sizeAmbient and fluid temperatureEffective area (mm2)Mass (kg)Electrical specificationsPilot valve manual override1(P) 2(A)2(A) 3(R)Rated coil voltageAllowable voltage fluctuationCoil insulation typeApparent power AC(Current consumption)Current consumption DCElectrical entryOption specificationsAV30003/81.5 MPa0.2 to 1 MPa1/80 to 60C (1)37490.48100, 200, 110 to 120, 220 VAC (50/60 Hz), 240

sizeAmbient and fluid temperatureEffective area (mm2)Mass (kg)Electrical specificationsPilot valve manual override1(P) 2(A)2(A) 3(R)Rated coil voltageAllowable voltage fluctuationCoil insulation typeApparent power AC(Current consumption)Current consumption DCElectrical entryOption specificationsAV40001/21.5 MPa0.2 to 1 MPa1/80 to 60C (1)61760.74100, 200, 110 to 120, 220 VAC (50/60 Hz), 240

sizeAmbient and fluid temperatureEffective area (mm2)Mass (kg)Electrical specificationsPilot valve manual override1(P) 2(A)2(A) 3(R)Rated coil voltageAllowable voltage fluctuationCoil insulation typeApparent power AC(Current consumption)Current consumption DCElectrical entryOption specificationsAV40001/21.5 MPa0.2 to 1 MPa1/80 to 60C (1)61760.74100, 200, 110 to 120, 220 VAC (50/60 Hz), 240

Compact Guide Cylinder

26 58 16 46 33 7 6 88 98 22 32 5.5 5 30 64 20 53 37 8 8 102 112 24 38 5.5 6 36 83 25 53.5 37.5 9 7 114 126 30 40 6.6 6 42 93 32 59.5 37.5 10 12 138 154 34 50 9 9 48 112 40 66 44 10 12 146 162 40 60 9 9 54 120 50 72 44 12 16 178 198 46 65 11 10 64 148 63 77 49 12 16 192 212 58 75 11 10 78 162 80 96.5 56.5 16 24 238 262 54 90 13.5 16 91.5 202 100 116 66 19 31 280 308 62 100 15.5 22 111.5 240

10

switch mounting groove (4 locations)1 M5 x 0.8 (Finger closing port) H 55 22.6 6.5 0.5 10 9 16.5 19 15 23 6 Width across flats 10 39 19 (4 locations) K (58) 25 19 8 Closed E 9 9 25 Open F 13 13 43 G 4 x M5 x 0.8 through (Thread for mounting attachment) Model A B C D E F G H J MHL2-16DZ 40 45 60 28 68 98 128 26 98 MHL2-16D1Z 70 75 90 58 110 170 200 50 152 MHL2-16D2Z 90 95 110 78 130 210 240

SL5200

pressure: 30 psig (0.21 MPa) 1/2 inch connections ) SL5800 Inlet pressure: 100 psig (0.69 MPa) 1/2 inch connections ) 35 0.24 30 0.21 30 0.21 25 0.17 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 25 0.17 20 0.14 20 0.14 15 0.10 15 0.10 10 0.07 10 0.07 5 0.03 5 0.03 0 0.00 0 0.00 0 20 40 60 80 100 Flow rate (slpm, N2) 0 40 80 120 160 200 240

CLK1

Auto Switch Weights Unit: g Auto Switch Internal Circuits Lead wire length Model 3m 5m D-P5DWL 150 240 Indicate "Z" at the end of the model number for 5m lead wire.

A

How to Find the Flow Rate (at air temperature of 20C) Choke flow: when (P2 + 0.1)/(P1 + 0.1) 0.5 293 273 + t Q = 120 x S x (P1 + 0.1) x Subsonic flow: when (P2 + 0.1)/(P1 + 0.1) > 0.5 Q = 240 x S x (P1 P2)(P2 + 0.1) x 293 273 + t Q : Air flow rate [l/min (ANR)] S : Effective area (mm) P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] t : Air temperature Note) Formulas above apply

High Purity Fluoropolymer

How to Order Burst pressure drop curve 1.00 Length TL0604 TIL01 20 20 Symbol 20 50 100 2S Type Length 20 m 50 m 100 m 2 m Metric sizes Burst pressure drop coefficient 0.80 Roll Inch sizes 0.60 Straight Please refer to the series chart and specifications. 0.40 Tubing Model 0.20 Eluting fluorine ion amount (g/g) Eluting metal ion amount (ng/cm2) 0.00 20 40 60 80 100 120 140 160 180 200 220 240

Pneumatic Purification

and Filterstop SPECIFICATIONS Timer Solid-state construction Status Indication Power ON / Valve OPEN Interval Time 0.5 to 45 minutes (as required) Discharge Time 0.5 to 10 seconds (as required) Electrical Connection DIN 46242 LED indicators show operational status Test button for maintenance check UL and CSA approved PART NUMBER DESCRIPTION SL-W Timer, cord, filterstop, 3/8 valve 24 to 240

