CRQ2

(Example) For M3: L1 = 6 mm Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Size 10 15 20 30 40 Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 (mm) Q1 Size 20 30 40 M3, M4 M3, M4,

3 Port Solenoid Valve

M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Plug connector Large flow capacity Standard V14:13(27) V14A:16(30) V14:12(26) V14A:15(29) Large flow capacity V124A Note 1) 12 Flow characteristics 23 Valve model C[dm3/(s bar)] 0.037 0.076 0.054 0.099 C[dm3/(s bar)] 0.054 0.099 0.037 0.076 b 0.11 0.07 0.35 0.23 b 0.35 0.23 0.11 0.07 Cv 0.008 0.016 0.015 0.024 Cv 0.015

Vacuum Pad: Ball Joint Type

thread) M10 x 1 M5 x 0.8 Hexagon width across flats 14 M5 x 0.8 M8 x 1 5 Hexagon width across flats 12 3 20 D 3 5 Y Hexagon width across flats 16 15 D 3 3 F Hexagon width across flats 12 Hexagon width across flats 12 Hexagon width across flats 10 Hexagon width across flats 2 F Hexagon width across flats 3 3 C C 2 2 A A B B Dimensions Dimensions (mm) (mm) A B C D F Y A B C D F Model Model

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken lines indicate DIN rail

MGP

D (mm) B 0.2 MGC B 0.2 MGF CY1 A 0.2 A 0.2 Hex socket head mounting screw 140 214 50 66 116 170 M12 X 1.75 M16 X 2 Hex socket head mounting screw 50 56 72 82 98 106 130 142 180 210 D(mm) Bore (mm) A (mm) B (mm) C (mm) Bore (mm) A (mm) B (mm) C (mm) MY1 MGPM MGPL 32 47 M4 X 0.7 M5 X 0.8 M5 X 0.8 M6 X 1.0 M8 X 1.25 18 22 24 30 34 40 46 58 54 62 41 46 54 64 78 86 110 124 156 188 10 12 14 18

Rotary Table/Vane Style Series MSU

MSUB7 (Single vane/Double vane) MSUB7-S/D Top ported: MSUB7-SE A port B port 4 x M4 x 0.7 depth 7 2 x M5 x 0.8 2 x 5.5 through Single vane 2 x M5 x 0.8 depth 10 Long groove depth 5 (Positioning pin hole) 2 x 5.5 through 3 x 4H9 depth 6 +0.030 0 ( ) A B C , , Adjustment bolt Adjustment: Max. 8.25 2 x 5.5 through A port B port 2 x M5 x 0.8 2 x M5 x 0.8 depth 10 Chamfer Chamfer (Single vane

MXW

Dimensions B A D C M (mm) Stopper bolt Stroke adjustable range (mm) 5 Applicable size B A C D M Model Lock nut MXW-A812 21 MXW8 8 M5 x 0.5 2.5 6 MXW-A812-X11 15 31 MXW-A1212 5 23.5 MXW12 8 M5 x 0.8 2.5 6 Avoid operating within 1 mm. The effectiveness of the shock absorber and urethane damper will not be brought into full play, and could be adversely affected.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

-www.stevenengineering.com SYA3220-M5 M5 x 0.8 (A, B port) 1.3 (Ventilation hole) 2 1.5 die-cast hole (For manifold gasket positioning) M5 x 0.8 (P , EA, EB port) 3 position closed center/exhaust center/pressure center SYA3 20(-F2) C4, N3 C6, N7 3 4 5 One-touch fitting (A, B port) M5 x 8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" 2 2.2 (For manifold mounting) Manual override

Air Slide Table Series MXW

Width across flats 8 5H9 + 0.030 0 depth 4.5 Operating port M5 x 0.8 6 x M4 x 0.7 thread depth 6 Note) A Operating direction (Insert) 6 (Plug: M-5P) 58 27 46 5 24 26 29 26 103 6.5 Operating port M5 x 0.8 Y Y 26 B Operating direction 5H9 + 0.030 0 depth 4.5 (Plug: M-5P) Operating direction B A 9 8 10 15 15 10 7.5 19.2 A 35 26.5 20 Z A Cross section AA 3 4 x M5 x 0.8 thread depth 10 3 x H G

Fieldbus System

, 3/5(E) port] Applicable tube O.D.: 10, 3/8" 8 DIN rail 5.5 PE B A B A B A B A B A A 4 3/5 A 4 A 4 A 4 A 4 35 (114.8) 97.5 113.4 116.7 39.5 26.5 E X 101 1 81.2 61.7 Cm: 14.5 01: 16.2 P 47.3 5.5 B 2 B 2 B 2 B 2 B 2 4 x M5 mounting hole 1.4 10.9 2.7 4.7 1/8 [4(A), 2(B) port] SI unit L2 34.2 1.5 One-touch fitting [4(A), 2(B) port] L4 (DIN rail mounting hole pitch: 12.5) 5.3 Applicable tube

VEX1

A perspective drawing Table (1) With/Without Plug for M5 Port M plug connector (M) P2 Model P1 L plug connector (L) VEX3120 None None VEX3121 None None VEX3122 None With plug Manual override Non-locking push Refer toTable (1). M5 x 0.8 (P2) 60 (Air operated) Refer to Table (1). M5 x 0.8 (P1) Bracket B (Option) Hexagonal socket M3 x 0.5 x 8 (2 pcs.)

