Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

C D 4-O MX MTS T MY Q CY 2-P S U W E B K L MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX DAA AB I AP A R X Y + Stroke Z + Stroke -X J V 20Data 8-AF AC AD AE 100 piston rod end connection Stroke range (mm) Bore size (mm) AF AE AD AC AB AA G F N E M D L C K

Electric Actuator

Table Displacement (Reference Value) L W 1 N = 0.224 lbf 0.02 LEJ;40 Displacement [mm] (L = 52.5 mm) LEJ;63 (L = 64.5 mm) 0.01 0 0 100 200 300 400 500 Load W [N] Note) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

HRX-OM-X084

70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/L] 4.0 or less 4.0 or less

Sine Cylinder Series REC

Example) If P = 0.6 MPa, a max. stroke = the respective stroke in the graph x 0.6 0.5 49 45 39 30 0.7 Rod side flange style: F Head side flange style: G CY 259 237 211 168 Foot style: L L 0.3 199 183 162 129 0.5 CX W W W F Figure (1) 168 154 136 109 0.7 Load factor MQ 119 110 97 76 0.3 m RHC 90 83 73 56 0.5 G 74 68 60 46 0.7 RZQ 1) = 0.7 or less m D2) = 0.5 or less -X m Individual -X

Sine Cylinder Series REC

Example) If P = 0.6 MPa, a max. stroke = the respective stroke in the graph x 0.6 0.5 49 45 39 30 0.7 Rod side flange style: F Head side flange style: G CY 259 237 211 168 Foot style: L L 0.3 199 183 162 129 0.5 CX W W W F Figure (1) 168 154 136 109 0.7 Load factor MQ 119 110 97 76 0.3 m RHC 90 83 73 56 0.5 G 74 68 60 46 0.7 RZQ 1) = 0.7 or less m D2) = 0.5 or less -X m Individual -X

Sine Cylinder Series REC

Example) If P = 0.6 MPa, a max. stroke = the respective stroke in the graph x 0.6 0.5 49 45 39 30 0.7 Rod side flange style: F Head side flange style: G CY 259 237 211 168 Foot style: L L 0.3 199 183 162 129 0.5 CX W W W F Figure (1) 168 154 136 109 0.7 Load factor MQ 119 110 97 76 0.3 m RHC 90 83 73 56 0.5 G 74 68 60 46 0.7 RZQ 1) = 0.7 or less m D2) = 0.5 or less -X m Individual -X

EXxx-OMO0027

:1D SI unit BOOL RO P 60A0:21 Slot 0 BOOL RO P 60A0:22 Slot 1 BOOL RO P 60A0:23 Slot 2 BOOL RO P 60A0:24 Slot 3 BOOL RO P 60A0:25 Slot 4 BOOL RO P 60A0:26 Slot 5 BOOL RO P 60A0:27 Slot 6 BOOL RO P 60A0:28 Slot 7 BOOL RO P 60A0:29 Slot 8 BOOL RO P 60A0:2A Slot 9 BOOL RO P -76No.EX-OMO0027-A Module Output Data SI unit (EX600-SEC) Table.

CG5-S

25 Tubing T, TU P. 26 Floating Joint/Stainless Steel Type JS P. 27 Features 2 Stainless Steel Cylinder Se ries CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10mm 16mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting Basic type Axial foot type Front flange type Double clevis type B L F D CJ5 L 16 S R 60 Without Auto Switch CDJ5 L

NCQ8

L M9NL 197in (5 m) .

VCW

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

Multistage Ejector Series ZL112/212 1

Output Specifications 25(L) 1 output NPN open collector 30 V, 80 mA or less ZSE4 ZSE4B 26(L) Analog output (1 to 5 V) 67(L) 1 output PNP open collector 80 mA or less 26(L) Analog output (1 to 5 V) 27(L) 2 outputs NPN open collector 30 V, 80 mA or less ZSE4E 67(L) 2 outputs PNP open collector 80 mA or less 13-7-6 7 Multistage Ejector Series ZL Construction q t e !

Modular Type Regulator Series AR

5000 10 Flow rate L/min (ANR) Flow rate L/min (ANR) Orange mark AR30 Rc 3/8 AR60 Rc 1 0.6 0.6 0.5 0.5 2.

Flow Control Equipment

min (ANR)) Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Needle rotation (Turns) Needle rotation (Turns) Needle rotation (Turns) ASD530F ASD630F 1000 1500 14 20 10, 11 12 Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 12 1000 10 8 10, 11, 12 08, 09 15 500 06,

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 H 13 20 20.5 22 29 I 12 15 18 23 J 6 6 8 8 10 K 11 8 10 15 16 L 57 66 70 80 92 P (Piping port) Model Mounting nut/Included in the package (2 pcs).

VXA21/22

(P1+0.1013) l/min(ANR) Calculation by effective area Q=109.6.S.(P1+0.1013) l/min(ANR) Water How to Read the Graph In case of a flow of 2 l/min.

TABLE OF CONTENTS

V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Model LW53 3 Way Normally Closed Piped Exhaust LW53GG8XGB LW53GH8XGB (G or L) LW53GJ8XGB (G or L) LW53GV8XGB (G or L) LW53GK8XGB (G or L) LW53HH8XGB (G or L) LW53HJ8XGB (G or L) LW53HV8XGB (G or L) LW53HK8XGB (G or L) LW53JJ8XGB (G or L) LW53JV8XGB (G or L) LW53JK8XGB (G or L) LW53VV8XGB (G or L) LW53VK8XGB

CATALOG VC10

V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Model LW53 3 Way Normally Closed Piped Exhaust LW53GG8XGB LW53GH8XGB (G or L) LW53GJ8XGB (G or L) LW53GV8XGB (G or L) LW53GK8XGB (G or L) LW53HH8XGB (G or L) LW53HJ8XGB (G or L) LW53HV8XGB (G or L) LW53HK8XGB (G or L) LW53JJ8XGB (G or L) LW53JV8XGB (G or L) LW53JK8XGB (G or L) LW53VV8XGB (G or L) LW53VK8XGB

No more element replacement!

rate (l/min) Flow rate (l/min) Filtration Characteristics P Fluid: Potable water P Flow rate: 20 l/min P Liquid temperature: Room temperature P Test dust: AC course P Test method: Per SMC test method 5 m FN11lll-10-S005 FN41l2l-20-S005 20 m FN11lll-10-S020 FN41l2l-20-S020 100 100 80 80 Filtration efficiency (%) Filtration efficiency (%) 60 60 40 40 20 20 0 0 10 5 20 50 75 25 20 35 65 90

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 117 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3-Screen High Precision Dig Press Switch, PRESSURE SWITCH, ISE1-6, 117.00000 lb