MXF

31 20.5 13 18 58 3H9 depth 3 +0.025 0 15 9.5 4-3.2 4-6.5 4.5 4.7 2-M3 x 0.5 thread depth 6 A G H 8 4-M4 x 0.7 Operating port 2-M3 x 0.5 Section AA M 8 N 2 ( 1): The number of pitches 0.3 15 (Table length) 16 4.5 J 8 Z 2.4 Max. 9 ZZ H G 3H9 depth 3 +0.025 0 21 4 3H9 depth 3 +0.025 0 (mm) ZZ Z M J H G F N Model MXF8-10 58 49.5 49 21 22 13.5 20 4 MXF8-20 63 54.5 54 26 26 14.5 26 4 MXF8-30

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

21 Series MXP Proper Auto Switch Mounting Position (Detection at stroke end) Operating Range MXP10/12/16 MXP6 Applicable bore size (mm) Auto switch model 6 10 12 16 Electrical entry from outside D-A9/A9V 5 3 (2.5) 5 3 (2.5) 5 3 (2.5) 5 3 (2.5) A A D-M9/M9V/F9W/F9WV Note) Figures in parentheses are the cases for D-M9, D-M9V switch types.

Title not found

(N.C.) 21 Series LECP6 Series LECA6 Step Data Setting 1. Step data setting for positioning 2. Step data setting for pushing In this setting, the actuator moves toward and stops at the target position. The following diagram shows the setting items and operation. The setting items and set values for this operation are stated below.

240

0.05 mm Possible to set position, speed and force. (64 points) LEF LEJ LEL LEM Rod Type LEPY Series Page 374 Size: 6, 10 LEPY6-25 240 g Weight LEY LES LEPY LEPS LEPY LEPS LER LEH LEY -X5 30 mm 11LEFS 125.6 mm 11LEJS 20.5 mm 25ASlide Table Type LEPS Series Page 383 Size: 6, 10 LEC LEPS6-25 290 g Weight LEC S LEC SS-T LEC Y Linear guide integrated Motorless LAT 41 mm LZ LC3F2 138.6 mm 21

0.01

) Seal conduit entry Terminal block box wiring diagram 874 A Air Catch Sensor Series ISA2 Dimensions: Individual Wiring Type With bracket L1 L2 3 L2 5 38 3 38 LED level meter LED level meter ZSE30 ISE30 Lead wire connector EXH port EXH port End plate L End plate L End plate R ZSE40 ISE40 3 0 3 0 3 0 ZSE10 ISE10 92 21 92 21 P P P T T T U U U E E E L L L S S S L L L 5.5 81 5.5 81 6 9 6 9 6

Nozzle Type Ionizer

Air purge Intermittent control timer 2-port solenoid valve Ionizer 3 Nozzle Type Ionizer IZN10E Series Nozzle variations Made to order p. 21 With right angles -X367 360 rotation 2 types of nozzles *1 Installation distance: 100 mm Energy saving static neutralization nozzle Short range static neutralization Design focuses on offset voltage.

Integrated Controller

Please contact SMC for further details. 6 CONTENTS Easy to Operate Integrated Controller Slider Type EQFSH Series p. 8 Battery-less Absolute (Step Motor 24 VDC) Model Selection p. 9 How to Order p. 17 Specifications p. 18 Construction p. 20 Dimensions p. 21 Rod Type EQYH Series p. 36 Battery-less Absolute (Step Motor 24 VDC) Model Selection p. 37 How to Order p. 43 Specifications

PFxx-OMO0004CN

21 2x G1/4 -77No.PF-OMO0004CN-E PFMB7201S-F02L 2x G1/4 21 -78No.PF-OMO0004CN-E PFMB7201-C8 2x -79No.PF-OMO0004CN-E PFM7B7201-C8L 2x -80No.PF-OMO0004CN-E PFMB7201S-C8 2x -81No.PF-OMO0004CN-E PFMB7201S-C8L 2x -82No.PF-OMO0004CN-E (ZS-33-F) A 54 +0.5 0 74 +0.5 0 13.2 mm 1, -83No.PF-OMO0004CN-E (ZS-33-M) (ZS-33-MS) (ZS-33-D) -84No.PF-OMO0004CN-E Revision history A B C [2016 9 ] D

Air cooled Thermo-con (Compact type)

History History Version Preface Contents Chap.1 Chap.2 Chap.3 Chap.4 1.0 Feb/19/21 Feb/19/21 Feb/19/21 Feb/19/21 Feb/19/21 Feb/19/21 Record of Changes Version Contents Date 1.0 First edition Feb/19/21 INR-244-831 i Preface Preface Thank you very much for purchasing SMC Thermo-con.

MRQB-OM0002

2 13 3. 3. 3. 3. 3-1. ,,,2 2 3-2. 2 2 2 32 40 VF3000 VZ3000 AS2000 6/4 14 4. 4. 4. 4. 4-1. , ,, ,4.1 , ,4.1 ,,, 4.1 4.1 [N] 5 10 15 20 25 30 40 50 75 100 32 14 13 13 13 13 13 12 11 10 9 40 23 22 22 21 21 21 19 18 16 15 , , , 4.24.34.2, 15 4.2 4.2 [N] [MPa] [mm 2] 0.15 0.2 0.3 0.4 0.5 0.6 0.7 [mm] OUT 804 121 161 241 322 402 482 536 32 12.2 IN 675 101 135 202 270 337

