It is equivalent IP40 without cover.Built-in sensor type, External sensor type Note 3)10 years when deenergized (EEPROM)M5 female (built-in sensor type)Enclosure: POM Display: PC Gasket: NBRPanel mount adapter: POMDisplay protective cover: PCApprox. 330 g (Built-in sensor type)Approx. 345 g (External sensor type)
It is equivalent IP40 without cover.Built-in sensor type, External sensor type Note 3)10 years when deenergized (EEPROM)M5 female (built-in sensor type)Enclosure: POM Display: PC Gasket: NBRPanel mount adapter: POMDisplay protective cover: PCApprox. 330 g (Built-in sensor type)Approx. 345 g (External sensor type)
It is equivalent IP40 without cover.Built-in sensor type, External sensor type Note 3)10 years when deenergized (EEPROM)M5 female (built-in sensor type)Enclosure: POM Display: PC Gasket: NBRPanel mount adapter: POMDisplay protective cover: PCApprox. 330 g (Built-in sensor type)Approx. 345 g (External sensor type)
Piping Specifications: N01 (NPT1/8 Piping Adapter, Side Ported), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage)
Piping Specifications: 01 (R1/8 Piping Adapter, Side Ported), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage)
Piping Specifications: NPT1/8 Piping Adapter, Side Ported, Output Specifications: PNP Open Collector 1 Output+Analog Voltage, Unit Specifications: -, Lead Wire: -, Adapter: -, Calibration Certification: -
Piping Specifications: R1/8 Piping Adapter, Side Ported, Output Specifications: PNP Open Collector 1 Output+Analog Voltage, Unit Specifications: -, Lead Wire: -, Adapter: -, Calibration Certification: -
SY3000-OMH0002 () () (PE) 15 No.SY3000-OMH0002 No. 1(ISO VG 32) (R) E 16 No.SY3000-OMH0002
1/61/4 1.5Nm Rc Rc1/8 79 Rc1/4 1214 -6No.VFR2000-OMM0001 5 5 5 5 ( ( ( ( ) ) ) ) 5m 3 30 () 1 VG32 2 ()ISO VG32 -7No.VFR2000-OMM0001 G : DC +(+)(-) E T D Y :DIN +-No.1 No.2 T :68mm E :2.32.8mm D :68mm Y :4.57mm AB+ B+COM -COM ET :1.25-31.25-3S1.25Y-3N 1.25-31.25-3S1.25Y-3N1.25Y-3S 1.25Y-3S(D Y ) -8No.VFR2000-OMM0001 3.23.7mm ( 0.33mm ~ 0.2 2 1.7mm ( ) (1mm) -9No.VFR2000-OMM0001
A dedicated exhaust port (M5) is installed to remove air from the nozzle.
1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: D (Panel Mount Adapter+Front Protective Cover)
Pressure Range: F (-100.0 to 100kPa), Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: P (Unit Switching Function, Initial Value psi, Not Allowed for Use in Japan), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover]
Pressure Range: F (-100.0 to 100kPa), Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: M (Fixed SI Unit, kPa), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)]
Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: M (Fixed SI Unit, kPa), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)]
Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: M (Fixed SI Unit, kPa), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover]
Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)]
Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: P (Unit Switching Function, Initial Value psi, Not Allowed for Use in Japan), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared
Pressure Range: F (-100.0 to 100kPa), Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: P (Unit Switching Function, Initial Value psi, Not Allowed for Use in Japan), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: R [DIN Rail Adapter (DIN Rail to be
Pressure Range: F (-100.0 to 100kPa), Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)