VGA342

Supply side wOthers M5 size hole at the left side of the adopter plate is bleed port for spool valve. Do not plug or tighten it. 3.4-10

2/3 Port Valve

B(9.5) B(12.7) B(19.1) 1B(25.4) 1 B(31.8) 1 B(38.1) 2B(50.8) VNA 111 211 311 411 511 611 711 AS 420-03 420-04 500-06 600-10 800-12 900-14 900-20 Caution Warning 1Piping When operation is suspended, surge pressure will be generated between the cylinder and VNA11A.

-fl Seies

|VFR2200-OF 3 posiiion cloed center:NVFR230O-oF 3 position exhaust center:NVFR24oGOF 3 pooition pressure center:NVFB250GOF < ):26NPTF < >:/aNPTF Series NVFRz000:Base Mounted Tlpe Non Plug-in type 2 position single/Dilnerwions Grommet:NVFR21 10-OG -o ; 3 ; 6 )o.t 10-32 No.n (M5) lfu I ES.!! 10-32l.

VS7-6

Unit 1 4 3 8 Individual SUP spacer with residual pressure release valve VAW-M (Adaptor plate, filter with manual drain cock, regulator) 02: 03: VV71-PRAir filter with manual drain Regulator Pressure switch IS3100-X230 (2-M5 X 12) Double pilot check spacer with residual pressure release valve VV71-FPGR Air release valve Pressure switch Manifold/Applications Blank plate (Air release valve)

ZP

(mm) 02 04 2 4 Nil -X19 With lock ring Without lock ring (10 or larger) 1 2 10 to 16 20 to 32 ZX 06 6 3 40, 50 ZR 08 8 Material 10 10 N S NBR Silicon rubber 13 13 ZM 16 16 Pad type U Urethane rubber 20 20 ZH F Fluoro rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 ZU GS Conductive silicon rubber (2 to 16) 40 40 D Deep 50 50 20 or large are manufactured upon receipt

21- AF-A 10- Series Air Filter

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size Option a Mounting Nil Without mounting option B Note 3) With bracket + r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C

Integral Fitting Type (Hyper Fittings) Series LVD How to Order LVC LVA LVD 1 0 03 S LVH Body class Option LVD Orifice dia. Body class Nil None Symbol 1 Valve type 1 1 ø2 With flow rate adjustment LVQ 2 2 2 ø4 With bypass 0 N.C. 3 3 With flow rate adjus

M5 x 0.8 Nil 2 Port B (OUT) different dia. size Inch sizes Symbol Nil Application Ports A & B same size 03 05 07 11 13 19 1/8 3/16 1/4 3/8 1/2 3/4 Different diameter tubings can be selected within the same body class.

Process Valve Series VNA

B (9.5) B (12.7) B (19.1) B (25.4) B (31.8) B (38.1) B (50.8) VNA 111 211 311 411 511 611 711 AS 420-03 420-04 500-06 600-10 800-12 900-14 900-20 3 8 1 2 3 4 10A 15A 20A 25A 32A 40A 50A 1 1 1 2 1 4 1 2 364 Series VNB Process Valve 2 Port Valve For Flow Control A wide variety of applicable fluids [Option] Proper selection with body and sealing materials permits application with a wide variety

ZP

(mm) 02 04 2 4 Nil -X19 With lock ring Without lock ring (10 or larger) 1 2 10 to 16 20 to 32 ZX 06 6 3 40, 50 ZR 08 8 Material 10 10 ZM N S NBR Silicon rubber 13 13 16 16 Pad type U Urethane rubber 20 20 ZH F Fluoro rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 ZU GS Conductive silicon rubber (2 to 16) 40 40 D Deep 20 or large are manufactured upon receipt of order

Size: 100 (M5 Standard), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Tube Size: 06 (ø6), Push lock: A (Push-lock)

Size: 100 (M5 Standard), Control Range: FC (50 to 150 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Tube Size: 06 (ø6), Push lock: A (Push-lock)

.: 06 (ø6), Port Size/Applicable Tube: M5 Thread (M5X0.8)

.: 06 (ø6), Port Size/Applicable Tube: M5 Thread (M5X0.8)

.: 06 (ø6), Port Size/Applicable Tube: M5 Thread (M5X0.8)

.: 06 (ø6), Port Size/Applicable Tube: M5 Thread (M5X0.8)

Model: L (Male Elbow, Union Elbow), Tube Size: 06 (Ø6), Port Size/Applicable Tube: M5 (M5X0.8)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 06 (ø6), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 1 (Flow Rate Adjustment)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 06 (ø6), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 1 (Flow Rate Adjustment), Specification: V (Vacuum)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 04 (ø4), Port B OUT: 06 (Rcø6), Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 1 (Flow Rate Adjustment)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 06 (ø6), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: None, Specification: V (Vacuum)