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E Vacuum switch ZSE2 + filter Air operated K3 Air operated F Filter C1 N.C. Manual operation C2 Air operated C3 N.O. Nil Non-locking push type C4 Double SOL.

300 mm 600 mm 1000 mm 1500 mm 2000 mm 3000 mm 10 mm (Semi-standard) 52-SY9000 Manual override Non-locking push type Push-turn locking slotted type Push-turn locking lever type Nil D E L type has 300 mm and 600 mm only. 3 C ATEX Compliant 5 Port Solenoid Valve Series 52-SY Safety Instructions Specifications 1) This product is not suitable for Zone 0.

CR ,, (EE ) 2ROM E 2ROM (100 ,E ), 2ROM E (3) : # : ASCII ,, 30H ) # 0 0 V R 23H 30H 30H 56H 52H 23H+30H+30H+56H+52H=12BH 2B ,30H 32H 3BH : # 0 0 V R 2 ; [CR] 23H 30H 30H 56H 52H 32H 3BH 0DH )ASCII ASCII 09 A B C D E F ASCII 30H39H 41H 42H 43H 44H 45H 46H 30H39H 3AH 3BH 3CH 3DH 3EH 3FH 27 - (4) 1bit () bit (ON 1) b7 b6 b5 b4 b3 b2 b1 1 0 () ON () (5) VR # 0 0 V R [CR] No. #

8.7 120 X T V 1/4 1/4 1/8 40 P 46 46 38 PP 70 50 M12 x 1.75 M10 x 1.5 M8 x 1.25 N H GA C M6 M6 M5 18.5 KA KB 100 63 30, 50, 75, 100 40 78 73 58 66.5 61.5 48.5 4 4 3.5 8 100 90 120 160 1/8 1/8 1/8 8 200 160 20 20 11.5 11.5 9.5 846 Guide Table 10-MGF Specific Product Precautions Be sure to read this before handling.

M12 x 1.75 M10 x 1.5 M8 x 1.25 M Bore size Standard stroke (mm) 170 140 10 10 38 38 36.5 E B F KC GB D A 11 11 8.7 120 X T V M6 M6 M5 18.5 KA KB 46 46 38 PP 70 50 M12 x 1.75 M10 x 1.5 M8 x 1.25 N H GA C 1/4 1/4 1/8 40 P 100 63 30, 50,75, 100 40 78 73 58 66.5 61.5 48.5 4 4 3.5 8 100 90 120 160 1/8 1/8 1/8 7.5 200 160 20 20 11.5 11.5 9.5 96 Guide table10-MGF Air cylinder Rotary actuator Air

q IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

OUT IN OUT IN e q r r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Note No.

Coil rated voltage 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 1 2 3 Electrical entry 110 to 120 VAC, 50/60 Hz T E H G Grommet (Lead wire: 300 mm) Grommet (Lead wire: 600 mm) 4 220 VAC, 50/60 Hz 5 6 24 VDC 12 VDC Grommet terminal Conduit terminal D With connector DO Without connector L With lead wire LN Without lead wire LO Without connector M With lead wire MN Without lead wire 7 240 VAC, 50/60

JIS symbol 5 Port 4 Port Fluid Specifications Air 22~100 (0.15~0.7) 15~100 (0.1~0.7) 22~100 (0.15~0.7) 2 Position single 2 Position single 2 Position single 2 Position double 3 Position 2 Position single 2 Position double 3 Position A B A B Operating pressure range PSI (MPa) P R R P R Operating pressure to 100 (Operating pressure to 0.7) 15~100 (0.1 to 0.7) 22~100 (0.15 to 0.7) Max.140 Not

If the adjusting screw of the speed controller is loosened, the operating speed will increase, so the screw should be tightened completely. m Impact force MXZ12 MXZ16 1.4 2.5 V = mm/s V = mm/s 1.2 2.0 Load weight m [kg] Load weight m [kg] 1.0 1.5 0.8 0.6 1.0 V = 50 V = 50 0.4 V = 100 V = 100 V = 200 V = 200 0.5 V = 500 V = 500 0.2 0.0 0.0 60 50 40 30 20 10 0 0 5 20 15 10 25 30 35 40 45 50

M L K J H E t W1 W2 M 14 20 25 29 37 49 58 69 89 100 117 136 14.5 20.5 24.5 30.5 36.5 48.5 6 7 7 9 9 10 11 16 21 24 32 41 10 17 22.5 24.5 27 30 16 21 26 32 41 50 17 24 28 36 43 55 8 8 8 8 13 13 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3P1A LQ3P2A LQ3P3A LQ3P4A LQ3P5A LQ3P6A 1/4 (E) (E) L Panel Aperture (K) Straight Union : LQ3U (mm) Inch Size H Model Tubing O.D.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad diameters: 10, 13, 16, 20 25, 32, 40, 50 rp ti on so ad on r sl fo a nt al e e d id w e or p ty k t s in u rf o j a ll c a e B s Series ZPT: Vertical vacuum entry type Series ZPR: Lateral vacuum entry type One-Touch fitting Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad diameters: 10, 13, 16, 20, 25, 32, 40, 50 Pad materials: NBR, Silicon rubber

40 25~850 25~700 1200 950 50 25~800 25~650 1150 900 63 25~800 25~650 1150 900 80 25~750 25~600 1100 900 100 25~750 25~600 1100 850 4-2 CEU2 NPN P PNP 15 4-3 CE1-R 5 5m 10 10m C 15 15m 20 20m A B CD E F G () 16 5. 5-1 17 18 5-2 19 5-3 20 6. 6-1 1 3 4 7 5 2 6 8 9 10 11 6-2 1 11 10 9 2 3 4 5 6 7 8 12 AC DC LCD 21 7. 7-1 7-1-1 1 ISO VG32 060 1m 7-1-2 M4 DIN [050] [25%

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

9h, 8-0 counter bore deplh 7 Bore size 040, 5O/RSI Ora#-Lll D Widlh across tlats: K With locking mechanism r cancel cap/Rs ':O: tr-t ll lE ' Dimensions of lhe model with a cancel cap are the same as lhose shown in the above drawings. > t l U 9 I , o E l l 'Dimensions for the maximum snoqy aDsofpron LNore 4lThe rou shoG an e\tended rr ston tod (Nore 5r'or \tq acrrno, on" oLLl a rrgsd?

factor [% F.S.] 2.0 0.5 Set pressure [MPa] Out 1.5 0.0 1.0 0.5 0.5 Return 1.0 0.0 0 25 50 75 100 0 25 50 75 100 Input signal [% F.S.]

Without bracket (Bottom view) Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13(Z) 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14(Z) 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26(Z) 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38(Z) 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13(Z) 48 39 4.6 12 11.5 52 28

(DC24V)SVON () a) b) c) d) e) D (100) 50 - 15.4 1. 2. () 3. () 4. 5. 6. 7. 8. () (-10603585%) 51 - 15.5 5 15.6 OFF 52 - 16. 16.1 / 16.2 ON 53 - 5 () 54 - 16.3 50mm 16.4 () 55 - 16.5 16.6 D(100) 16.7 56 - Revision history No.JXC-OMT0034CN 2018 3 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications