Angle Seat Valve /

V Ps + 0.1 293 S = 12.1 log10 () (6) t P + 0.1 T S : Effective area [mm2] V : Air tank capacity [dm3] t : Discharging time [s] Ps : Pressure inside air tank before discharging [MPa] P : Residual pressure inside air tank after discharging [MPa] T : Temperature inside air tank before discharging [K] Power supply Pressure switch Thermometer Pressure control equipment Control circuit Solenoid

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

The number of adjustment nut (its pitch is 1mm) rotations and initial exhaust conductance should be confirmed referring to the figure on the right. 20 Initial exhaust valve conductance l/s (viscous flow) Shows flow rate when P=0.1MPa 18 XMD/XYD-63 XMD/XYD-80 16 14 XMD/XYD-50 12 10 XMD/XYD-40 [2] Opening of the initial exhaust valve (valve S) When pressure is applied to the pilot port S, the

High Purity Fluoropolymer

Metric size Inch size 1/4" 3/8" 1/8" 1/2" 3/4" 6 8 10 12 19 3/16" 1/8" 1/4" 3/8" 1/2" 3/4" 4 None 2 3 Male 4 P.21 Connector LQ2H 5 2 3 Female 4 P.22 5 2 3 Male 4 P.23 Elbow LQ2L 5 2 3 Female 4 P.24 5 2 3 Male 4 P.25 Run tee LQ2R 5 2 3 Female 4 P.26 5 2 3 Male 4 P.27 Branch tee LQ2B 5 2 3 Female 4 P.28 5 2 3 Union elbow LQ2E 4 P.29 5 2 Union tee LQ2T 3 4 P.29 5 Features 4 Series LQ1 ,TL/TIL

Stations: 01 (1 Station), Piping: B (U Side: Open; D Side: Open), Thread Type: F (G), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 01 (1 Station), Piping: B (U Side: Open; D Side: Open), Thread Type: F (G), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.

2 Phase Stepper Motor/Without Motor Brake Series LXP

For transfer load of 1kg Positioning time (sec) Positioning distance (mm) 100 200 50 10 1 50 2.1 4.1 1.1 0.3 0.1 Speed (mm/s) 100 1.1 2.1 0.6 0.2 0.1 200 0.6 1.1 0.3 0.1 0.1 Refer to page 302 for acceleration time. 249 Series LXP CE Marking Guide Rod Type With Motor Brake/Without Motor Brake How to Order LX P B 2 S 1 S B 100 F9N Q B CE marking Guide rod type P Actuator configuration Number

Compact Type

(mm) Overhang L (mm) Graph V = up to 800 mm/s (up to 700 mm/s for 15, 20) 4 CXSJM CXSJL Graph V = up to 600 mm/s 3 CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 Weight m (kg) 10 0.1 10 0.1 6 6 10 20 30 40 50 100 5 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15, 20. 4 Series CXSJ Horizontal Mounting V = up to 400 mm/s V= = up to 800 mm/s V = up to 400 mm/s V= = up

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

Confirmation of allowable load weight by application Vertical downward: Press Horizontal: Chucking Vertical upward: Lifter l l m m F m F Maximum speed (mm/s) Load center of gravity position l (mm) Maximum speed (mm/s) to 300 to 500 to 700 to 300 to 500 to 100 to 200 to 300 Graph Graph Graph Graph Graph Graph Graph Graph l: The dimension for the load center of gravity position is the dimemsion

Rodless Cylinder for Vacuum Series CYV ø15, ø32

low particulate generating vacuum grease. p r Non-contact construction a w t i o o n L There is no particulate generation due to friction, since the construction does not allow contact between the cylinder tube's exterior surface and the slide table's internal surface. a t e l u g c Reduced initial particulate generation 3 e i t n r a e p r a w t i o o n L No contact Cleaned, assembled,

33

HEB Iron (Fe) [mg/L] 0.3 or less v v Copper (Cu) [mg/L] 0.1 or less v Sulfide ion (S2) [mg/L] Should not be detected. v Ammonium ion (NH4+) [mg/L] 0.1 or less v Residual chlorine (Cl) [mg/L] 0.3 or less v Free carbon (CO2) [mg/L] 4.0 or less v HED Reference item HEA Electrical Wiring Warning IDH * In the case of [Mcm], it will be 0.003 to 0.01.

