Pin Clamp Cylinder Series CKQ/CLKQ

3 u q !9 y @7 @0 @6 @5 @4 Auto switch !8 @1 @2 !6 !1 @3 !7 !0 !5 !

Series SY100 3 Port Solenoid Valve Rubber Seal

Station L 2 20.5 3 31 4 41.5 5 52 6 62.5 7 73 8 83.5 9 94 10 104.5 2.1-12 Series SY100 31 Type Manifold: Top Ported/SS3Y1-31Station Grommet (G), (H) 11.5 P=10.5 (Pitch) n-M3 X 0.5 (A port) 27.5 5 Manual override SY 3 5 G: 300 H: 600 SYJ 28 (In case of DC) R R 9 (Lead wire length) 15.6 34.5 (In case of AC) 21.5 10 25 VK P P + + + + + VZ 4-M5 X 0.8 (P/R port) VT L2 3 2-3.5 (Mounting holes)

VXA21/22

8 17-3-104

HEC-OM-S008

CONTENTS 1 Preparation for Communication . 1-1 2 Specifications of Communication Method . 2-1 3 Communication Format (same as current HEC series) . 3-1 3.1 Control code used for communication . 3-1 3.2 Command code list . 3-1 3.3 Communication procedures and format . 3-2 3.4 Calculation of Check Sum . 3-4 4 Details of Communication Format . 4-1 4.1 Temperature setting (without writing FRAM

Cylinder with Lock Series CLS

(Example) CDLSL140-100 3 wire (NPN equiv.)

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

B-1 A-1 B-2 A-2 B-3 A-3 Connector C terminal no. Signal Cable color S Standard cable Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

10

The rotating eccentric angle to the stroke end must be 2 3.

RZQ

If a moment or torque directly acts on the cylinder, it will lead to reduced service life or damage to machinery. 10-10-8 9 3 Position Cylinder Series RZQ Construction u i @2 r !0 y q w !9 e @1 @4 !3 RE A B @0 REC !2 CX @3 !

High Vacuum L Type Valve

(Refer to Chapter 7, Parts Replacement Procedure (P. 14 to 18) for details.) 6 XL-OMS0001-B 3. Product Specific Precautions 3 Precautions 3 Be sure to read before handling Maintenance Parts Caution SMC specified parts should be used for maintenance service. Refer to Chapter 5, Construction and Dimensions" (P. 11) for the part indication numbers.

XL-OMY0002

1. 2. 3. 4. 2 XL-OMY0002 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0002 1 &/ 1.52 2 ( ) 5 5 P-01-11 P-06-3 4 XL-OMY0002 2.2 A6063SUS316LSUS304 5 P11 FKM 3 3[]P8 60 , 245250Hz 30m/s 5 XL-OMY0002 /H0 H4 H5 () 510% O 0.1mm0.2mm O 9 P15 3 3P7P8 5 P11 O 10 P16 P19 6 XL-OMY0002 3. 3 5 P11 25 40 50 XLD25-30-1 XLD40-30-1 XLD50-30-1 XLD25-30-1H XLD40-30-1H XLD50-30-1H 63 80 100

PF-OMN0009_C

1. 2. 3. 4

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

Stopper Seal Bumper O-ring Drive bushing 2 Series KP Dimensions Male Connector: KPH Effective area mm Model L M TPH TPS A H (width across flats) Applicable tubing O.D. mm Connection threads R Weight g Applicable tubing 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 25.4 25.4 25.9 26.4 32.3 30.3 37.5 33 34 34.5 21.5 19.5 22 20.5 28.5 24.5 32 27 28 27 3 4 4 5 6 7 10 11 12 13 KPH04-01 KPH04-02

3 Position Cylinder Series RZQ

A93V F9NV F9PV F9BV F9NWV F9PWV F9BWV A72H A73H F79 F7P J79 F79W F7PW J79W F7BA F79F A93 F9N F9P F9B F9NW F9PW F9BW F9BA Yes 100V Relay, PLC 2-wire 12V 24V Connector Diagnostic indication (2-color indicator) Grommet 3-wire (NPN) 5V,12V IC circuit Grommet 3-wire (PNP) 12V 2-wire Connector 3-wire (NPN) Diagnostic indication (2-color indicator) IC circuit 5V,12V 3-wire (PNP)

SY3000V-OMY0001

(OFF )3.7mm 3 5 3 SY3000/5000/7000 (4A)(2B) (N.C.) (N.O.)3 3 8 No.SY3000V-OMY0001 SY series 1/3 DC24V67ms ) 40ms SY ,[SY(3,5,7)0] [SY(3,5,7)3] (50 10 )(51 11 ) (52 12 ) A,B A,B <> 9 No.SY3000V-OMY0001 SY series ()DC12V 0.5V () () (1) () COM.

Transfer

0 @2 @1 #2 ^2 ^5 $5 %2 @5 ^8 $4 ^1 @4 %4 %5 ^7 $3 #0 $2 %6 @7 ^4 o %7 ^9 ^6 @9 %8 ML2BS $1 %3 ^3 !

MRQ

3 Compact hexagon nut Stainless steel Platinum silver !4 !5 !6 !7 !8 !

SY3000/5000/7000 Series Plug-in Type

They are convenient at times when a double solenoid type 3-port valve is required.

CC

The speed will be approximately 1.4 times the date given on page 10-17-3.

Clean Regulator

Description Grade A Grade B 1 Body Stainless steel 316L 2 Diaphragm PTFE Fluororubber 3 Diaphragm PTFE Fluororubber 4 Valve guide PPS 5 Bonnet PPS 860 Clean Regulator SRH Series Dimensions Rc thread type 30.5 (36.5) 40 (52) Panel thickness Max. 3 ARJ AR425 to 935 Panel mounting holes 40 (58) ARX AMR ARM Max. 83.5 (Max. 104.5) ARP IR-A 22 (27) OUT IN IR 24 (33.5) IRV Rc 1/4 VEX Gauge port

Nozzle Type Ionizer

Symbol Pitch ES 17.4 mm Symbol Stations 2 2 3 3 4 4 AC adapter AC cord 96 2144105 1820 L2 L1 Ionizer1 (Order it separately.) 17.4 9.6 28 44 Bracket1 (Order it separately.) Hexagon nut Cleaning kit IZS30-M2 Hexagon socket head cap screw Spacer (5 mm) Part no.