XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal RoHS XLA/XLAV Series How to Order q w e r t y u XLA 2 M9N 16 A XLA e Indicator/Pilot port direction q Flange size w Flange type Rear flange surface Size 16 25 40 50 63 80 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80
hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90
M381.5 50 26.5 3.5 37.5 63 37.5 64 37.5 64 AWM40-D 1/4, 3/8, 1/2 1/8 70 147.1 91.5 35.5 38.4 M421.5 75 35.5 0 42.5 73 42.5 73 42.5 73 Optional specifications Semi-standard specifications Metal bowl Metal bowl with level gauge PC/ PA bowl With auto drain Model Bracket mount Panel mount With barb f itting With drain guide With drain cock With drain guide With drain cock With drain guide Q
M381.5 50 26.5 3.5 37.5 63 37.5 64 37.5 64 AWD40-D 1/4, 3/8, 1/2 1/8 70 147.1 91.5 35.5 38.4 M421.5 75 35.5 0 42.5 73 42.5 73 42.5 73 Optional specifications Semi-standard specifications Metal bowl Metal bowl with level gauge PC/ PA bowl With auto drain Model Bracket mount Panel mount With barb f itting With drain guide With drain cock With drain guide With drain cock With drain guide Q
hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90
Dimensions/12 to 25 Standard (Through-hole/Both ends tapped)/CQSYB, CDQSYB 12 2-M5 x 0.8 Auto switch Lead wire min. bending radius 10 H thread effective depth C 2 x 4-OB counter bore depth RB 2 x 4-OA effective depth RA Note 1) Q F 16 I 4-N through D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod end male thread Bore size (mm
P (port f)] WB WA R 4-J Depth JK Inner cover holding screw TA TA WB WA TB TB R W (mm) C ED A EK B F E G H HA HB HG HI HL HP HS HT J JK K Model +0.030 0 CYP15 5.4 9.5 8 4 9.5 12.5 4H9 6.5 45 19.5 8.5 8.5 23 38.6 44 27 19.5 M6 x 1 10 21 +0.030 0 CYP32 8.6 6H9 13 12 14 6 25 8.5 75 39 19 19 39 64.9 73.5 49.5 39 M10 x 1.5 12 20 LD LW MM M N L P PA PB Q QW R T TA TB W WA WB Y Z Model CYP15 5.6
45 RA X0.02 RB RC T VB U X PW VA H NL HB HA: T groove for hex. bolt XAH7depth XL DB 2-P GB GA GC 6+0.05depth 6 o PB K J G (Plug) 30 S PA + Stroke C + Stroke FA FB SB SA FC B + Stroke A + Stroke AA + Stroke 60 Turntable angle detection switch 2-P E (mm) Bore size (mm) FB FC G GA GB GC H HA HB J K L MM ML NN NL OA B C DA FA Standard stroke (mm) 77 96.5 116 63 80 100 20 25 30 10 12 15 39 45.5
Series MGP Dimensions 4-MM depth ML 4-OA through 4-OB depth of counter bore OL Section XX HA:T-slot for hexagon bolt Section XX Z WA L 4-YY depth YL 4-NN through Section XX DL X0.02 X T R X0.02 X0.02 DA VB VA H 24 11 PW X U DB End lock mechanism non-locking type manual release ( ) XAH7 depth XL XAH7 depth XL GC XAH7 depth XL 2-P (plug) 2-P Q GA LL GB PB J K WB WA Z G PA + Stroke C + Stroke
Stainless steel 9 With switch only Magnet plate Aluminum alloy 10 With switch only Switch mounting bracket 11 Scraper 12 With back-up ring Rod seal NBR 13 Piston seal 14 Tube gasket 15 Piston gasket 18 Series CHKGB Dimensions 2-Rc P F with effective thread depth G Q S Width across flats f c R D R a b g e H E C B + Stroke h + Stroke 4-K through J 8-L counter bore A + Stroke M Rod end male
6ON/OFF valve for oil mist 190 190 t y q t y q 6 6 !0Supply pressure gauge !0Supply pressure gauge R3.5 R3.5 OIL, AIR OIL, AIR Rc1/4 Rc1/4 L L K K C C O O AIR BLOW SUP SUP !1Tank pressure gauge !1Tank pressure gauge 272 272 153 238 153 238 e e 189.5 153 2 189.5 2 u u w r i w r i o o Material Note Main Parts List Part no. Spare Parts/Replacement Parts Part No. No. Description No. Qty.
Lube Unit Mounting thread M12 Float switch mounting position J (Bracket mounting dimensions) Panel (Option) Bracket (Option) A B C D E F G H J K L M N P Q R S Model Port size ALDU600-06 ALDU600-10 ALDU900-12 ALDU900-14 ALDU900-20 43 10 57 51 16 67 77 85 90 100 283 296 424 424 476 4 3 135 345 460 145 90 150 480 20 430 470 175 87.5 30 62.5 1 1 1 2 615 615 682 419.2 209 4 1 250 125 33.2 33.2
of short shaft length Change of double shaft length Change of short shaft length Change of double shaft length XA45 CRA1 XA46 XA47 XA48 CRQ2 Y Y Y Y Y XA49 XA50 MSQ K K, T K K J K K K J K, T K K XA51 K K J J J K K J J J K K K J J J J XA52 MSZ XA53 J J J J J J J XA55 CRQ2X MSQX J XA57 J Reversed shaft, Change of double shaft length A combination
0 VEX IC-0(Internal sensor type) IC-1(External sensor type) No. q w e r Description Note Breathing port (M3 x 0.5 x 9.5) Breathing port (M3 x 0.5 x 9.5) Power supply, 10 bit input cable 13 wire, O.D. 6.8 mm, 1 mm length AMR Pneumatic regulator connection cable 5 wire, O.D. 6 mm, 1 mm length q q Cable for 4 point switch output ITV 3 wire, O.D. 3.4 mm, 1 mm length Cable for external sensor
5 q u o Material Note Component Parts !4 r No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !
0 Steel wire NBR Steel wire NBR XT010-20 XT010-21 XT041-1 4-16-6 Series VS3135/3145 Dimensions VS3135/3145 V100 SY SYJ VK VZ VT 3-Port size VP 4-Q Mounting hole 3-Q Mounting hole VG VP S070 VQ VS3135 VKF VQZ VZ Q Terminal dimensions Port size Rc VS A Model B C D E F G H J K L M N P R S T U VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 VFN 1 4, 3 8, 1 2 64 64 65 70 1 136 35 9 64 54 19
5 q u o Material Note Component Parts !4 r No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !
No. q !0 q CONTROLLER PRESSURE OUT w Position Detection Switch Flow Sensor Pressure Control Pressure Sensor e w r RUN 4 3 2 1 CH kPa 4 3 2 1 SW t e y D-IN RUN UP SET P-ON DOWN STOP READ r u i o t y u i o !