VFS

A A A B B B P P P 1.0 MPa 1.5 MPa Set pressure range (1) 0.1 to 0.83 MPa 0.05 to 0.83 MPa Ambient and fluid temperature 5 to 60C (No freezing) Port size for connection of pressure gauge Weight (kg) Effective area at supply side (mm2) (2) S at P1 = 0.7 MPa, P2 = 0.5 MPa Rc 1/8 M5 x 0.8 0.16 5.5 5.1 P A P B 12 11 A EA B EB 0.83 38 40 11 12 26 24 32 31 21 18.5 35 31 44 38 90 77 0.46 18.5

SZ3000

2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 SY A 4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2One-touch fitting [4(A), 2(B) port] 2One-touch fitting (X, PE ports) Applicable tubing O.D.: 6 2n1-M5 x 0.8 [4(A), 2(B) port] SYJ Applicable tubing O.D.: 4 6 SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-

SZ3000

2 B 2 B 2 B 2 PE R 3 B 2 A 4 A 4 A 4 A 4 X P 1 A 4 2n2One-touch fitting [4(A), 2(B) port] 13.3 (Pitch) P = 10.5 Applicable tubing O.D.: 4 6 24 16.2 34 17 36.7 B 2 B 2 B 2 B 2 B 2 R 3 A A 4 A 4 A 4 A 4 A 4 P 1 2One-touch fitting [1(P), 3(R) port] Applicable tubing O.D.: 8 2n1-M5 x 0.8 [4(A), 2(B) port] (L4) L3 (3.2) 101.2 8 3.1 18 28.8 35 36.3 58.2 3.5 5.5 B B A A A A A (When equipped with

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

depth 6 +0.030 0 ( ) A B C , , Adjustment bolt Adjustment: Max. 8.25 2-5.5 through A port B port 2-M5 x 0.8 2-M5 x 0.8 depth 10 Chamfer Chamfer (Single vane) (Double vane) If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane type.

SMC Pneumatic Clean Series

With air cushion WW WW WA WB Piping port M5 x 0.8 Cover surface MM NN GA GB F GC Piping port 3-M5 x 0.8 C D LY LB LH A LT X Y NA NB B 0 -0.3 LX S + Stroke H Z + Stroke LZ Head cover port location Axial direction (R) 2-LC Mounting hole (mm) LZ 42 42 LY 25 25 LX 33 33 LT 2.3 2.3 LH 14 14 Y 9 9 NN Z WW WA WB Bore size A M4 x 0.7 D GC B F H MM GB GA C 102.5 101.5 5.5 4.5 20 20 NB LB 21.5 23 S

VZA2000

(Value in the initial stage) Base mounted Body ported Model Flow characteristics Pilot port piping location 14/2(PA/B) 4/25/3(A/BEA/EB) Pilot port size Valve model Function Port size b Cv b Cv Single Double Closed center Exhaust center VZA2121-M5 VZA2221-M5 VZA2321-M5 VZA2421-M5 VZA2141-1-01 VZA2141-2-01 VZA2241-1-01 VZA2241-2-01 VZA2341-1-01 VZA2341-2-01 VZA2441-1-01 VZA2441-2-01 0.60 0.60

3 Port Air Operated Valve Series SYJA300

Bottom Side Top Direction 1/8 1/8 1/8 P, R port M5 x 0.8, 1/8, C4 (One-touch fitting for 4), , C6 (One-touch fitting for 6) M5 x 0.8 1/8 Port size M5 x 0.8 A port M5 x 0.8 X port Note) M5 x 0.8 M5 x 0.8 Note) Only for external pilot Flow Characteristics Flow characteristics Port size 1 2 (P A) 2 3 (A R) Manifold C [dm3/(sbar)] 1(P), 3(R) port 2(A) port b Cv C [dm3/(sbar)] b Cv SYJ52

Fieldbus System

] DIN rail clamping screw 8 R R 11.5 63.5 62.5 56.6 3 3 12 X 12 X 40.5 B B B B B B B B P P 25 1 1 A A A A A A A A 18.5 9.5 7.5 (12) (7.5) C3, C4, C6, M5 [4(A), 2(B) port] C8: 8 One-touch fitting C8 [1(P) SUP port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 20.5 P = 10.5 34 L2 = L1 10.5 L3 = 10.5 x n1 + 65.5 L4 = L3 + 97.5 + 47 x n2 L5 = (L1 L4

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

x 0.8 24 2 x P (Rc, NPT, G) F DL 2 x NN Width across flats NA Standard port H1 Width across flats B1 HC LH D I B B 4 x LD 2 x LC MM Width across flats B2 G Relief port G Relief port M5 x 0.8 LT 20, 25 (This drawing shows the cases of 20 and 25.)