1.63

MGF MGPWL, MGPWA Common Dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA DB FA FB G GA GB H J K L MM ML MGZ 20 25 32 40 50 63 34 35 37 41 42 49 10 10 14 14 18 18 10 13 16 16 20 20 7.5 9 10 10 12.5 12.5 3 3 5 5 6 6 36 42 48 54 64 78 9.9 10.3 11.4 13.5 14 15.5 7.5 8.7 9 10.5 11.1 13.5 137 157 190 206 258 286 18 21 24 27 32 39 18 21 24 27 32 39 24 30 34 40 46 58 M5 x 0.8 M6 x 1 M8

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

1/8 (Finger closing port) 45 DAuto Switch Mounting Groove Dimensions 2032.9 20 20 51 O S 11 11 Rc 1/8 (Finger operating port) 25 13 MHW2-32D1 Right angle finger type 5 6.45 5.5 44 21 14 20 7 18 4-M6 x 1 (Thread for mounting attachment) 34 27 51 12-10-21 21 Series MHW2 Dimensions MHW2-40D Flat finger type (Standard) 30 2-M8 x 1.25 thread depth 15 (Mounting hole) 27.5 104.5 4-M8 x 1.25 thread

Series CQ2

) Width across flats 55 Width across flats 55 M36 x 1.5 M36 x 1.5 21 21 47 47 50 50 64 + Stroke 64 237 + 2 (strokes) 8 Compact Cylinder Series CQ2 Reed Switches/Direct Mounting Type D-Z73/Z76/Z80 Auto Switch Specifications With indicator light D-Z73 D-Z76 Auto switch part no.

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

port) 5 MHW2-25D1 Right angle finger type 6.45 5.5 37 18 12 6 15 16 4-M5 x 0.8 (Thread for mounting attachment) 30 45 21 12-10-20 20 180 Angular Style Air Gripper Rack & Pinion Style Series MHW2 MHW2-32D Flat finger type (Standard) 24 MHZ MHF 2-M6 x 1 thread depth 10 (Mounting hole) 21 MHL 61.5 83.5 MHR 4-M6 x 1 thread depth 12 (Mounting thread) 2-M6 x 1 thread depth 12 47 Bottom through

KS/KX

Weight (g) D1 D2 L1 L2 A M Urethane M5 X 0.8 M6 X 1.0 20.5 21 22 KSL04-M5 KSL04-M6 KSL04-01S KSL06-M5 KSL06-M6 KSL06-01S KSL06-02S KSL08-01S KSL08-02S KSL08-03S KSL10-02S KSL10-03S KSL10-04S KSL12-03S KSL12-04S 8 9 4 10.4 12 21 16 2.5 3.5 3.5 23.5 23.5 12 14 1 8 M5 X 0.8 M6 X 1.0 22 21 21.5 23 26 26.5 29.5 31 34 35 38 36.5 39.5 2.5 3 3.5 5.0 3.5 5.0 8 12 24 12.8 14 23 17 6 25.5 26.5

MGC

M6 X 1 M5 X 0.8 MGF 153 80 37 30 25 44 47 98 13 31 12 21 M6 X 1 M5 X 0.8 161 82 37 25 28.5 50 53 112 16 38 12 21 M6 X 1 Rc(PT)1/8 CY1 188 92 44 20 33 60 63 132 20 47 12 25 M8 X 1.25 Rc(PT)1/8 241 104 55 20 40.5 70 73 162 25 58 14 26 M8 X 1.25 Rc(PT)1/4 MY1 Without rear plate Bracket mounting stroke Long stroke Bracket mounting stroke stroke range (mm) Bore (mm) Bore (mm) Bore (mm) Y R Z

MHY2/MHW2

MHK MHS 32.9 20 20 51 O S 11 11 Rc(PT)1/8 (Finger opening port) MHC2 25 13 MHT2 5 MHW2-32D1 MHY2 6.45 5.5 Right angle finger MHW2 MRHQ Auto switch 44 21 14 MHW2-32D.SMHW2, #3 MHW2-32D1.SMHW2, #6 20 18 7 27 4-M6 X 1 (Thread for mounting attachment) 34 2.8-21 51 Series MHW2 Dimensions MHW2-40D Flat finger (Standard) 30 2-M8 X 1.25 Depth 15 (Mounting thread) 27.5 104.5 4-M8 X 1.25 Depth 16

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

21.5 28 34 41 6 6 6 8 16 21 25 30 6.3 12 10.3 18 7 10 11.5 14 3/16 3/16 +0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.002 0 #8-32UNC 3/16 3/16 #10-32UNF 5/16 5/16 1/4-28UNF 3/8 3/8 Knuckle pin and snap ring are contained.

Sine Rodless Cylinder Series REBR Direct Mount Type

Content Hard steel wire Nickel plated (REBR15) C type snap ring for shaft 16 Stainless steel REBR25,32 REBR15-PS REBR25-PS REBR32-PS 15 Above numbers Hexagon socket head set screw Nickel plated Chromium steel 17 25 19, 20, 21, 22, 23, 24, 25, 30 Nickel plated Hexagon socket head plug 32 Chromium steel 18 Cylinder tube gasket NBR 19 Switch Rail Accessory Kits Bore size Stroke CYR E 25 Switch

Series LQ3 High Purity Fluororesin Fitting

M L K J H E t W1 W2 M 14 20 25 29 37 49 58 69 89 100 117 136 14.5 20.5 24.5 30.5 36.5 48.5 6 7 7 9 9 10 11 16 21 24 32 41 10 17 22.5 24.5 27 30 16 21 26 32 41 50 17 24 28 36 43 55 8 8 8 8 13 13 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3P1A LQ3P2A LQ3P3A LQ3P4A LQ3P5A LQ3P6A 1/4 (E) (E) L Panel Aperture (K) Straight Union : LQ3U (mm) Inch Size H Model Tubing O.D.