High Vacuum Angle Valve

G G Heater A A [mm] Series Valve size A B C D E Fn G H J K 25 50 121 48 27 12 40 26 44 21 40 65 171 66 39 11 55 41 67 29 50 70 185 79 31 11 75 52 76 29 9 XLC XLG 19 Heat-resistant 2-Color Indicator Solid State Auto Switch: Direct Mounting Type D-M9NJ/D-M9PJ RoHS Refer to the SMC website for details on products that are compliant with international standards.

SFOD-OMT0005CN

(P.41) (CN1: EMG OFF 3.(P.12) ) INP ON (INP 9.1 (P.32) PLC ) 5 3.(P.12) PLC (PLC) 2 11.4 (P.49) () 10.(P.41) 3.(P.12) -81- 5(P.23) 9.1 (P.32) 3.(P.12) PLC (PLC) 2 11.4 (P.49) () () 3.2 (P.13) USB 10.(P.41) 5 10.(P.41) 10.(P.41) 3.(P.12) ( EMG ) 3.

C95

6 5.4-41 -XC10 Dual stroke cylinder/Double rod !7 Made to order common specifications 5.4-46 -XC11 Dual stroke cylinder/Single rod !8 5.4-52 -XC12 Tandem cylinder !

Tamper Proof and Flat Head Screw

55.3 49.3 21.8 R 1/4 19 1.5 23 9.5 AS321F-N02-07ST AS321F-02-10ST 18.5 1/4" 13.2 27.8 39.3 17 31.8 10 21 43.3 AS321F-N02-09ST AS321F-02-12ST 23 9.5 NPT1/4 19 20.9 21.8 55.3 1.5 49.3 5/16" 15.2 29.5 41 18.5 12 22 44.3 32.8 AS321F-N02-11ST AS321F-03-06ST 12.8 17.9 3/8" 31.8 43.3 21 27.8 6 17 39.3 AS321F-N03-07ST AS321F-03-08ST 15.2 1/4" 13.2 27.8 39.3 17 29.5 8 18.5 41 53.7 9.5 R 3/8 19 1.5

Series IDG

Page 41 Precautions .

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VQZ115-M VQ110-L 4-14-41

Clamp Cylinder with Lock Series CLK1

36 Ws Width across flats K Width across flats 44 0.050 0.093 +0.027 0 +0.3 0 +0.4 0 Shaft: 12d9 F Clevis width CLK1A: 16.5 R15 Hole: 12H8 CLK1B: 19.5 S + Stroke 27 1.5 40 Z + Stroke 97 2 57 T ZZ + Stroke (mm) Symbol BX BY D F GA GB L M N S T W Wc Ws Z ZZ IA K Bore size 40 56 54 16 44 77 10 55 M12 x 1.5 86 112.5 57 5 39 27.5 114 228 47 14 50 64 64 20 55 78.5 10 58 M16 x 1.5 87.5 117 60 7 41

2/3 Port Valve

N.O. 72 80 95 100 88 97 108.5 113.5 41 41 44 44 VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 DIN connector: D FN.C.E Normally closed EN.O.F Normally open VX VNl VQ Model N N.C. N.O. K P N.O.

Speed Controller with Indicator

9.3 19.2 47 (48) AS321FS-02-08 (S) 8 13.2 22.7 33 14.2 AS321FS-02-10 (S) 10 15.9 26.7 37 35.7 15.6 38 (39) AS321FS-02-12 (S) 12 18.5 29.7 40 34.5 17 50 (51) AS321FS-03-06 (S) 6 1/4 19 16.6 13.3 10.4 21.8 32.1 28.7 55.4 54 50.2 48.8 24.5 28.5 9.3 19.2 38 (39) AS321FS-03-08 (S) 8 13.2 22.7 33 14.2 AS321FS-03-10 (S) 10 15.9 26.7 37 28 15.6 29 (40) AS321FS-03-12 (S) 12 18.5 29.7 40 26.8 17 41

High Power Cylinder:

D d H Part no B C 30 M22 X 1.5 26 8 26 SOR-20 20 15.0 12.5 M8 X 1.25 5 13 NT-02 20 36.9 M24 X 1.5 32 8 32 SOR-25 25 19.6 16.5 M10 X 1.25 6 17 NT-03 25/32 43.9 M30 X 1.5 38 9 38 SOR-32 32 25.4 21.0 M14 X 1.5 8 22 NT-04 40 47.3 M33 X 2.0 41 11 41 SOR-40 40 4.10-6 High Power Cylinder Series RHC How to Rotate the Relief Valve Body The relief adjustment screw can be placed in any direction by

Environment

range [mm] R OA OB PA PB Q S T U PC W X Y Without lock With lock Without lock With lock Motorless 25 15 to 100 8 37 38 15.4 8.2 28 46 92 1 15.4 123 173 145 195 51 101 to 400 LAT 32 20 to 100 10 37 38 15.4 8.2 28 60 118 1 15.9 123 173 150 200 61 101 to 500 LZ [mm] Body Bottom Tapped Size Stroke range [mm] MA MB MC MD MH ML MO MR XA XB LC3F2 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41

I/O Configurator (NFC version)

Detailed information of units 41 3.4.1. Information tab 41 3.4.2. Details of I/O monitor tab 50 4. Setting Function 57 4.1. Edit TAG 57 4.2. Software Control 57 4.3. Forced output 60 4.3.1. Forced output conditions 60 4.3.2. Forced output procedure 60 4.3.3. Forced output release procedure 63 4.4. Export Settings 64 4.5. Import Settings 66 4.6. Reading of the initial value 67 4.7.

