SMC Corporation of America
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JIS B 8370: JIS B 8361: JIS B 9960-1: -(1 :) JIS B 8433-1993:*2) 1. 2. 3. 1. 2. 3. 4. 3 *3) 1 1.5 3) 1 1 () 4 1 1-1 MXQ6 MXQ8 MXQ12 MXQ16 MXQ20 MXQ25 1) 2) ( ) 3) 4) / / 2 ,3 ) 2 2 ,3 ) 1) 1 2) 20 ,0.150.6MPa 3) MXQ25(A)-150,MXQ6B-50,75MXQ8B-75,100MXQ16B-100,150MXQ20B-125,150 300mm/s 4) MXQ**B 50200mm/S 1 (MPa) MXQ8(A,C) 0.3 MXQ8B 0.3 MXQ12(A,C) 0.3 MXQ12B 0.3 MXQ16(A) 0.2

Dimensions (Orifice Size: 10 mm) Normally Closed: VXP2130 Grommet: G Conduit: C (67) (52) 20 23 (67) (52) 20 39 270 10 290 10 G 1/2 VC (5.5) (2.3) (2.3) (5.5) VDW 80 86 63 69 66.5 73.5 80 86 71 77 (33) 36 (33) 36 (27) 30 VQ (7.5) (27) 30 (7.5) Bracket 11 14 11 14 VX2 IN OUT IN OUT Bracket 24 26 50 2-Rc 1/4, 3/8, 1/2 (28) (28) 24 26 50 2-Rc 1/4, 3/8, 1/2 VX 22 28 40 22 28 Courtesy of Steven

TMH M5 Port size ASD M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Applicable tubing O.D. Note) Type 01 02 03 04 Metric size Inch size Elbow Universal 2 3 1/8" 01 23 AS 3.2 03 05 07 09 11 13 04 06 08 10 12 4 5/32" 6 3/16" AS-FE Control U10/32 N01 N02 N03 N04 8 1/4" Meter-out Meter-in 0 1 10 5/16" Made to Order Refer to the below for details.

No.EX-OMZ0018 Operation Manual PRODUCT NAME SI Unit for Vacuum Manifold MODEL / Series / Product Number EX260-VIL1 Contents 1. Product summary 10 2. Wiring 11 2.1. Communication/Power connector 11 2.2. FE terminal 11 3. Configuration 12 3.1. IODD file 12 3.2. Direct Parameter page 1 12 3.3. IO-Link defined parameters 13 3.4. Vendor defined parameters 15 4. Process data 22 4.1.

20 16 16 12 12 1 1 0.1 0.1 10 100 10 100 Eccentric distance L [mm] Eccentric distance L [mm] 50 mm stroke or less, V = 400 mm/s Over 50 mm stroke, V = 400 mm/s 100 100 50 50 10 10 40 40 Load mass m [kg] Load mass m [kg] 32 32 25 25 20 1 1 20 16 16 12 12 0.1 10 100 0.1 10 100 Eccentric distance L [mm] Eccentric distance L [mm] 11 Model Selection MGPK Series L L Plate Material Carbon Steel

5-1 . 5-1 6 6-1 . 6-1 6-2 . 6-2 6-3 . 6-3 6-4 . 6-4 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 1 8 C 8-1 . 8-1 8-2 . 8-1 8-3 . 8-1 9 G 7-1 . 9-1 10 H 10-1 . 10-1 10-2 . 10-1 11 K 11-1 . 11-1 11-2 . 11-1 12 L 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 13 R 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 T 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 14-5 .

value (main display). (1) Press and hold the SET button between 1 and 3 seconds in measurement mode.

Valve diagnostics 1 Table. 5-4 Valve diagnostics 1 Bit Description Explanation 0 Valve 0, 1 diagnostics 0: No error, 1: Short circuit 1 Valve 2, 3 diagnostics 0: No error, 1: Short circuit 2 Valve 4, 5 diagnostics 0: No error, 1: Short circuit 3 Valve 6, 7 diagnostics 0: No error, 1: Short circuit 4 Valve 8, 9 diagnostics 0: No error, 1: Short circuit 5 Valve 10, 11 diagnostics 0: No error

(3) Para protec a) Profaile View (V) 4.1 (1-1-2) View (V) Profaile b) Para protec Edit c) OK d) Download , e) 32 No.SFOD-OMT0011CN-A 4.3 PLC (: (1) 2 1-11-2 (1-1) a) View (V) 4.1 (1-1-2) View (V) b) Step No.Movement mode , Movement mode c) (0,0) (No.

Setting Software Functions . 11 4.1 Various windows . 11 (1) Main window . 11 (2) Status window . 20 (3) Teaching window . 23 (4) Parameter window . 26 (5) Step Data window . 27 (6) Alarm window . 28 (7) Test Drive window . 30 4.2.