Regulator with Integral Pressure Gauge

Surface of panel Surface of panel OUT SMC MPa MPa MPa MPa MPa MPa K K K K K K P P P P P P C C C C C C U U U U U U O O O O O O S S S S S S L L L L L L H H H H H H to to to to to to IN 58 Bottom of panel Bottom of panel 45 1 I N 1 I N 1 I N C S M C S M C S M 1 I N 1 I N 1 I N 2 OUT 2 OUT 2 OUT C S M C S M C S M 2 OUT 2 OUT 2 OUT In case of ARG30, dimension in height can be reduced by approx

PSE200.eng

Panel mount adapter (Model: ZS-26-B) Panel mount adapter + Front protective cover (Model: ZS-26-01) 48 conversion adapter (Model: ZS-26-D) 2, Preparation of OUT1 device Prepare the sensor for which OUT1 is to be set. ON OFF Selection of Pressure range, Output style, Response time and Pressure setting method.

Air Cylinder NCQ7 Series Compact Cylinder

fi; ,Ek---l l t , _ p i Ughr6ftdrn9drcd.i ^9 ixrf*H ri ll .l + r iE I ll zenrdDd i i-:--:-:]"ffi -l*L r-Choks i n"a El6ctric (-) o-A73c it\ihr ;ifie ;rod; i :t r**G}ri 'p D-479W / rwo @tor6 Solid. Sta,te Suitches D-J79. D-J79C, D-F7BV D-F79.D-F7NV l--;;;-;-l .."e D-F7P. D-F7PV .r_ i Frod i i l r E . l I I 19* i --r ,-t o'rp'r _T_ 5*"" I whhe !t, I L l i o -J Alack D-J79W.

Lightweight and Compact

Item Unit Standard value Influence 10 s Corrosion Scale generation 5 s pH (at 25C) 6.0 to 8.0 v v Electric conductivity (25C) [S/cm] 100* to 300* v v Chloride ion (Cl) [mg/L] 50 or less v Sulfuric acid ion (SO42) [mg/L] 50 or less v 2 s Min. 1 s Standard item 0.5 s 0.2 s Acid consumption amount (at pH4.8) [mg/L] 50 or less v Total hardness [mg/L] 70 or less v Calcium hardness (CaCO3) [mg

asilltr

Female lhread length {"1') is shonerfor the lollowing . 2o0 (2') 1/g & 1A st. 1/s & 1/a st. r/s & 1/a st. l=o.44 25O (2112')' I/s st. r/s st. '/s stl=0.44 300 (3") ]/s & 1/a st. 1/e &r/l st. 1/e & 1A st. 400 (4) 1/s &1/a st. r/s & 1/a st. 1/e &14 st. Series NCQT Dimensions Spring Extend NCQTBO-OT T Type Bore,, 9t4,F' I 60re ,b,:!

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

25 Tubing T, TU P. 26 Floating Joint/Stainless Steel Type JS P. 27 Features 2 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10mm 16mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting B L F D Basic type Axial foot type Front flange type Double clevis type CJ5 L 16 S R 60 Without Auto Switch CDJ5 L

Air Cylinder RSQ Series Stopper Cylinder

oardvrs,k. \_, 1_l Whe. 1wo switchos ar6 ANDcoiiecled.loadma f uncl o may r6urt b@use oJ flie toad voll aged@Pwhe. the swilchs ae luffed ON. l?piLl lanp lighls wh6n hlo swilches a turned ON Eran0e P$s!

FSQ seies

oardvrs,k. \_, 1_l Whe. 1wo switchos ar6 ANDcoiiecled.loadma f uncl o may r6urt b@use oJ flie toad voll aged@Pwhe. the swilchs ae luffed ON. l?piLl lanp lighls wh6n hlo swilches a turned ON Eran0e P$s!

AC Servo Motor Driver (Pulse input type)

LOP Control change When operating in two modes, the control mode will be changed. 11 - (3) Output signal Position control mode: P, Speed control mode: S, Torque control mode: T : Initial setting, : Assignment is available with parameter,: Assignment is not available Device name Symbol P S T Function ALM Problem This signal turns off while alarm is generated.

Multistage Ejector (N)ZL Series

Standard (N)ZL212 40 V 54 125 Label 188 61 P Port exhaust (N)ZL212P V Vacuum pressure gauge Exhaust with silencer Exhaust port 1 25 With vacuum pressure gauge (N)ZL212-G P V Exhaust with silencer Vacuum adapter 1/8 7 With vacuum adapter (N)ZL212-GN P V Vacuum pressure switch Exhaust with silencer With digital vacuum pressure switch (N)ZL212-E P V RESETSET Approx. 500 Section A (L: approx.