Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 32, Stroke(mm): 600, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 76, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 55, Table Size Height H(mm): 55, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 32, Stroke(mm): 700, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 76, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 55, Table Size Height H(mm): 55, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 32, Stroke(mm): 700, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 76, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 55, Table Size Height H(mm): 55, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 32, Stroke(mm): 700, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 76, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 55, Table Size Height H(mm): 55, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 32, Stroke(mm): 730, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 76, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 55, Table Size Height H(mm): 55, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 32, Stroke(mm): 750, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 76, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 55, Table Size Height H(mm): 55, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 32, Stroke(mm): 820, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 76, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 55, Table Size Height H(mm): 55, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 32, Stroke(mm): 900, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 76, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 55, Table Size Height H(mm): 55, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 32, Stroke(mm): 950, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 76, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 55, Table Size Height H(mm): 55, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Piping: Standard, Bore Size: 32mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 500mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: M (1m)

Piping: Standard, Bore Size: 32mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 600mm, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal

With no external leakage, the CY series can be used in many diverse environments. Magnetically coupled cylinders have a wide range of applications, and save mounting space. Loads and moments are possible through the use of integrated guides. A variety of guides can be used to achieve the necessary accuracy or allowable moment needed for your application. CY is available in 9 bore sizes

Piping: Standard, Bore Size: 32mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 900mm, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Piping: Standard, Bore Size: 32mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 350mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Piping: Standard, Bore Size: 32mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 300mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

IZx-OMX0087

800 2m/s 2m/s 1000 1000 3) Flow rate : 250L/min 6) Flow rate : 180L/min 75 50 25 0 25 50 75 Installation distance from ionizer to workpiece [mm] 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm ionizer to workpiece [mm] Installation distance from mm 200 200 20m/s 400 400 2m/s 20m/s 2m/s 600 600 10m/s 800 800 10m/s 5m/s 1000 1000 1200 5m/s 1400 5-4.

High Vacuum L Type Valve

H5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XL-OMY0001

/40 800/50 XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 1 1 1 H5 AC100V 200/40 400/70 400/80 / AC200V 800/40 1600/80 1600/80 XLA-63-2 XLA-80-2 AC90240V XL1A25-60S-2 XL1A25-60S-3 1 1 H4 AC100V 400/100 600/150 / AC200V 1600/100 2400/150 XL1A25-60S-3 XL1A25-60S-2 1 2 H5 AC100V 600/130 800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10

LEF-OM007xx

*Refer to the table of Applicable stroke 6mm 6mm 8mm 8mm 10mm 10mm B B Cable type *Applicable stroke Standard produced upon receipt of order Without cable Nil Without cable Nil 100 100 200 200 300 300 400 400 500 500 600 600 700 700 800 800 900 900 1000 1000 Robotic type cable R Robotic type cable R 11-LEFS25 11-LEFS25 Standard cable S Standard cable S 11-LEFS32 11-LEFS32 Motor cable

LEY-OM007

40 (2000[mm/s 2]) 6 17 30 18 50 50 30 60 60 [kg] 2) (3000[mm/s 2]) 2 4 8 8 16 30 11 22 43 [N] 3) 4) 5) 1438 2774 51141 63122 126238 232452 80189 156370 296707 [mm/s] 5) 15500 8250 4125 18500 9250 5125 24500 12250 6125 [mm/s 2] 3,000 [mm/s] 6) 50 35 30 [mm] 0.02 [mm] 10 5 2.5 12 6 3 16 8 4 [m/s 2] 7) 50/20 + LEY* _ / R / L (LEY*D) [] 540 [%] 90 RH ) 28 42 56.4 (DC24V) A/B 800