M18 x 190 l M18 x 200 l 190 200 C (D) Q2B18075DC C (D) Q2B20075DC M18 x 215 l M18 x 225 l 215 225 C (D) Q2B180-100DC C (D) Q2B200-100DC 3 Series CQ2 Compact Cylinder Double Acting: Single Rod Dimensions (mm) Dimensions are the same with and without auto switches. 1in = 25.4mm 180 2 x 4-31.5 depth of counter bore 26 29 29 2-Rc 1/2 (port size) 40 52 52 4-19 through 162 204 4.5 3 Note 1) Flat

2 10 . 4 Maintenance . 10 2 Chapter 11 Specification for Option M 11 . 1 Safety instructions . 11 1 11 . 2 Specifications . 11 1 11 . 3 Installation of motor type auto drain . 11 2 11 . 4 Electric wiring diagram . 11 2 Chapter 12 Specification for Option R 12 . 1 Safety instructions . 12 1 12 . 2 Specifications . 12 1 12 . 3 Power supply connection procedure . 12 1 12 . 4 Cautions for handling

Approx. 1.1 mm Insulator Colours Brown, blue, black, white Sheath Finish O.D. 4 -53No.PF-OMX0007-A Characteristics data Flow rate/Analogue output 0 L/min A 2 B 0 L/min C 2 D Voltage output (1 to 5 V) 1 1 V 1.04 V 5 V Voltage output (0 to 10 V) 1, 3 0 V 0.1 V 10 V Current output 1 4 mA 4.16 mA 20 mA Models Minimum value of rated flow range *4 Maximum value of rated flow range PF3A701H 10 L

Size Symbol SMC SMC 2 2 1 2 2 2 2 A B C 6 x 4 4 x 3 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" SMC P Panel mount union U Union : Basic size : With reducer : Basic size : With reducer Note) Check the IN/OUT side fitting size and fitting type for selecting the fitting. SMC E 2A S LQ3 LQ3 fittings Caution 1.

Dimensions [mm] Auto drain (1.0 MPa) Auto drain (1.6 MPa) Drain guide B C D E F G Bracket related dimensions Model Port size A H I J K L M N O P AFF70D, AM70D, AMD70D 1, 1 1/2 391.5 379.5 382 31.5 144 136 68 23 40 124 82 48.4 90 18 9 16 10 2.6 AFF80D, AM80D, AMD80D 1 1/2 404 392 394.5 38 170 160 80 23 40 148 93.5 58.5 110 22 11 20 12 3.2 AFF90D, AM90D, AMD90D 1 1/2, 2 470 458 460.5 38 170

adjustment bolt 2-6.6 through 72 13 Adjustment: Max. 10.3 6 2-M5 x 0.8 2 8 A port 1 B port +0.030 0 3-4H9 long groove depth 3 ( A , B , C ) 8g6 0.005 0.014 16h9 0 0.043 4-M6 x 1 depth 11 50 0 0.074 53.5h9 48 9 Rotary Table High Precision Type Series MSUA These drawings indicate the condition when the B port is pressurized.

1 FE - 3 2 1 0 3 2 1 1 0 25 24 23 22 21 20 19 18 17 16 15 14 25 24 23 22 21 20 19 18 17 16 15 14 Digital I/O unit Digital output unit EX600-DM E EX600-DM F EX600-DY E EX600-DY B EX600-DY F Configuration Configuration Configuration Configuration Configuration 3 4 1 2 5 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 2 1 3 5 4 7 6 9 8 11 10 13 12 2 1 3 5 4 7 6 9 8 11 10

Note 10) A reference value for correcting an error in reciprocal operation -11- 2.2 How to Order (1) LEMB (Basic type) (2) LEMC (Cam follower guide type) LEMB 25 T 300 S 1 6N 1 LEMB(Basic type) Actuator cable length Size Stroke adjustment unit(include) Nil Without cable 8 8m 25 32 Nil None M Motor side only E End side only W Both side 1 1.5m A 10m 3 3m B 15m 5 5m C 20m Produced upon receipt

Multi-port Min. hole diameter A B C D E F G H J ZNC20 10 or less 8.3 or less 1 or more 10 or less 8.3 or less 1 or more 10 or less 2.5 or more ZNC30 8.3 or less 3.6 or more ZNC(40, 60) 11.3 or less 3.9 or more 11 or less 1.2 or more 11 or less 1.2 or more 11 or less ZNC80 16.8 or less 2.7 or more 15 or less 16.2 or less 4.5 or more 18 ZNC Series Specific Product Precautions 5 Be sure to