LFE-OMY0008

[F20] 45 [F22] 46 OFF [F30] 47 OFF[] [F32] 48 OFF[] [F33] 50 FR0 [F34] 51 OFF [F80] 52 [] [F81] 53 OFF [F82] 54 [*] [F90] 55 OFF [F98] 56 OFF [F99] 57 OFF 30 [F10](41 ) OUT2 (20L/min ) OFF OFF OFF OFF 27 No.LFE*-OMY0008 [F 1] OUT1 OUT1 1. 1. 1. 1.

CS1

100 157.5 50 36 59 15 8 35 16 85 47 90 43 14 31 19 36 Lube Non-lube Air-hydro M30 X 1.5 to 1400 1401 to 1600 100 161 128 M14 X 1.5 188 112 180.5 50 36 59 15 9 35 16 14 19 47 90 43 31 36 1/2 3/4 M36 X 1.5 to 1400 1401 to 1600 18.5 106 197 182 144 M16 X 1.5 206 118 14 19 53 90 43 36 45 56 40 59 17 9 39 M40 X 1.5 3/4 to 1800 1801 to 2000 18.5 125 227 204 162 115 M18 X 1.5 231 132 60 48 17 41

Series LQ3 High Purity Fluororesin Fitting

M L K J H E t W1 W2 M 14 20 25 29 37 49 58 69 89 100 117 136 14.5 20.5 24.5 30.5 36.5 48.5 6 7 7 9 9 10 11 16 21 24 32 41 10 17 22.5 24.5 27 30 16 21 26 32 41 50 17 24 28 36 43 55 8 8 8 8 13 13 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3P1A LQ3P2A LQ3P3A LQ3P4A LQ3P5A LQ3P6A 1/4 (E) (E) L Panel Aperture (K) Straight Union : LQ3U (mm) Inch Size H Model Tubing O.D.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

93 36.5 13.5 15 32 25 23 M5 24 59.5 46 57.5 60 55 48.5 101 57.5 68 1/2 22 45 96.5 41 11 17 36 22.5 23 M5 26 65 48 63 62 60.5 50.5 103 63 70 1/4, 3/8 VCW42 30 50 101 41 13.5 17 36 25 23 M5 26 67 48 65 62 62.5 50.5 103 65 70 1/2 35 60 108.5 41 17.5 17 36 30 28.2 M5 26 70.5 48 68.5 62 66 50.5 103 68.5 70 3/4 5 Series VCW How to Order Manifolds How to Order Manifold Assemblies (Example) VV2C

AC Servo Motor Driver (Pulse input type)

Changing PD04 from 00212100 to 0021210D 0 D 41 - (2) Symbol allocation using the setup software: Changing pins CN1-16 to Gain changing selection (CDP). Change PD04 from 00212100 to 0021210D in the I/O tab. Select Single Axis Write. Cycle the power the parametersto be enabled.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

39.3 17 41 29.5 18.5 8 15.2 79 77 R 3/8 19 23 9.8 1.2 47.4 19.8 52.6 AS321F-N03-09SD AS321F-03-10SD NPT 3/8 19 23 9.8 1.2 47.4 5/16" 15.2 29.5 41 18.5 43.3 31.8 21 10 18.5 81 79 19.8 52.6 AS321F-N03-11SD AS321F-03-12SD 3/8" 44.3 17.9 31.8 43.3 21 32.8 22 12 20.9 83 81 AS421F-N04-11SD AS421F-04-10SD 3/8" 17.9 33.6 47.9 21 47.9 33.6 21 10 18.5 141 141 24 28.6 12.4 1.2 55.8 1/2" NPT 1/2 23.8

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

(41) AS32l1FG-02-10(S)A 10 15.9 26.7 37 35.7 15.6 42 (42) AS32l1FG-02-12(S)A 12 18.5 29.7 40 34.5 17 43 (43) AS32l1FG-03-06(S)A 6 10.4 21.8 32.1 36.4 50 48.4 44.5 42.9 1/4 19 16.6 13.3 29 (30) AS32l1FG-03-08(S)A 8 13.2 22.7 33 14.2 AS32l1FG-03-10(S)A 10 15.9 26.7 37 28 15.6 30 (31) AS32l1FG-03-12(S)A 12 18.5 29.7 40 26.8 17 32 (33) AS42l1FG-04-10(S)A 10 1/2 24 (23.8) 10.4 21.8 32.1 28.7

C95Series

IIIB OA DB IOL lou DC OX iDE .1 00 DS OH Z ODHIl ": ~ 46 , 31 1 21 18 5 3a , 2' 1 51 l a.5 6.6 If 7 32 1184 lO ' ;~ 52 35 ,24 I 22 15.5 41 21 i 54 16.5 6.6 11 9 ' 36 l a, J:!'