53 55 71 25.3 33 44 46 60 53.3 30 41 50 50 70 2.3 2.3 2.8 2.8 3.2 3 3 3 4 4 12 14 19 22 22 67 79 79 108 6 Series VHS20/30/40/50 Series VHS2510/3510/4510/5510 Specific Product Precautions 1 Be sure to read before handling.
28 A B 50 5 5 22 28 A B 50 5 5 M14 x 1 M8 x 1.25 Gasket M8 x 1.25 Gasket M14 x 1 Width across flats 21 Width across flats 21 50 4 50 4 4.5 4.5 Dimensions Dimensions Part no.
Mounting female thread Vacuum entry port 6 tube 4 tube 8 tube Mounting Connection 10 to 16 One-touch fitting M5 x 0.8 19 18 Female thread 4 tube M5 x 0.8 22 23 20 to 32 M5 x 0.8 10 to 16 6 tube M8 x 1.25 21 22 6 tube M5 x 0.8 58 60 40, 50 Pad dia.
22 Guide Cylinder Series MGG Basic style: MGGB 63 to 100 4-F through, counterbore G Bottom 4-H M N Bracket (Refer to the table below.)
The switch rail accessory type is mentioned on page 8-15-19, and can be ordered together with auto switches. (2) Refer to the separate disassembly instructions for switch magnet installation procedures. 8-15-22 22 MX MTS MY CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com