MIW/MIS

(Rear end stroke only) Scraper Theoretical Outputs Operating pressure MPa Unit: N Operating direction Piston area (mm2) Rod size (mm) Bore size (mm) 0.3 0.2 0.4 0.5 0.6 0.7 34 23 OUT 45 57 68 79 113 12 6 26 17 IN 34 43 51 60 85 94 63 OUT 126 157 188 220 314 20 10 71 47 IN 94 118 142 165 236 Weights Unit: g Increase by stroke adjuster Stroke mm Weight g Increase by scraper Model Model 12 240

VT325

DC: Can be attached to Grommet, Conduit, Conduit terminal. 220 VAC, 50/60 Hz VG 3 8 03 5 6 24 VDC S T Conduit terminal Without connection port (For manifold) 00 12 VDC TL Terminal with indicator light VP 9 7 240 VAC, 50/60 Hz Other DLDIN terminal with indicator light S070 Option For the coil rated voltage (option ), please contact SMC.

3 Port Solenoid Valve Metal Seal Series VZ200 1

DXT170-176-2-01 DXT170-176-2-02 100V 200V 100 VAC 200 VAC DXT170-176-2-03 110V 110 VAC DXT170-176-2-04 220V 220 VAC DXT170-176-2-07 DXT170-176-3-51 DXT170-176-3-06 DXT170-176-3-05 DXT170-176-3-53 240V 6VD 12VD 24VD 48VD 240 VAC 6 VDC 12 VDC 24 VDC 48 VDC Circuit with Indicator Light AC circuit DC circuit NL: Neon bulb R: Resister D: Protective diode LED: Light emitting diode R: Resistor 4

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 185 185 187 188 191 191 193 194 195 195 197 198 201 201 202 203 207 207 208 209 210 216 217 227 227 229 230 237 237 239 240 243 243 245 246 251 251 253 254 263 How to Order . Specifications. Dimensions .

VQC

Current consumption Note 2) Max. 100 mA Max. 65 mA SQ Input/output specifications Number of inputs 8 4 VQ0 Number of outputs 8 4 24 VDC 10% Valve supply voltage VQ4 Possible supply current Note 3) Max. 240 mA Max. 120 mA VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

sizeAmbient and fluid temperatureEffective area (mm2)Mass (kg)Electrical specificationsPilot valve manual override1(P) 2(A)2(A) 3(R)Rated coil voltageAllowable voltage fluctuationCoil insulation typeApparent power AC(Current consumption)Current consumption DCElectrical entryOption specificationsAV50003/41.5 MPa0.2 to 1 MPa1/80 to 60C (1)1131321.60100, 200, 110 to 120, 220 VAC (50/60 Hz), 240

sizeAmbient and fluid temperatureEffective area (mm2)Mass (kg)Electrical specificationsPilot valve manual override1(P) 2(A)2(A) 3(R)Rated coil voltageAllowable voltage fluctuationCoil insulation typeApparent power AC(Current consumption)Current consumption DCElectrical entryOption specificationsAV50003/41.5 MPa0.2 to 1 MPa1/80 to 60C (1)1131321.60100, 200, 110 to 120, 220 VAC (50/60 Hz), 240

sizeAmbient and fluid temperatureEffective area (mm2)Mass (kg)Electrical specificationsPilot valve manual override1(P) 2(A)2(A) 3(R)Rated coil voltageAllowable voltage fluctuationCoil insulation typeApparent power AC(Current consumption)Current consumption DCElectrical entryOption specificationsAV50003/41.5 MPa0.2 to 1 MPa1/80 to 60C (1)1131321.60100, 200, 110 to 120, 220 VAC (50/60 Hz), 240

sizeAmbient and fluid temperatureEffective area (mm2)Mass (kg)Electrical specificationsPilot valve manual override1(P) 2(A)2(A) 3(R)Rated coil voltageAllowable voltage fluctuationCoil insulation typeApparent power AC(Current consumption)Current consumption DCElectrical entryOption specificationsAV30003/81.5 MPa0.2 to 1 MPa1/80 to 60C (1)37490.48100, 200, 110 to 120, 220 VAC (50/60 Hz), 240

sizeAmbient and fluid temperatureEffective area (mm2)Mass (kg)Electrical specificationsPilot valve manual override1(P) 2(A)2(A) 3(R)Rated coil voltageAllowable voltage fluctuationCoil insulation typeApparent power AC(Current consumption)Current consumption DCElectrical entryOption specificationsAV50003/41.5 MPa0.2 to 1 MPa1/80 to 60C (1)1131321.60100, 200, 110 to 120, 220 VAC (50/60 Hz), 240